JPS5786007A - Interference gauge - Google Patents

Interference gauge

Info

Publication number
JPS5786007A
JPS5786007A JP56149289A JP14928981A JPS5786007A JP S5786007 A JPS5786007 A JP S5786007A JP 56149289 A JP56149289 A JP 56149289A JP 14928981 A JP14928981 A JP 14928981A JP S5786007 A JPS5786007 A JP S5786007A
Authority
JP
Japan
Prior art keywords
interferometer
detection system
grating
measuring
photodiodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56149289A
Other languages
Japanese (ja)
Inventor
Konpaan Kuraasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of JPS5786007A publication Critical patent/JPS5786007A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P13/00—Indicating or recording presence, absence, or direction, of movement
    • G01P13/02—Indicating direction only, e.g. by weather vane
    • G01P13/04—Indicating positive or negative direction of a linear movement or clockwise or anti-clockwise direction of a rotational movement
    • G01P13/045—Indicating positive or negative direction of a linear movement or clockwise or anti-clockwise direction of a rotational movement with speed indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02063—Active error reduction, i.e. varying with time by particular alignment of focus position, e.g. dynamic focussing in optical coherence tomography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means

Abstract

Interferometers are known for measuring the displacement of an object 6 with an accuracy of a fraction of 1 mu m, having digital display, and forward/reverse motion discrimination. To avoid the use of a special frequency stabilised laser source producing oppositely polarised beams of different frequencies, an interferometer is provided having a simple laser source 1, in which an interference line pattern is formed on a detection system 20 having a moving grating-like structure whose grating period corresponds to the period of the interference pattern. The effect of a moving grating is provided by a detection system comprising a linear array of photodiodes in which sequential activation of interjacent groups of photodiodes by a ring counter moves an effective grating pattern along the array. By counting the number of periods in the output signal of the detection system, changes in the measuring arm b of the interferometer can be measured with high accuracy. The interferometer may assist in measuring and controlling the movement of an optical recording head (Figure 7). <IMAGE>
JP56149289A 1980-09-22 1981-09-21 Interference gauge Pending JPS5786007A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL8005258A NL8005258A (en) 1980-09-22 1980-09-22 INTERFEROMETER.

Publications (1)

Publication Number Publication Date
JPS5786007A true JPS5786007A (en) 1982-05-28

Family

ID=19835908

Family Applications (2)

Application Number Title Priority Date Filing Date
JP56149289A Pending JPS5786007A (en) 1980-09-22 1981-09-21 Interference gauge
JP62193850A Pending JPS63100626A (en) 1980-09-22 1987-08-04 Information recorder

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP62193850A Pending JPS63100626A (en) 1980-09-22 1987-08-04 Information recorder

Country Status (9)

Country Link
JP (2) JPS5786007A (en)
AU (1) AU551571B2 (en)
CA (1) CA1163094A (en)
DE (1) DE3137211C2 (en)
FR (1) FR2490808B1 (en)
GB (1) GB2084315B (en)
IT (1) IT1139451B (en)
NL (1) NL8005258A (en)
SE (1) SE8105526L (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59134005U (en) * 1983-02-23 1984-09-07 横河電機株式会社 Optical mechanical quantity measuring device
JPS6173003A (en) * 1984-09-18 1986-04-15 Yamazaki Mazak Corp Laser length measuring machine
JPS63151802A (en) * 1986-12-17 1988-06-24 Rikagaku Kenkyusho High preciseness polarizing interferometer
JPS63238504A (en) * 1987-03-27 1988-10-04 Satoru Toyooka Interferometer for displacement measurement
JPH01250804A (en) * 1988-03-31 1989-10-05 Tokyo Seimitsu Co Ltd Interferometer

