CH626169A5 - - Google Patents
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- Publication number
- CH626169A5 CH626169A5 CH1407077A CH1407077A CH626169A5 CH 626169 A5 CH626169 A5 CH 626169A5 CH 1407077 A CH1407077 A CH 1407077A CH 1407077 A CH1407077 A CH 1407077A CH 626169 A5 CH626169 A5 CH 626169A5
- Authority
- CH
- Switzerland
- Prior art keywords
- grating
- constant
- scale
- photoelectric
- measuring device
- Prior art date
Links
- 238000006073 displacement reaction Methods 0.000 claims description 11
- 230000010363 phase shift Effects 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000005259 measurement Methods 0.000 description 10
- 230000004907 flux Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 101100116570 Caenorhabditis elegans cup-2 gene Proteins 0.000 description 1
- 101100116572 Drosophila melanogaster Der-1 gene Proteins 0.000 description 1
- 101100400378 Mus musculus Marveld2 gene Proteins 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19762653545 DE2653545C2 (de) | 1976-11-25 | 1976-11-25 | Fotoelektrische Auflicht-Wegmeßeinrichtung |
| DE19772714324 DE2714324C2 (de) | 1977-03-31 | 1977-03-31 | Fotoelektrische Auflicht-Wegmeßeinrichtung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH626169A5 true CH626169A5 (ja) | 1981-10-30 |
Family
ID=25771181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH1407077A CH626169A5 (ja) | 1976-11-25 | 1977-11-17 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US4176276A (ja) |
| CH (1) | CH626169A5 (ja) |
| GB (1) | GB1592705A (ja) |
Families Citing this family (40)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4395124A (en) * | 1977-12-23 | 1983-07-26 | Randwal Instrument Co., Inc. | Apparatus for position encoding |
| US4286871A (en) * | 1980-08-11 | 1981-09-01 | Keuffel & Esser Company | Photogrammetric measuring system |
| JPS57157118A (en) * | 1981-03-24 | 1982-09-28 | Mitsutoyo Mfg Co Ltd | Photoelectric type displacement detecting device |
| US4546347A (en) * | 1981-05-18 | 1985-10-08 | Mouse Systems Corporation | Detector for electro-optical mouse |
| AU576536B2 (en) * | 1983-02-16 | 1988-09-01 | E.I. Du Pont De Nemours And Company | Reflector type fibre encoder |
| US4725146A (en) * | 1983-09-30 | 1988-02-16 | Novon, Inc. | Method and apparatus for sensing position |
| DE3485115D1 (de) * | 1983-12-05 | 1991-10-31 | Du Pont | Lichtreflektionskodierungsverfahren und kodierer. |
| DE3417176C2 (de) * | 1984-05-09 | 1986-07-31 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Photoelektrische Meßeinrichtung |
| GB8413955D0 (en) * | 1984-05-31 | 1984-07-04 | Pa Consulting Services | Displacement measuring apparatus |
| GB8432574D0 (en) * | 1984-12-22 | 1985-02-06 | Renishaw Plc | Opto-electronic scale-reading apparatus |
| DE3541199C1 (de) * | 1985-11-21 | 1987-06-25 | Heidenhain Gmbh Dr Johannes | Lichtelektrische Positionsmesseinrichtung |
| GB8615196D0 (en) * | 1986-06-21 | 1986-07-23 | Renishaw Plc | Opto-electronic scale reading apparatus |
| US4912322A (en) * | 1986-08-15 | 1990-03-27 | Mitutoyo Mfg. Co., Ltd. | Optical type displacement detecting device |
| SE457568B (sv) * | 1987-06-03 | 1989-01-09 | Facit Ab | Optisk givare foer avkaenning av ett skrivhuvuds laege eller roerelse relativt en referens |
| US4984287A (en) * | 1988-11-15 | 1991-01-08 | Msc Technologies, Inc. | Method for orienting a dual mouse optical scanner |
| US4942621A (en) * | 1988-11-15 | 1990-07-17 | Msc Technologies, Inc. | Method for mapping scanned pixel data |
| US5012080A (en) * | 1990-04-19 | 1991-04-30 | Griscom Daniel T | Directional particle filter |
| DE59004252D1 (de) * | 1990-10-20 | 1994-02-24 | Heidenhain Gmbh Dr Johannes | Interferentielle Messeinrichtung für wenigstens eine Messrichtung. |
