DE3679606D1 - Positionsmessvorrichtung mit optischen gittern. - Google Patents

Positionsmessvorrichtung mit optischen gittern.

Info

Publication number
DE3679606D1
DE3679606D1 DE8686305389T DE3679606T DE3679606D1 DE 3679606 D1 DE3679606 D1 DE 3679606D1 DE 8686305389 T DE8686305389 T DE 8686305389T DE 3679606 T DE3679606 T DE 3679606T DE 3679606 D1 DE3679606 D1 DE 3679606D1
Authority
DE
Germany
Prior art keywords
grating
halves
image
measuring device
position measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8686305389T
Other languages
English (en)
Inventor
Laurence John Robinson
Robert Martin Pettigrew
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Application granted granted Critical
Publication of DE3679606D1 publication Critical patent/DE3679606D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Pens And Brushes (AREA)
  • Road Signs Or Road Markings (AREA)
  • Measurement Of Optical Distance (AREA)
  • Body Structure For Vehicles (AREA)
  • Lasers (AREA)
  • Eye Examination Apparatus (AREA)
  • Valve-Gear Or Valve Arrangements (AREA)
DE8686305389T 1985-07-19 1986-07-14 Positionsmessvorrichtung mit optischen gittern. Expired - Fee Related DE3679606D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB858518290A GB8518290D0 (en) 1985-07-19 1985-07-19 Datum sensing

Publications (1)

Publication Number Publication Date
DE3679606D1 true DE3679606D1 (de) 1991-07-11

Family

ID=10582552

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8686305389T Expired - Fee Related DE3679606D1 (de) 1985-07-19 1986-07-14 Positionsmessvorrichtung mit optischen gittern.

Country Status (6)

Country Link
US (1) US4733968A (de)
EP (1) EP0209340B1 (de)
JP (1) JPS6222019A (de)
AT (1) ATE64198T1 (de)
DE (1) DE3679606D1 (de)
GB (1) GB8518290D0 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9023659D0 (en) * 1990-10-31 1990-12-12 Renishaw Plc Opto-electronic scale reading apparatus
GB2266142B (en) * 1992-04-15 1996-09-25 Butler Newall Ltd Improvements in or relating to methods and control systems for registering a datum position between two relatively movable components of a machine tool
CN100476365C (zh) * 2003-02-12 2009-04-08 三丰株式会社 位移检测光电式编码器
US20050259274A1 (en) * 2004-05-24 2005-11-24 Kuo-Chin Chuang Method and apparatus for measuring displacement

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3364813A (en) * 1963-09-06 1968-01-23 Nasa Usa Self-calibrating displacement transducer
US3535538A (en) * 1966-10-25 1970-10-20 Gulf General Atomic Inc Optical lever,and detecting system and plate assembly for use therewith
CH558517A (de) * 1973-07-16 1975-01-31 Zeiss Jena Veb Carl Messwertgeber fuer laengen- oder winkelmessung mit einem annaehernd sinusfoermigen ausgangssignal.
US4097734A (en) * 1977-02-09 1978-06-27 Keuffel & Esser Company Zero index for electro-optical measuring device
JPS6041283B2 (ja) * 1980-12-29 1985-09-14 日本電信電話株式会社 情報検索装置における微細間隔位置決め装置
JPS59182312A (ja) * 1983-03-31 1984-10-17 Futaba Corp モアレ縞を用いた測長装置

Also Published As

Publication number Publication date
GB8518290D0 (en) 1985-08-29
ATE64198T1 (de) 1991-06-15
EP0209340A2 (de) 1987-01-21
JPH0464566B2 (de) 1992-10-15
EP0209340B1 (de) 1991-06-05
US4733968A (en) 1988-03-29
JPS6222019A (ja) 1987-01-30
EP0209340A3 (en) 1988-09-21

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee