ATE182677T1 - Apparat zum detektieren einer relativen bewegung - Google Patents

Apparat zum detektieren einer relativen bewegung

Info

Publication number
ATE182677T1
ATE182677T1 AT93911085T AT93911085T ATE182677T1 AT E182677 T1 ATE182677 T1 AT E182677T1 AT 93911085 T AT93911085 T AT 93911085T AT 93911085 T AT93911085 T AT 93911085T AT E182677 T1 ATE182677 T1 AT E182677T1
Authority
AT
Austria
Prior art keywords
scale
detector
phase
orders
poly
Prior art date
Application number
AT93911085T
Other languages
English (en)
Inventor
Donald Mitchell
Original Assignee
Microe Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=25372143&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE182677(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Microe Inc filed Critical Microe Inc
Application granted granted Critical
Publication of ATE182677T1 publication Critical patent/ATE182677T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings
AT93911085T 1992-05-05 1993-05-04 Apparat zum detektieren einer relativen bewegung ATE182677T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US87849492A 1992-05-05 1992-05-05

Publications (1)

Publication Number Publication Date
ATE182677T1 true ATE182677T1 (de) 1999-08-15

Family

ID=25372143

Family Applications (1)

Application Number Title Priority Date Filing Date
AT93911085T ATE182677T1 (de) 1992-05-05 1993-05-04 Apparat zum detektieren einer relativen bewegung

Country Status (7)

Country Link
US (1) US5559600A (de)
EP (1) EP0639259B1 (de)
JP (1) JP3390440B2 (de)
AT (1) ATE182677T1 (de)
CA (1) CA2118110C (de)
DE (1) DE69325799T2 (de)
WO (1) WO1993022615A1 (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5486923A (en) * 1992-05-05 1996-01-23 Microe Apparatus for detecting relative movement wherein a detecting means is positioned in the region of natural interference
US5754295A (en) * 1996-12-20 1998-05-19 Microe, Inc. Non-contacting torque sensor and displacement measuring apparatus and method
US5909283A (en) * 1997-10-07 1999-06-01 Eselun; Steven Albert Linear encoder using diverging light beam diffraction
US6424407B1 (en) * 1998-03-09 2002-07-23 Otm Technologies Ltd. Optical translation measurement
US6144118A (en) * 1998-09-18 2000-11-07 General Scanning, Inc. High-speed precision positioning apparatus
US6188484B1 (en) 1998-10-29 2001-02-13 Maxtor Corporation Method and apparatus for measuring angular displacement of an actuator arm relative to a reference position
US6552802B1 (en) 1999-05-04 2003-04-22 Microe Systems, Inc. Apparatus and method for roll invariant reflective position sensing
DE19941318A1 (de) * 1999-08-31 2001-03-15 Heidenhain Gmbh Dr Johannes Optische Positionsmeßeinrichtung
CN1293367C (zh) * 2001-08-30 2007-01-03 Gsi集团公司 参考点泰伯编码器
US7002137B2 (en) * 2001-08-30 2006-02-21 Gsi Lumonics Corporation Reference point talbot encoder
WO2003021197A1 (en) * 2001-08-30 2003-03-13 Microe Systems Corporation Harmonic suppressing photodetector array
USRE42082E1 (en) 2002-02-14 2011-02-01 Faro Technologies, Inc. Method and apparatus for improving measurement accuracy of a portable coordinate measurement machine
US7043847B2 (en) * 2002-02-14 2006-05-16 Faro Technologies, Inc. Portable coordinate measurement machine having on-board power supply
US6973734B2 (en) * 2002-02-14 2005-12-13 Faro Technologies, Inc. Method for providing sensory feedback to the operator of a portable measurement machine
US7881896B2 (en) 2002-02-14 2011-02-01 Faro Technologies, Inc. Portable coordinate measurement machine with integrated line laser scanner
US6957496B2 (en) * 2002-02-14 2005-10-25 Faro Technologies, Inc. Method for improving measurement accuracy of a portable coordinate measurement machine
US7073271B2 (en) * 2002-02-14 2006-07-11 Faro Technologies Inc. Portable coordinate measurement machine
US6952882B2 (en) * 2002-02-14 2005-10-11 Faro Technologies, Inc. Portable coordinate measurement machine
US7246030B2 (en) * 2002-02-14 2007-07-17 Faro Technologies, Inc. Portable coordinate measurement machine with integrated line laser scanner
US7519493B2 (en) 2002-02-14 2009-04-14 Faro Technologies, Inc. Portable coordinate measurement machine with integrated line laser scanner
AU2003247899A1 (en) * 2002-07-08 2004-01-23 Microe Systems Corporation Multi-track optical encoder employing beam divider
US20070024865A1 (en) * 2005-07-26 2007-02-01 Mitchell Donald K Optical encoder having slanted optical detector elements for harmonic suppression
WO2008030681A2 (en) * 2006-09-08 2008-03-13 Gsi Group Corporation Interferometric position encoder employing spatial filtering of diffraction orders
GB2468263B (en) * 2008-08-28 2013-04-03 Faro Tech Inc Indexed optical encoder method for indexing an optical encoder, and method for dynamically adjusting gain and offset in an optical encoder
JP5170046B2 (ja) 2009-09-18 2013-03-27 株式会社安川電機 ロータリエンコーダ、ロータリモータ、ロータリモータシステム、ディスク及びロータリエンコーダの製造方法
EP2372302A1 (de) 2010-03-26 2011-10-05 Leica Geosystems AG Messverfahren für eine oberflächenvermessende Messmaschine
WO2011152076A1 (ja) 2010-05-31 2011-12-08 株式会社安川電機 ロータリエンコーダ、ロータリモータ及びロータリモータシステム
JP5126290B2 (ja) 2010-06-07 2013-01-23 株式会社安川電機 エンコーダ、サーボモータ、サーボユニット及びエンコーダの製造方法
CN103080701B (zh) 2010-09-02 2016-05-04 株式会社安川电机 编码器、伺服马达和马达单元
JP2018513385A (ja) 2015-04-22 2018-05-24 ファロ テクノロジーズ インコーポレーテッド 指標付き光学エンコーダ

Family Cites Families (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2316248A1 (de) * 1973-03-31 1974-10-10 Leitz Ernst Gmbh Fotoelektrischer schrittgeber
CH601799A5 (de) * 1974-01-12 1978-07-14 Leitz Ernst Gmbh
CH626169A5 (de) * 1976-11-25 1981-10-30 Leitz Ernst Gmbh
US4168908A (en) * 1977-12-30 1979-09-25 The United States Of America As Represented By The Secretary Of The Air Force Precision pointing and tracking control system
DE3275657D1 (en) * 1982-12-20 1987-04-16 Ibm Deutschland Interferential measuring method for surfaces
US4711573A (en) * 1983-03-07 1987-12-08 Beckman Instruments, Inc. Dynamic mirror alignment control
US4655587A (en) * 1983-03-07 1987-04-07 Beckman Instruments, Inc. Mirror scan velocity control
US4636077A (en) * 1983-04-15 1987-01-13 Matsushita Electric Industrial Co., Ltd. Aligning exposure method
DE3486178T2 (de) * 1983-11-04 1993-10-21 Sony Magnescale Inc Optisches Instrument zur Messung einer Verschiebung.
US4631416A (en) * 1983-12-19 1986-12-23 Hewlett-Packard Company Wafer/mask alignment system using diffraction gratings
GB8413955D0 (en) * 1984-05-31 1984-07-04 Pa Consulting Services Displacement measuring apparatus
US4967072A (en) * 1984-09-05 1990-10-30 Canon Kabushiki Kaisha Interferometric rotating condition detection apparatus
US4710026A (en) * 1985-03-22 1987-12-01 Nippon Kogaku K. K. Position detection apparatus
US4639863A (en) * 1985-06-04 1987-01-27 Plus Development Corporation Modular unitary disk file subsystem
US4703176A (en) * 1985-06-04 1987-10-27 Plus Development Corporation Compact polyphase optical position encoder
JPH0621801B2 (ja) * 1985-07-03 1994-03-23 キヤノン株式会社 ロ−タリ−エンコ−ダ−
JPS6212814A (ja) * 1985-07-10 1987-01-21 Canon Inc ロ−タリ−エンコ−ダ−
GB2185314B (en) * 1986-01-14 1990-09-26 Canon Kk Encoder
JPS62172203A (ja) * 1986-01-27 1987-07-29 Agency Of Ind Science & Technol 相対変位測定方法
US4731772A (en) * 1986-05-06 1988-03-15 Lee Wai Hon Optical head using hologram lens for both beam splitting and focus error detection functions
EP0248277A3 (de) * 1986-06-03 1990-03-28 Optra, Inc. Zwei-Frequenz-Laser-Rotationssensorsystem
US4872751A (en) * 1986-06-03 1989-10-10 Michael Hercher Non-contact lateral displacement sensor and extensometer system
US4776698A (en) * 1986-08-04 1988-10-11 Eastman Kodak Company Measuring
US4870635A (en) * 1986-09-19 1989-09-26 International Business Machines Corporation Precision measurement and positioning system for disk storage system
GB2197146B (en) * 1986-11-04 1991-05-29 Canon Kk An encoder for detecting the displacement of an object to be measured
US4728193A (en) * 1986-12-11 1988-03-01 Hughes Aircraft Company Precision automatic mask-wafer alignment system
US5066130A (en) * 1988-05-10 1991-11-19 Canon Kabushiki Kaisha Displacement measuring apparatus
JP2586120B2 (ja) * 1988-09-22 1997-02-26 キヤノン株式会社 エンコーダー
KR0144463B1 (ko) * 1988-10-26 1998-07-15 오오가 노리오 자기 디스크 장치
JP2785195B2 (ja) * 1989-01-11 1998-08-13 ソニー株式会社 ディスク装置の光学式エンコーダ
US5043775A (en) * 1989-02-21 1991-08-27 Wai-Hon Lee Semiconductor laser assembly
US5050153A (en) * 1989-06-06 1991-09-17 Wai-Hon Lee Semiconductor laser optical head assembly
US5098190A (en) * 1989-08-07 1992-03-24 Optra, Inc. Meterology using interferometric measurement technology for measuring scale displacement with three output signals
US5182610A (en) * 1990-04-19 1993-01-26 Sortec Corporation Position detecting method and device therefor as well as aligning device
US5121371A (en) * 1990-06-18 1992-06-09 Bernoulli Optical Systems Company Optical servo system for magnetic disk
US5162955A (en) * 1990-06-29 1992-11-10 Digital Equipment Corporation Apparatus for writing servo information onto a magnetic disk
US5108184A (en) * 1990-07-16 1992-04-28 International Business Machines Corporation Non-invasive laser positioning system for rotary actuators
US5227930A (en) * 1990-07-20 1993-07-13 Quantum Corporation Head position recalibration for disk drive
US5136152A (en) * 1990-12-19 1992-08-04 Hoetron, Inc. Hybrid optical pickup with integrated power emission and reading photodetectors
US5104225A (en) * 1991-01-25 1992-04-14 Mitutoyo Corporation Position detector and method of measuring position
US5159408A (en) * 1991-03-27 1992-10-27 Hughes Danbury Optical Systems, Inc. Optical thickness profiler using synthetic wavelengths
US5325349A (en) * 1991-05-29 1994-06-28 Sony Magnescale Inc. Hard disc drive and a servo signal writing apparatus

Also Published As

Publication number Publication date
WO1993022615A1 (en) 1993-11-11
DE69325799D1 (de) 1999-09-02
CA2118110A1 (en) 1993-11-11
CA2118110C (en) 2002-08-13
EP0639259A1 (de) 1995-02-22
JP3390440B2 (ja) 2003-03-24
DE69325799T2 (de) 2000-04-13
EP0639259B1 (de) 1999-07-28
EP0639259A4 (de) 1997-11-05
JPH07506669A (ja) 1995-07-20
US5559600A (en) 1996-09-24

Similar Documents

Publication Publication Date Title
ATE182677T1 (de) Apparat zum detektieren einer relativen bewegung
DE69529745D1 (de) Vorrichtung zur feststellung einer relativen bewegung
FR2695482B1 (fr) Dispositif de mesure utilisant une bobine des Rogowski.
NO773065L (no) Anordning for kontinuerlig variabel opptikk for elektrofotografisk kopieringsmaskin
CA2078731A1 (en) Positional deviation measuring device and method thereof
DE69607192T2 (de) Lage empfindlicher hochanflösungs detektor für hohe flüsse ionisierender teilchen
ATE40969T1 (de) System zum erfassen einer bewegung.
ATA233193A (de) Positionsmelder für automatisierung
NO950146L (no) Anordning for regulering av varmekjeler
DE69127400D1 (de) Lichtempfindliches Element für die Elektrophotographie
EP0358514A3 (de) Vorrichtung und Gerät zur Positionsdetektion
FR2713778B1 (fr) Appareil de détection de pollution des milieux aquatiques.
DE9319668U1 (de) Vorrichtung zum Messen von Federkräften
DE69322823D1 (de) Entwickler für elektrophotographie des wärmefixierungstyps
DE69309204T2 (de) Schutzvorrichtung für eine Linse
DE69416292D1 (de) Photoempfindliches photorezeptor für die elektrophotographie
DE69125295D1 (de) Lichtempfindliches Element für Elektrophotographie
DE69216978D1 (de) Photoleitfähiges Element für Elektrophotographie
ATE122456T1 (de) Winkelmesseinrichtung.
ATE89410T1 (de) Positionsmesseinrichtung.
EP0209340A3 (en) Datum sensing using optical grating
IT1151855B (it) Analizzatore ottico con monocromatore a reticolo per la gamma stretta dell'infrarosso
FR2683319B1 (fr) Dispositif de mesure de la temperature d'un echantillon.
Ch Fresnel patterns of finite grating illuminated by coherent and partially coherent fields
FR2743144B1 (fr) Procede de determination d'une energie lumineuse mesuree par un capteur

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties