JPS57153449A - Integrated circuit device - Google Patents
Integrated circuit deviceInfo
- Publication number
- JPS57153449A JPS57153449A JP3848681A JP3848681A JPS57153449A JP S57153449 A JPS57153449 A JP S57153449A JP 3848681 A JP3848681 A JP 3848681A JP 3848681 A JP3848681 A JP 3848681A JP S57153449 A JPS57153449 A JP S57153449A
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- integrated circuit
- circuit device
- igfet
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE:To stabilize the characteristics of an IGFET, and to facilitate ohmic connection between wiring and a substrate by using a high-melting point metal, such as Mo, W, etc. containing P as wiring. CONSTITUTION:When wiring with a gate electrode or a substrate is formed through evaporation or a sputtering method while using Mo, W, etc. containing P as a source, th threshold voltage of the IGFET is stabilized by a passivation effect by P, and the wiring by the high-melting point metal is shaped and the ohmic connection is obtained through high temperature treatment.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3848681A JPS57153449A (en) | 1981-03-17 | 1981-03-17 | Integrated circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3848681A JPS57153449A (en) | 1981-03-17 | 1981-03-17 | Integrated circuit device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57153449A true JPS57153449A (en) | 1982-09-22 |
Family
ID=12526582
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3848681A Pending JPS57153449A (en) | 1981-03-17 | 1981-03-17 | Integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57153449A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49104588A (en) * | 1973-02-05 | 1974-10-03 | ||
JPS54159186A (en) * | 1978-06-07 | 1979-12-15 | Fujitsu Ltd | Semiconductor device |
-
1981
- 1981-03-17 JP JP3848681A patent/JPS57153449A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49104588A (en) * | 1973-02-05 | 1974-10-03 | ||
JPS54159186A (en) * | 1978-06-07 | 1979-12-15 | Fujitsu Ltd | Semiconductor device |
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