JPS57141956A - Optical conductive element - Google Patents
Optical conductive elementInfo
- Publication number
- JPS57141956A JPS57141956A JP56027753A JP2775381A JPS57141956A JP S57141956 A JPS57141956 A JP S57141956A JP 56027753 A JP56027753 A JP 56027753A JP 2775381 A JP2775381 A JP 2775381A JP S57141956 A JPS57141956 A JP S57141956A
- Authority
- JP
- Japan
- Prior art keywords
- evaporated
- electrode
- layer
- thereabouts
- conductive element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title abstract 3
- 229910021417 amorphous silicon Inorganic materials 0.000 abstract 2
- 238000004040 coloring Methods 0.000 abstract 2
- 238000000034 method Methods 0.000 abstract 2
- VYXSBFYARXAAKO-WTKGSRSZSA-N chembl402140 Chemical compound Cl.C1=2C=C(C)C(NCC)=CC=2OC2=C\C(=N/CC)C(C)=CC2=C1C1=CC=CC=C1C(=O)OCC VYXSBFYARXAAKO-WTKGSRSZSA-N 0.000 abstract 1
- VVOLVFOSOPJKED-UHFFFAOYSA-N copper phthalocyanine Chemical compound [Cu].N=1C2=NC(C3=CC=CC=C33)=NC3=NC(C3=CC=CC=C33)=NC3=NC(C3=CC=CC=C33)=NC3=NC=1C1=CC=CC=C12 VVOLVFOSOPJKED-UHFFFAOYSA-N 0.000 abstract 1
- 238000001914 filtration Methods 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 abstract 1
- 239000011347 resin Substances 0.000 abstract 1
- 229920005989 resin Polymers 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14692—Thin film technologies, e.g. amorphous, poly, micro- or nanocrystalline silicon
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Nanotechnology (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Facsimile Heads (AREA)
- Light Receiving Elements (AREA)
Abstract
PURPOSE:To form the filtering mechanism and the photosensitive sensor of the subject element in one body by a method wherein an optical conductive element of amorphous Si is continuously provided on the plurality of picture element electrodes on a supporting member, and a coloring layer and an opposed electrode is successively provided facing the picture element electrodes. CONSTITUTION:After an amorphous Si layer 3 has been evaporated on the glass plate 2 whereon an Al electrode 5' was evaporated, a lead-phthalocyanine green film is evaporated to the thickness of 0.4mum or thereabouts on the prescribed position in the room temperature. Subsequently, a copper-phthalocyanine blue film and a red film of rhodamine 6G are evaporated to the thickness of 0.8mum or thereabouts on the prescribed position respectively. Lastly, the array form coloring layer 4, whereon an In2O3 electrode 5 will be evaporated, is simultaneously sputter-etched together with the electrode 5, the length of a side of the layer 4 is made at 20mum or less, and the interval between electrodes is formed at 3-20mum or thereabouts. Besides, a high molecular resin layer 6 is provided for protection and ultraviolet-ray shielding. According to this constitution, the man-hours and complicated procedures heretofore required to obtain a superpositional accuracy can be reduced, and a highly sensitive optical conductive element can be obtained easily in the prescribed wavelength region.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56027753A JPS57141956A (en) | 1981-02-27 | 1981-02-27 | Optical conductive element |
| US06/350,727 US4430666A (en) | 1981-02-27 | 1982-02-22 | Photoelectric converting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56027753A JPS57141956A (en) | 1981-02-27 | 1981-02-27 | Optical conductive element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57141956A true JPS57141956A (en) | 1982-09-02 |
| JPS6322467B2 JPS6322467B2 (en) | 1988-05-12 |
Family
ID=12229773
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56027753A Granted JPS57141956A (en) | 1981-02-27 | 1981-02-27 | Optical conductive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57141956A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59166454U (en) * | 1983-04-20 | 1984-11-08 | 三洋電機株式会社 | Semiconductor photodetector |
| JPH01190170A (en) * | 1988-01-26 | 1989-07-31 | Canon Inc | Color picture reader |
-
1981
- 1981-02-27 JP JP56027753A patent/JPS57141956A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59166454U (en) * | 1983-04-20 | 1984-11-08 | 三洋電機株式会社 | Semiconductor photodetector |
| JPH01190170A (en) * | 1988-01-26 | 1989-07-31 | Canon Inc | Color picture reader |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6322467B2 (en) | 1988-05-12 |
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