JPS57190202A - Device for reading optical scale - Google Patents

Device for reading optical scale

Info

Publication number
JPS57190202A
JPS57190202A JP56075581A JP7558181A JPS57190202A JP S57190202 A JPS57190202 A JP S57190202A JP 56075581 A JP56075581 A JP 56075581A JP 7558181 A JP7558181 A JP 7558181A JP S57190202 A JPS57190202 A JP S57190202A
Authority
JP
Japan
Prior art keywords
lens
scale
light
inputted
moving distance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56075581A
Other languages
Japanese (ja)
Other versions
JPS6126005B2 (en
Inventor
Hideto Iwaoka
Koji Akiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp, Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Electric Corp
Priority to JP56075581A priority Critical patent/JPS57190202A/en
Publication of JPS57190202A publication Critical patent/JPS57190202A/en
Publication of JPS6126005B2 publication Critical patent/JPS6126005B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Abstract

PURPOSE:To measure an accurate moving distance by detecting the diffracted light caused by laser light projected on the scale through a lens, a plurality of light receiving elements, and the optical scale which are arranged so as satisfy a specified relationship. CONSTITUTION:The luminous flux emitted from a laser light source 1 is converged by a lens L through a half mirror M and inputted to the scale 2 having a scale grid with an equal interval. The zero and linear diffracted lights pass the lens L via a stop and the like, and are reflected by the half mirror M and inputted to a light detector 3 comprising four light receiving elements A-D. Its outputs are inputted to a contol circuit 4 and a moving distance signal PA and a moving direction signal PB are sent to a display 5. With the center of the lens L as an original point, the equation H=fYd/(f-Yd) is satisfied, where (f) is the focal length of the lens L, Yd is the Y coordinate of a light receiving surface, H is the image position of the projected light, and (h) is the Y coordinate of reflecting surface of the scale 2. Since the pitch of interference fringes is not related to an operating distance (h), the accurate moving distance is measured.
JP56075581A 1981-05-19 1981-05-19 Device for reading optical scale Granted JPS57190202A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56075581A JPS57190202A (en) 1981-05-19 1981-05-19 Device for reading optical scale

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56075581A JPS57190202A (en) 1981-05-19 1981-05-19 Device for reading optical scale

Publications (2)

Publication Number Publication Date
JPS57190202A true JPS57190202A (en) 1982-11-22
JPS6126005B2 JPS6126005B2 (en) 1986-06-18

Family

ID=13580296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56075581A Granted JPS57190202A (en) 1981-05-19 1981-05-19 Device for reading optical scale

Country Status (1)

Country Link
JP (1) JPS57190202A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3700906A1 (en) * 1986-01-14 1987-07-16 Canon Kk SEALER
US4868385A (en) * 1985-07-10 1989-09-19 Canon Kabushiki Kaisha Rotating state detection apparatus using a plurality of light beams
US4967072A (en) * 1984-09-05 1990-10-30 Canon Kabushiki Kaisha Interferometric rotating condition detection apparatus
JP2014035216A (en) * 2012-08-07 2014-02-24 Fujitsu Ltd Optical rotary encoder and correction method thereof

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4967072A (en) * 1984-09-05 1990-10-30 Canon Kabushiki Kaisha Interferometric rotating condition detection apparatus
US4868385A (en) * 1985-07-10 1989-09-19 Canon Kabushiki Kaisha Rotating state detection apparatus using a plurality of light beams
DE3700906A1 (en) * 1986-01-14 1987-07-16 Canon Kk SEALER
JP2014035216A (en) * 2012-08-07 2014-02-24 Fujitsu Ltd Optical rotary encoder and correction method thereof

Also Published As

Publication number Publication date
JPS6126005B2 (en) 1986-06-18

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