JPS5766663A - Image sensor - Google Patents
Image sensorInfo
- Publication number
- JPS5766663A JPS5766663A JP55142033A JP14203380A JPS5766663A JP S5766663 A JPS5766663 A JP S5766663A JP 55142033 A JP55142033 A JP 55142033A JP 14203380 A JP14203380 A JP 14203380A JP S5766663 A JPS5766663 A JP S5766663A
- Authority
- JP
- Japan
- Prior art keywords
- film
- light
- wiring
- metal conductor
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 abstract 4
- 239000002184 metal Substances 0.000 abstract 3
- 239000011159 matrix material Substances 0.000 abstract 2
- 238000012216 screening Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 abstract 2
- 229910004613 CdTe Inorganic materials 0.000 abstract 1
- 230000000903 blocking effect Effects 0.000 abstract 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 abstract 1
- 238000010030 laminating Methods 0.000 abstract 1
- 229910001120 nichrome Inorganic materials 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 abstract 1
- 238000007738 vacuum evaporation Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
- Light Receiving Elements (AREA)
Abstract
PURPOSE:To facilitate matrix wiring between a metal conductor film and an external wiring by means of a tape carrier, by forming a minute pattern by means of the metal conductor film on a substrate. CONSTITUTION:A metal conductor film 12 of Au is formed on an NiCr film of 200-600Angstrom formed as a ground for increasing the bonding strength with a substrate 11. Moreover formed by means of vacuum evaporation or sputtering is a Te film 13, a CdTe film 14, a CdS film 15, a transparent electrode film 16 of SnO2 or In2O5, a light-screening film 17 of Au and a transparent protecting film 18 of Ta2O5. In the parts formed by laminating the abovementioned films, a part 19 consitutes a photodiode, while a part 20 covered with the light-screening film 17 constitutes a blocking diode. The light-receiving element thus formed is connected with a wiring conductor formed on a tape carrier, thereby to conduct matrix wiring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55142033A JPS5766663A (en) | 1980-10-13 | 1980-10-13 | Image sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55142033A JPS5766663A (en) | 1980-10-13 | 1980-10-13 | Image sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5766663A true JPS5766663A (en) | 1982-04-22 |
Family
ID=15305797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55142033A Pending JPS5766663A (en) | 1980-10-13 | 1980-10-13 | Image sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5766663A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2536188A1 (en) * | 1982-11-17 | 1984-05-18 | Commissariat Energie Atomique | POINT-BY-POINT DOCUMENT READING DEVICE USING MATRIX OF PHOTODETECTOR ELEMENTS |
| US5027226A (en) * | 1987-09-18 | 1991-06-25 | Ricoh Company, Ltd. | Contact type image sensor |
-
1980
- 1980-10-13 JP JP55142033A patent/JPS5766663A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2536188A1 (en) * | 1982-11-17 | 1984-05-18 | Commissariat Energie Atomique | POINT-BY-POINT DOCUMENT READING DEVICE USING MATRIX OF PHOTODETECTOR ELEMENTS |
| EP0112202A2 (en) * | 1982-11-17 | 1984-06-27 | Commissariat A L'energie Atomique | Point-by-point document reading device using a photodetector array |
| US5027226A (en) * | 1987-09-18 | 1991-06-25 | Ricoh Company, Ltd. | Contact type image sensor |
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