JPS5642106A - Monitoring device for thickness of film - Google Patents
Monitoring device for thickness of filmInfo
- Publication number
- JPS5642106A JPS5642106A JP11833479A JP11833479A JPS5642106A JP S5642106 A JPS5642106 A JP S5642106A JP 11833479 A JP11833479 A JP 11833479A JP 11833479 A JP11833479 A JP 11833479A JP S5642106 A JPS5642106 A JP S5642106A
- Authority
- JP
- Japan
- Prior art keywords
- film
- optical fiber
- thickness
- light
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
PURPOSE: To provide a device capable of monitoring the thickness of the formed film by a method wherein one end face of an optical fiber is located at the same level as a substrate for the film formation in a thin-film forming device, and the change in the reflection factor is detected through the use of the light from the other end face of the optical fiber.
CONSTITUTION: A source of vapor 2 and the substrate 3 are placed in the bell jar 1 of a vacuum evaporator, and the optical fiber 4 is inserted into the bell jar 1. The light from a light source 7 is introduced into the optical fiber 4 through a coupling lens 5, the reflected light from the one end face of the optical fiber 4 located at the same level as the substrate 3 is directed into a detector 8 by a half-mirror 6, and the output of the detector 8 is monitored. In this case, when a substance of a refractive index n1 is deposited on a substance of a refractive index n0, the reflection factor of the light as viewed from the side of the substance of the refractive index n0 changes periodically with the thickness of the film. Accordingly, the thickness of the film can be monitored by monitoring the output of the detector 8.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11833479A JPS6034046B2 (en) | 1979-09-13 | 1979-09-13 | Thin film generation device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11833479A JPS6034046B2 (en) | 1979-09-13 | 1979-09-13 | Thin film generation device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5642106A true JPS5642106A (en) | 1981-04-20 |
JPS6034046B2 JPS6034046B2 (en) | 1985-08-06 |
Family
ID=14734084
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11833479A Expired JPS6034046B2 (en) | 1979-09-13 | 1979-09-13 | Thin film generation device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6034046B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6056375A (en) * | 1983-09-07 | 1985-04-01 | Agency Of Ind Science & Technol | Molten-carbonate-type fuel cell |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0224347Y2 (en) * | 1984-10-20 | 1990-07-04 |
-
1979
- 1979-09-13 JP JP11833479A patent/JPS6034046B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6056375A (en) * | 1983-09-07 | 1985-04-01 | Agency Of Ind Science & Technol | Molten-carbonate-type fuel cell |
JPH0412591B2 (en) * | 1983-09-07 | 1992-03-05 | Kogyo Gijutsuin |
Also Published As
Publication number | Publication date |
---|---|
JPS6034046B2 (en) | 1985-08-06 |
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