| JPH04208810A (ja) * | 1990-12-03 | 1992-07-30 | Omron Corp | 変位信号出力装置 |
| EP0541827B1 (de) * | 1991-11-04 | 1995-04-12 | Dr. Johannes Heidenhain GmbH | Vorrichtung zur Erzeugung oberwellenfreier periodischer Signale |
| US5283434A (en) * | 1991-12-20 | 1994-02-01 | Canon Kabushiki Kaisha | Displacement detecting device with integral optics |
| US5390022A (en) * | 1992-04-07 | 1995-02-14 | Canon Kabushiki Kaisha | Displacement information detection apparatus for receiving a divergent light beam |
| US5486923A (en) * | 1992-05-05 | 1996-01-23 | Microe | Apparatus for detecting relative movement wherein a detecting means is positioned in the region of natural interference |
| ATE182677T1 (de) * | 1992-05-05 | 1999-08-15 | Microe Inc | Apparat zum detektieren einer relativen bewegung |
| JPH06194123A (ja) * | 1992-12-24 | 1994-07-15 | Canon Inc | 変位検出装置 |
| JP3210111B2 (ja) * | 1992-12-24 | 2001-09-17 | キヤノン株式会社 | 変位検出装置 |
| JP3005131B2 (ja) * | 1992-12-28 | 2000-01-31 | キヤノン株式会社 | 変位検出装置 |
| JP3530573B2 (ja) * | 1994-04-27 | 2004-05-24 | キヤノン株式会社 | 光学式変位センサ |
| EP0978708B1 (de) * | 1998-08-01 | 2005-10-05 | Dr. Johannes Heidenhain GmbH | Rotatorische Positionsmesseinrichtung |
| EP1028309B1 (de) | 1999-02-04 | 2003-04-16 | Dr. Johannes Heidenhain GmbH | Optische Positionsmesseinrichtung |
| US20050175217A1 (en) * | 2004-02-05 | 2005-08-11 | Mueller Louis F. | Using target images to determine a location of a stage |
| FR2872899A1 (fr) * | 2004-07-09 | 2006-01-13 | Neviere Michel | Capteur optique de deplacement de resolution nanometrique |
| FR2872898A1 (fr) * | 2004-07-09 | 2006-01-13 | Neviere Michel | Capteur optique de deplacement de resolution nanometrique |
| FR2908880B1 (fr) * | 2006-11-21 | 2009-01-16 | Centre Nat Rech Scient | Dispositif de detection d'interferences monolithique integre |
| US9080899B2 (en) | 2011-12-23 | 2015-07-14 | Mitutoyo Corporation | Optical displacement encoder having plural scale grating portions with spatial phase offset of scale pitch |
| US8941052B2 (en) | 2011-12-23 | 2015-01-27 | Mitutoyo Corporation | Illumination portion for an adaptable resolution optical encoder |
| US9029757B2 (en) | 2011-12-23 | 2015-05-12 | Mitutoyo Corporation | Illumination portion for an adaptable resolution optical encoder |
| US9018578B2 (en) * | 2011-12-23 | 2015-04-28 | Mitutoyo Corporation | Adaptable resolution optical encoder having structured illumination and spatial filtering |
| US20140241731A1 (en) * | 2013-02-28 | 2014-08-28 | Harris Corporation | System and method for free space optical communication beam acquisition |
| DE102015209716B4 (de) | 2014-05-29 | 2023-04-20 | Mitutoyo Corporation | Optischer Codierer mit anpassbarer Auflösung |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3344700A (en) * | 1961-05-23 | 1967-10-03 | British Aircraft Corp Ltd | Displacement measuring system |
| GB1096022A (en) * | 1963-06-21 | 1967-12-20 | Cooke Conrad Reginald | Improvements in or relating to apparatus for detecting and indicating the extent of relative movement |
| GB1504691A (en) * | 1974-03-15 | 1978-03-22 | Nat Res Dev | Measurement apparatus |
| US4049965A (en) * | 1975-03-06 | 1977-09-20 | National Research Development Corporation | Measurement apparatus |
| GB1516536A (en) * | 1975-08-22 | 1978-07-05 | Ferranti Ltd | Measuring apparatus |
-
1977
- 1977-11-17 CH CH1407077A patent/CH626169A5/de not_active IP Right Cessation
- 1977-11-23 US US05/854,380 patent/US4176276A/en not_active Expired - Lifetime
- 1977-11-24 GB GB48944/77A patent/GB1592705A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| US4176276A (en) | 1979-11-27 |
| GB1592705A (en) | 1981-07-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PL | Patent ceased |