JPS5642106A - Monitoring device for thickness of film - Google Patents

Monitoring device for thickness of film

Info

Publication number
JPS5642106A
JPS5642106A JP11833479A JP11833479A JPS5642106A JP S5642106 A JPS5642106 A JP S5642106A JP 11833479 A JP11833479 A JP 11833479A JP 11833479 A JP11833479 A JP 11833479A JP S5642106 A JPS5642106 A JP S5642106A
Authority
JP
Japan
Prior art keywords
film
optical fiber
thickness
light
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11833479A
Other languages
Japanese (ja)
Other versions
JPS6034046B2 (en
Inventor
Toshiro Hayakawa
Morichika Yano
Saburo Yamamoto
Yukio Kurata
Kaneki Matsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP11833479A priority Critical patent/JPS6034046B2/en
Publication of JPS5642106A publication Critical patent/JPS5642106A/en
Publication of JPS6034046B2 publication Critical patent/JPS6034046B2/en
Expired legal-status Critical Current

Links

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To provide a device capable of monitoring the thickness of the formed film by a method wherein one end face of an optical fiber is located at the same level as a substrate for the film formation in a thin-film forming device, and the change in the reflection factor is detected through the use of the light from the other end face of the optical fiber.
CONSTITUTION: A source of vapor 2 and the substrate 3 are placed in the bell jar 1 of a vacuum evaporator, and the optical fiber 4 is inserted into the bell jar 1. The light from a light source 7 is introduced into the optical fiber 4 through a coupling lens 5, the reflected light from the one end face of the optical fiber 4 located at the same level as the substrate 3 is directed into a detector 8 by a half-mirror 6, and the output of the detector 8 is monitored. In this case, when a substance of a refractive index n1 is deposited on a substance of a refractive index n0, the reflection factor of the light as viewed from the side of the substance of the refractive index n0 changes periodically with the thickness of the film. Accordingly, the thickness of the film can be monitored by monitoring the output of the detector 8.
COPYRIGHT: (C)1981,JPO&Japio
JP11833479A 1979-09-13 1979-09-13 Thin film generation device Expired JPS6034046B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11833479A JPS6034046B2 (en) 1979-09-13 1979-09-13 Thin film generation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11833479A JPS6034046B2 (en) 1979-09-13 1979-09-13 Thin film generation device

Publications (2)

Publication Number Publication Date
JPS5642106A true JPS5642106A (en) 1981-04-20
JPS6034046B2 JPS6034046B2 (en) 1985-08-06

Family

ID=14734084

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11833479A Expired JPS6034046B2 (en) 1979-09-13 1979-09-13 Thin film generation device

Country Status (1)

Country Link
JP (1) JPS6034046B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6056375A (en) * 1983-09-07 1985-04-01 Agency Of Ind Science & Technol Molten-carbonate-type fuel cell

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0224347Y2 (en) * 1984-10-20 1990-07-04

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6056375A (en) * 1983-09-07 1985-04-01 Agency Of Ind Science & Technol Molten-carbonate-type fuel cell
JPH0412591B2 (en) * 1983-09-07 1992-03-05 Kogyo Gijutsuin

Also Published As

Publication number Publication date
JPS6034046B2 (en) 1985-08-06

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