JPS5662203A - Submerged light reflecting mirror apparatus - Google Patents

Submerged light reflecting mirror apparatus

Info

Publication number
JPS5662203A
JPS5662203A JP13800979A JP13800979A JPS5662203A JP S5662203 A JPS5662203 A JP S5662203A JP 13800979 A JP13800979 A JP 13800979A JP 13800979 A JP13800979 A JP 13800979A JP S5662203 A JPS5662203 A JP S5662203A
Authority
JP
Japan
Prior art keywords
submerged
reflecting mirror
light reflecting
light
critical angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13800979A
Other languages
Japanese (ja)
Inventor
Jiyouji Fujimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP13800979A priority Critical patent/JPS5662203A/en
Publication of JPS5662203A publication Critical patent/JPS5662203A/en
Pending legal-status Critical Current

Links

Landscapes

  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To obtain a submerged light reflecting mirror with high endurance used in a semiconductor etching apparatus, etc. without exerting unfavorable influence on a soln. by combining glass for the mirror body with air to form a submerged optical path.
CONSTITUTION: One edge surface 8a of submerged light reflecting mirror body 8 is inclined at the critical angle or more to incident light, and the other edge surface 8b of body 8 is a plane slanting surface parallel with surface 8a. Air layer 9 for totally reflecting and refracting rays 2 of light is sealed in the other edge part of body 8 on surface 8b at the critical angle or more. Photodetector 10 such as photodiode is set to detect the light shielding or incident state as an on-off electric signal. Thus, a submerged light reflecting mirror with high endurance can be obtd. without exerting unfavorable influence on the aqueous soln. of a chemicals producing apparatus, etc.
COPYRIGHT: (C)1981,JPO&Japio
JP13800979A 1979-10-24 1979-10-24 Submerged light reflecting mirror apparatus Pending JPS5662203A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13800979A JPS5662203A (en) 1979-10-24 1979-10-24 Submerged light reflecting mirror apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13800979A JPS5662203A (en) 1979-10-24 1979-10-24 Submerged light reflecting mirror apparatus

Publications (1)

Publication Number Publication Date
JPS5662203A true JPS5662203A (en) 1981-05-28

Family

ID=15211921

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13800979A Pending JPS5662203A (en) 1979-10-24 1979-10-24 Submerged light reflecting mirror apparatus

Country Status (1)

Country Link
JP (1) JPS5662203A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6161433U (en) * 1984-09-28 1986-04-25
JPS62113390A (en) * 1985-11-12 1987-05-25 日産自動車株式会社 Constant luminous power controller

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6161433U (en) * 1984-09-28 1986-04-25
JPS62113390A (en) * 1985-11-12 1987-05-25 日産自動車株式会社 Constant luminous power controller

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