ATE64198T1 - Positionsmessvorrichtung mit optischen gittern. - Google Patents

Positionsmessvorrichtung mit optischen gittern.

Info

Publication number
ATE64198T1
ATE64198T1 AT86305389T AT86305389T ATE64198T1 AT E64198 T1 ATE64198 T1 AT E64198T1 AT 86305389 T AT86305389 T AT 86305389T AT 86305389 T AT86305389 T AT 86305389T AT E64198 T1 ATE64198 T1 AT E64198T1
Authority
AT
Austria
Prior art keywords
grating
halves
image
measurement device
position measurement
Prior art date
Application number
AT86305389T
Other languages
English (en)
Inventor
Laurence John Robinson
Robert Martin Pettigrew
Original Assignee
Heidenhain Gmbh Dr Johannes
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heidenhain Gmbh Dr Johannes filed Critical Heidenhain Gmbh Dr Johannes
Application granted granted Critical
Publication of ATE64198T1 publication Critical patent/ATE64198T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Pens And Brushes (AREA)
  • Road Signs Or Road Markings (AREA)
  • Measurement Of Optical Distance (AREA)
  • Valve-Gear Or Valve Arrangements (AREA)
  • Body Structure For Vehicles (AREA)
  • Lasers (AREA)
  • Eye Examination Apparatus (AREA)
AT86305389T 1985-07-19 1986-07-14 Positionsmessvorrichtung mit optischen gittern. ATE64198T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB858518290A GB8518290D0 (en) 1985-07-19 1985-07-19 Datum sensing
EP86305389A EP0209340B1 (de) 1985-07-19 1986-07-14 Positionsmessvorrichtung mit optischen Gittern

Publications (1)

Publication Number Publication Date
ATE64198T1 true ATE64198T1 (de) 1991-06-15

Family

ID=10582552

Family Applications (1)

Application Number Title Priority Date Filing Date
AT86305389T ATE64198T1 (de) 1985-07-19 1986-07-14 Positionsmessvorrichtung mit optischen gittern.

Country Status (6)

Country Link
US (1) US4733968A (de)
EP (1) EP0209340B1 (de)
JP (1) JPS6222019A (de)
AT (1) ATE64198T1 (de)
DE (1) DE3679606D1 (de)
GB (1) GB8518290D0 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9023659D0 (en) * 1990-10-31 1990-12-12 Renishaw Plc Opto-electronic scale reading apparatus
GB2266142B (en) * 1992-04-15 1996-09-25 Butler Newall Ltd Improvements in or relating to methods and control systems for registering a datum position between two relatively movable components of a machine tool
EP1447648B1 (de) * 2003-02-12 2015-07-01 Mitutoyo Corporation Optischer Kodierer
US20050259274A1 (en) * 2004-05-24 2005-11-24 Kuo-Chin Chuang Method and apparatus for measuring displacement

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3364813A (en) * 1963-09-06 1968-01-23 Nasa Usa Self-calibrating displacement transducer
US3535538A (en) * 1966-10-25 1970-10-20 Gulf General Atomic Inc Optical lever,and detecting system and plate assembly for use therewith
CH558517A (de) * 1973-07-16 1975-01-31 Zeiss Jena Veb Carl Messwertgeber fuer laengen- oder winkelmessung mit einem annaehernd sinusfoermigen ausgangssignal.
US4097734A (en) * 1977-02-09 1978-06-27 Keuffel & Esser Company Zero index for electro-optical measuring device
JPS6041283B2 (ja) * 1980-12-29 1985-09-14 日本電信電話株式会社 情報検索装置における微細間隔位置決め装置
JPS59182312A (ja) * 1983-03-31 1984-10-17 Futaba Corp モアレ縞を用いた測長装置

Also Published As

Publication number Publication date
GB8518290D0 (en) 1985-08-29
JPH0464566B2 (de) 1992-10-15
EP0209340A2 (de) 1987-01-21
EP0209340B1 (de) 1991-06-05
JPS6222019A (ja) 1987-01-30
DE3679606D1 (de) 1991-07-11
US4733968A (en) 1988-03-29
EP0209340A3 (en) 1988-09-21

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee