JPS6232403B2 - - Google Patents

Info

Publication number
JPS6232403B2
JPS6232403B2 JP57033307A JP3330782A JPS6232403B2 JP S6232403 B2 JPS6232403 B2 JP S6232403B2 JP 57033307 A JP57033307 A JP 57033307A JP 3330782 A JP3330782 A JP 3330782A JP S6232403 B2 JPS6232403 B2 JP S6232403B2
Authority
JP
Japan
Prior art keywords
image sensor
pattern
scale plate
light
optical position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57033307A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58150804A (ja
Inventor
Takeshi Ueda
Gotaro Odawara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Keihin Densokuki KK
Original Assignee
Keihin Densokuki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Keihin Densokuki KK filed Critical Keihin Densokuki KK
Priority to JP3330782A priority Critical patent/JPS58150804A/ja
Publication of JPS58150804A publication Critical patent/JPS58150804A/ja
Publication of JPS6232403B2 publication Critical patent/JPS6232403B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36Forming the light into pulses

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Optical Transform (AREA)
JP3330782A 1982-03-03 1982-03-03 光学的位置検出装置 Granted JPS58150804A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3330782A JPS58150804A (ja) 1982-03-03 1982-03-03 光学的位置検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3330782A JPS58150804A (ja) 1982-03-03 1982-03-03 光学的位置検出装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP1582587A Division JPS6333603A (ja) 1987-01-24 1987-01-24 光学的位置検出装置

Publications (2)

Publication Number Publication Date
JPS58150804A JPS58150804A (ja) 1983-09-07
JPS6232403B2 true JPS6232403B2 (de) 1987-07-14

Family

ID=12382894

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3330782A Granted JPS58150804A (ja) 1982-03-03 1982-03-03 光学的位置検出装置

Country Status (1)

Country Link
JP (1) JPS58150804A (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS633220A (ja) * 1986-06-23 1988-01-08 Keihin Densokuki Kk 光学式リニアスケ−ル
JPS6333603A (ja) * 1987-01-24 1988-02-13 Keihin Densokuki Kk 光学的位置検出装置
CA1338291C (en) * 1988-07-08 1996-04-30 William L. Hassler, Jr. Precision electronic absolute and relative position sensing device and method of using same
US5258931A (en) * 1988-07-08 1993-11-02 Parker-Hannifin Corporation Precision electronic absolute and relative position sensing device and method of using same
JP4885630B2 (ja) * 2006-07-05 2012-02-29 株式会社ミツトヨ 二次元エンコーダ、及び、そのスケール

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5185737A (ja) * 1974-12-27 1976-07-27 Yokogawa Electric Works Ltd Henihenkanki

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5185737A (ja) * 1974-12-27 1976-07-27 Yokogawa Electric Works Ltd Henihenkanki

Also Published As

Publication number Publication date
JPS58150804A (ja) 1983-09-07

Similar Documents

Publication Publication Date Title
EP0042179B1 (de) Codierer
US4988886A (en) Moire distance measurement method and apparatus
CN101368831B (zh) 绝对位置长度测量型编码器
US5214280A (en) Photoelectric position detector with offset phase grating scales
US4606642A (en) Measuring arrangement for the clear scanning of at least one reference mark allocated to a graduation
US5204524A (en) Two-dimensional optical encoder with three gratings in each dimension
JPS6261969B2 (de)
US3708681A (en) Position and velocity sensor
US3856400A (en) Apparatus for no-contact measurement having a multi-colored grating
US20160231143A1 (en) Position measurement encoder
JPS6232403B2 (de)
US4231662A (en) Phase shift correction for displacement measuring systems using quadrature
EP0694764A2 (de) Detektorreihe für interferometrische Messsysteme
JPS6333603A (ja) 光学的位置検出装置
JPS633220A (ja) 光学式リニアスケ−ル
JPS6243485B2 (de)
JPH05196451A (ja) 測長または測角装置
JP2571694B2 (ja) レベル測量用スタッフの光ファイバを利用した受光位置検出装置
GB1472454A (en) Method for determining the position of a focussing plane
JPS6117016A (ja) 平均化回折モアレ位置検出器
JP2711919B2 (ja) リニアスケール
JPH0411807B2 (de)
ATE64198T1 (de) Positionsmessvorrichtung mit optischen gittern.
EP0331353A2 (de) Ermittlung der Ortsänderung einer beweglichen, elektromagnetisch strahlenden Quelle
JPS59164910A (ja) 距離測定装置