JPS5662203A - Submerged light reflecting mirror apparatus - Google Patents
Submerged light reflecting mirror apparatusInfo
- Publication number
- JPS5662203A JPS5662203A JP13800979A JP13800979A JPS5662203A JP S5662203 A JPS5662203 A JP S5662203A JP 13800979 A JP13800979 A JP 13800979A JP 13800979 A JP13800979 A JP 13800979A JP S5662203 A JPS5662203 A JP S5662203A
- Authority
- JP
- Japan
- Prior art keywords
- submerged
- reflecting mirror
- light reflecting
- light
- critical angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Optical Elements Other Than Lenses (AREA)
- Weting (AREA)
Abstract
PURPOSE: To obtain a submerged light reflecting mirror with high endurance used in a semiconductor etching apparatus, etc. without exerting unfavorable influence on a soln. by combining glass for the mirror body with air to form a submerged optical path.
CONSTITUTION: One edge surface 8a of submerged light reflecting mirror body 8 is inclined at the critical angle or more to incident light, and the other edge surface 8b of body 8 is a plane slanting surface parallel with surface 8a. Air layer 9 for totally reflecting and refracting rays 2 of light is sealed in the other edge part of body 8 on surface 8b at the critical angle or more. Photodetector 10 such as photodiode is set to detect the light shielding or incident state as an on-off electric signal. Thus, a submerged light reflecting mirror with high endurance can be obtd. without exerting unfavorable influence on the aqueous soln. of a chemicals producing apparatus, etc.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13800979A JPS5662203A (en) | 1979-10-24 | 1979-10-24 | Submerged light reflecting mirror apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13800979A JPS5662203A (en) | 1979-10-24 | 1979-10-24 | Submerged light reflecting mirror apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5662203A true JPS5662203A (en) | 1981-05-28 |
Family
ID=15211921
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13800979A Pending JPS5662203A (en) | 1979-10-24 | 1979-10-24 | Submerged light reflecting mirror apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5662203A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6161433U (en) * | 1984-09-28 | 1986-04-25 | ||
JPS62113390A (en) * | 1985-11-12 | 1987-05-25 | 日産自動車株式会社 | Constant luminous power controller |
-
1979
- 1979-10-24 JP JP13800979A patent/JPS5662203A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6161433U (en) * | 1984-09-28 | 1986-04-25 | ||
JPS62113390A (en) * | 1985-11-12 | 1987-05-25 | 日産自動車株式会社 | Constant luminous power controller |
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