JPS57196109A - Optical detector for physical amount - Google Patents

Optical detector for physical amount

Info

Publication number
JPS57196109A
JPS57196109A JP8047781A JP8047781A JPS57196109A JP S57196109 A JPS57196109 A JP S57196109A JP 8047781 A JP8047781 A JP 8047781A JP 8047781 A JP8047781 A JP 8047781A JP S57196109 A JPS57196109 A JP S57196109A
Authority
JP
Japan
Prior art keywords
pressure
light
strain
detected
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8047781A
Other languages
Japanese (ja)
Inventor
Masao Hirano
Mitsutaka Kato
Hirohiko Yasuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Tateisi Electronics Co
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tateisi Electronics Co, Omron Tateisi Electronics Co filed Critical Tateisi Electronics Co
Priority to JP8047781A priority Critical patent/JPS57196109A/en
Publication of JPS57196109A publication Critical patent/JPS57196109A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE:To perform an optical detection of a change in a physical amount, by a method wherein an optical elastic material is strained by a change in a physical amount, and the strain amount is detected optically. CONSTITUTION:An optical film 24 of a pressure sensor 20 is irradiated with light from a light source 1 through a rectilinear polarizer 2 and an optical fiber 11. This causes light to be reflected by a reflection layer 23, and the reflecting light is detected by a detector 5 through an optical fiber 12 and a polarizer 4. If liquid or gaseous matter is fed to a cavity 15 through a pipe 16, a strain is produced at the optical elastic film 24 due to a difference between a pressure in the cavity 15 and a pressure in a cavity 18. A strain double refraction amount, created by said strain, changes, and reflecting light, detected by the pressure detector 5, is detected as modulated light of a pressure.
JP8047781A 1981-05-27 1981-05-27 Optical detector for physical amount Pending JPS57196109A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8047781A JPS57196109A (en) 1981-05-27 1981-05-27 Optical detector for physical amount

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8047781A JPS57196109A (en) 1981-05-27 1981-05-27 Optical detector for physical amount

Publications (1)

Publication Number Publication Date
JPS57196109A true JPS57196109A (en) 1982-12-02

Family

ID=13719345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8047781A Pending JPS57196109A (en) 1981-05-27 1981-05-27 Optical detector for physical amount

Country Status (1)

Country Link
JP (1) JPS57196109A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61235731A (en) * 1985-04-11 1986-10-21 Sharp Corp Pressure sensing element
JPH04270943A (en) * 1991-02-27 1992-09-28 Tomoya Ogawa Spectrum analyzer
WO2001075411A1 (en) * 2000-04-04 2001-10-11 Showa Denko K.K. Detection film and optical sensor using detection film
JP2011029235A (en) * 2009-07-21 2011-02-10 Toshiba Corp Imprint device and imprint method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61235731A (en) * 1985-04-11 1986-10-21 Sharp Corp Pressure sensing element
JPH04270943A (en) * 1991-02-27 1992-09-28 Tomoya Ogawa Spectrum analyzer
WO2001075411A1 (en) * 2000-04-04 2001-10-11 Showa Denko K.K. Detection film and optical sensor using detection film
JP2011029235A (en) * 2009-07-21 2011-02-10 Toshiba Corp Imprint device and imprint method

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