JPS56138369A - Solidstate image sensor - Google Patents

Solidstate image sensor

Info

Publication number
JPS56138369A
JPS56138369A JP4153580A JP4153580A JPS56138369A JP S56138369 A JPS56138369 A JP S56138369A JP 4153580 A JP4153580 A JP 4153580A JP 4153580 A JP4153580 A JP 4153580A JP S56138369 A JPS56138369 A JP S56138369A
Authority
JP
Japan
Prior art keywords
photo sensing
sensing section
collector
light
sensitivity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4153580A
Other languages
Japanese (ja)
Inventor
Okio Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP4153580A priority Critical patent/JPS56138369A/en
Publication of JPS56138369A publication Critical patent/JPS56138369A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/02Details
    • G01J1/04Optical or mechanical part supplementary adjustable parts
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/02Details
    • G01J1/04Optical or mechanical part supplementary adjustable parts
    • G01J1/0407Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0422Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using light concentrators, collectors or condensers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Solid State Image Pick-Up Elements (AREA)

Abstract

PURPOSE:To improve the sensitivity without lowering reliability and a yield rate, by introducing the light incident to a photo sensing section by reflecting the light to the region other than photo sensing section with reflection. CONSTITUTION:On the semiconductor substrate where the photo sensing section 3 and the charge readout section 6 are formed, the reflection light collector 15 introducing the incident light to one video element region to the photo sensing section 3, is provided. As for the collector 15, glass plate 13 is used and it is provided with an opening hole being tapered, and the reflecting film 14 is formed at the inner wall surface of open hole with vapor-deposited Al. Thus, the incident light is fed to the photo sensing section 3 with the collector 15 even for ineffective parts conventionally, resulting in contribution to the production of signal charge, allowing to improve the sensitivity. Further, since the collector 15 is obtained by making a hole to the glass plate and vapor-depositing Al film, the manufacture is easy.
JP4153580A 1980-03-31 1980-03-31 Solidstate image sensor Pending JPS56138369A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4153580A JPS56138369A (en) 1980-03-31 1980-03-31 Solidstate image sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4153580A JPS56138369A (en) 1980-03-31 1980-03-31 Solidstate image sensor

Publications (1)

Publication Number Publication Date
JPS56138369A true JPS56138369A (en) 1981-10-28

Family

ID=12611099

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4153580A Pending JPS56138369A (en) 1980-03-31 1980-03-31 Solidstate image sensor

Country Status (1)

Country Link
JP (1) JPS56138369A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2652649A1 (en) * 1989-09-29 1991-04-05 Firematel Sarl Static filter rejecting parasitic electromagnetic radiation, for optical smoke detectors
JP2002373976A (en) * 2001-06-13 2002-12-26 Nikon Corp Solid state imaging device and its manufacturing method
JP2006080457A (en) * 2004-09-13 2006-03-23 Sony Corp Imaging device and its manufacturing method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2652649A1 (en) * 1989-09-29 1991-04-05 Firematel Sarl Static filter rejecting parasitic electromagnetic radiation, for optical smoke detectors
JP2002373976A (en) * 2001-06-13 2002-12-26 Nikon Corp Solid state imaging device and its manufacturing method
JP2006080457A (en) * 2004-09-13 2006-03-23 Sony Corp Imaging device and its manufacturing method

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