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8201975A (en) * 1982-05-13 1983-12-01 Philips Nv LASER DEVICE AND INTERFEROMETER CONTAINING SUCH LASER DEVICE.
JPS6070563A (en) * 1983-09-27 1985-04-22 Toshiba Corp High density spiral drawing device
GB8415670D0 (en) * 1984-06-20 1984-07-25 Penlon Ltd Gas analysis apparatus
GB2191855A (en) * 1986-05-07 1987-12-23 Univ London Method and apparatus for detecting reflection sites
FR2601128A1 (en) * 1986-07-03 1988-01-08 Etu Rech Machine Outil Centre Laser source roughness meter for analysis and quality control of mechanical surfaces
DE3642055A1 (en) * 1986-12-09 1988-07-07 Wolfgang Dr Littmann Device for directly converting sound into digital information, digital microphone
DE3707331A1 (en) * 1987-03-07 1988-09-15 Zeiss Carl Fa INTERFEROMETER FOR MEASURING OPTICAL PHASE DIFFERENCES
CH676289A5 (en) * 1987-03-24 1990-12-28 Wild Leitz Ag
DE4204857C2 (en) * 1991-02-18 1998-01-22 Asahi Optical Co Ltd Method for examining a surface shape with an interferometer
GB9500110D0 (en) * 1995-01-05 1995-03-01 Renishaw Plc Laser interferometer
US5991249A (en) * 1997-07-29 1999-11-23 Hoetron, Inc. Optical track sensing device
US6723980B2 (en) 2001-07-16 2004-04-20 Wai-Hon Lee Position sensor with grating to detect moving object with periodic pattern
CN1322308C (en) * 2005-04-21 2007-06-20 中国科学院上海光学精密机械研究所 Micro-corner interferometer
JP5517665B2 (en) 2010-02-17 2014-06-11 フタバ産業株式会社 Exhaust system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4917264A (en) * 1972-06-03 1974-02-15

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3694088A (en) * 1971-01-25 1972-09-26 Bell Telephone Labor Inc Wavefront measurement
NL7403468A (en) * 1974-03-15 1975-09-17 Philips Nv DEVICE FOR DETERMINING THE MOVEMENT OF A PART OF A TOOL.
JPS6024401B2 (en) * 1975-06-28 1985-06-12 キヤノン株式会社 How to measure the physical constants of a measured object
DE2722887C2 (en) * 1977-05-20 1979-02-15 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V., 8000 Muenchen Device for measuring (calibrating) laser interferometers
US4157223A (en) * 1977-10-28 1979-06-05 The Perkin-Elmer Corporation Sliding reference interferometer
GB2008791B (en) * 1977-11-25 1982-04-28 Mckelvie J Method and apparatus for sensing inplane deformation of a surface
PL124778B1 (en) * 1978-11-03 1983-02-28 Inst Geodezji I Kartografii Apparatus for exact measurement of length and measuring system composed of such apparatuses
DD139760B1 (en) * 1978-11-27 1980-12-10 Werner Krieg INTERFEROMETRIC EQUIPMENT FOR MEASURING SPACES AND DISTANCE CHANGES

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4917264A (en) * 1972-06-03 1974-02-15

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59134005U (en) * 1983-02-23 1984-09-07 横河電機株式会社 Optical mechanical quantity measuring device
JPS6173003A (en) * 1984-09-18 1986-04-15 Yamazaki Mazak Corp Laser length measuring machine
JPS63151802A (en) * 1986-12-17 1988-06-24 Rikagaku Kenkyusho High preciseness polarizing interferometer
JPS63238504A (en) * 1987-03-27 1988-10-04 Satoru Toyooka Interferometer for displacement measurement
JPH01250804A (en) * 1988-03-31 1989-10-05 Tokyo Seimitsu Co Ltd Interferometer

Also Published As

Publication number Publication date
AU7546681A (en) 1982-04-01
CA1163094A (en) 1984-03-06
DE3137211A1 (en) 1982-05-13
IT8124043A0 (en) 1981-09-18
NL8005258A (en) 1982-04-16
DE3137211C2 (en) 1986-12-11
GB2084315B (en) 1984-10-24
IT1139451B (en) 1986-09-24
FR2490808B1 (en) 1986-05-09
AU551571B2 (en) 1986-05-08
FR2490808A1 (en) 1982-03-26
GB2084315A (en) 1982-04-07
SE8105526L (en) 1982-03-23
JPS63100626A (en) 1988-05-02

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