JPS56138369A - Solidstate image sensor - Google Patents
Solidstate image sensorInfo
- Publication number
- JPS56138369A JPS56138369A JP4153580A JP4153580A JPS56138369A JP S56138369 A JPS56138369 A JP S56138369A JP 4153580 A JP4153580 A JP 4153580A JP 4153580 A JP4153580 A JP 4153580A JP S56138369 A JPS56138369 A JP S56138369A
- Authority
- JP
- Japan
- Prior art keywords
- photo sensing
- sensing section
- collector
- light
- sensitivity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 abstract 2
- 238000004519 manufacturing process Methods 0.000 abstract 2
- 230000035945 sensitivity Effects 0.000 abstract 2
- 238000000151 deposition Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
- G01J1/0422—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using light concentrators, collectors or condensers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
PURPOSE:To improve the sensitivity without lowering reliability and a yield rate, by introducing the light incident to a photo sensing section by reflecting the light to the region other than photo sensing section with reflection. CONSTITUTION:On the semiconductor substrate where the photo sensing section 3 and the charge readout section 6 are formed, the reflection light collector 15 introducing the incident light to one video element region to the photo sensing section 3, is provided. As for the collector 15, glass plate 13 is used and it is provided with an opening hole being tapered, and the reflecting film 14 is formed at the inner wall surface of open hole with vapor-deposited Al. Thus, the incident light is fed to the photo sensing section 3 with the collector 15 even for ineffective parts conventionally, resulting in contribution to the production of signal charge, allowing to improve the sensitivity. Further, since the collector 15 is obtained by making a hole to the glass plate and vapor-depositing Al film, the manufacture is easy.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4153580A JPS56138369A (en) | 1980-03-31 | 1980-03-31 | Solidstate image sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4153580A JPS56138369A (en) | 1980-03-31 | 1980-03-31 | Solidstate image sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56138369A true JPS56138369A (en) | 1981-10-28 |
Family
ID=12611099
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4153580A Pending JPS56138369A (en) | 1980-03-31 | 1980-03-31 | Solidstate image sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56138369A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2652649A1 (en) * | 1989-09-29 | 1991-04-05 | Firematel Sarl | Static filter rejecting parasitic electromagnetic radiation, for optical smoke detectors |
JP2002373976A (en) * | 2001-06-13 | 2002-12-26 | Nikon Corp | Solid state imaging device and its manufacturing method |
JP2006080457A (en) * | 2004-09-13 | 2006-03-23 | Sony Corp | Imaging device and its manufacturing method |
-
1980
- 1980-03-31 JP JP4153580A patent/JPS56138369A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2652649A1 (en) * | 1989-09-29 | 1991-04-05 | Firematel Sarl | Static filter rejecting parasitic electromagnetic radiation, for optical smoke detectors |
JP2002373976A (en) * | 2001-06-13 | 2002-12-26 | Nikon Corp | Solid state imaging device and its manufacturing method |
JP2006080457A (en) * | 2004-09-13 | 2006-03-23 | Sony Corp | Imaging device and its manufacturing method |
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