JPS57120844A - Method and apparatus for determination of optical constant of compound semiconductor thin film - Google Patents

Method and apparatus for determination of optical constant of compound semiconductor thin film

Info

Publication number
JPS57120844A
JPS57120844A JP670681A JP670681A JPS57120844A JP S57120844 A JPS57120844 A JP S57120844A JP 670681 A JP670681 A JP 670681A JP 670681 A JP670681 A JP 670681A JP S57120844 A JPS57120844 A JP S57120844A
Authority
JP
Japan
Prior art keywords
compound semiconductor
film
semiconductor thin
thin film
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP670681A
Other languages
Japanese (ja)
Other versions
JPH0210373B2 (en
Inventor
Keisuke Sasaki
Osamu Hamano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP670681A priority Critical patent/JPS57120844A/en
Publication of JPS57120844A publication Critical patent/JPS57120844A/en
Publication of JPH0210373B2 publication Critical patent/JPH0210373B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE:To determine an optical constant (refractive index, absorption coefficient) of a compound semiconductor thin film, by propagating a laser beam to the compound semiconductor thin film placed on a transparent thin-film light waveguide. CONSTITUTION:A laser beam emitted from a laser gun G is irradiated on the upper face near the tip part of a transparent thin-film light waveguide 4 piled up on a transparent substrate 5. A coupling prism 3 is placed on the guide 4 and the laser beam is propagated to a wedge-shaped compound semiconductor thin film 6 placed on the guide 4 in the same way through the prism 3. The laser beam passing through the film 6 is reached a photodiode 8 through a decoupling prism 7. An optical constant of the film 6 is found by calculating a propagation constant from a dispersion expression determined by the refractive index of the substrate 5 and the waveguide 4 and the thickness of the guide 4.
JP670681A 1981-01-20 1981-01-20 Method and apparatus for determination of optical constant of compound semiconductor thin film Granted JPS57120844A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP670681A JPS57120844A (en) 1981-01-20 1981-01-20 Method and apparatus for determination of optical constant of compound semiconductor thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP670681A JPS57120844A (en) 1981-01-20 1981-01-20 Method and apparatus for determination of optical constant of compound semiconductor thin film

Publications (2)

Publication Number Publication Date
JPS57120844A true JPS57120844A (en) 1982-07-28
JPH0210373B2 JPH0210373B2 (en) 1990-03-07

Family

ID=11645742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP670681A Granted JPS57120844A (en) 1981-01-20 1981-01-20 Method and apparatus for determination of optical constant of compound semiconductor thin film

Country Status (1)

Country Link
JP (1) JPS57120844A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105092474A (en) * 2015-08-11 2015-11-25 中山大学 Device and method for measuring extinction coefficient of water body and method for measuring extinction coefficient of suspended matter

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0414271U (en) * 1990-05-29 1992-02-05

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105092474A (en) * 2015-08-11 2015-11-25 中山大学 Device and method for measuring extinction coefficient of water body and method for measuring extinction coefficient of suspended matter

Also Published As

Publication number Publication date
JPH0210373B2 (en) 1990-03-07

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