JPS5568684A - Infrared ray camera - Google Patents
Infrared ray cameraInfo
- Publication number
- JPS5568684A JPS5568684A JP14269478A JP14269478A JPS5568684A JP S5568684 A JPS5568684 A JP S5568684A JP 14269478 A JP14269478 A JP 14269478A JP 14269478 A JP14269478 A JP 14269478A JP S5568684 A JPS5568684 A JP S5568684A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- diode
- infrared ray
- mesa
- gate electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 abstract 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052710 silicon Inorganic materials 0.000 abstract 2
- 239000010703 silicon Substances 0.000 abstract 2
- 239000000853 adhesive Substances 0.000 abstract 1
- 230000001070 adhesive effect Effects 0.000 abstract 1
- 238000006073 displacement reaction Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/148—Charge coupled imagers
- H01L27/14875—Infrared CCD or CID imagers
- H01L27/14881—Infrared CCD or CID imagers of the hybrid type
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Light Receiving Elements (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Abstract
PURPOSE:To improve the reliability of an infrared ray camera by arranging oppositely a multiple semiconductor substrate having a number of infrared ray detecting elements formed with mesa pn-junctions and a transfer unit for transferring signal charge from the detecting elements. CONSTITUTION:An electrode 34 is adhered with adhesive 35 onto a silicon substrate 36 capable of transmitting infrared rays excluding a light receiving portion 31 formed later, and a mesa light receiving portion 31 is formed with pn-junctions 32 among the electrode 34. Then, an In electrode 40 is mounted on the top surface 39 of the portion 31 while projecting the electrode 40, and a protecting anodoxdization film 33 is coated from the mesa side surface on the electrode 34. On the other hand, a transfer unit having an input diode 38, an input gate electrode 42, a storage gate electrode 43 and an output gate electrode 44 on a silicon substrate 37 surrounded by a channel stop 48 is arranged at the side opposite to the portion 31, and the electrode 40 of the portion 31 is made contact with the diode 38. Thus, even if temperature is altered, no displacement occurs between the diode 38 and the electrode 40 as coupled.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14269478A JPS5568684A (en) | 1978-11-17 | 1978-11-17 | Infrared ray camera |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14269478A JPS5568684A (en) | 1978-11-17 | 1978-11-17 | Infrared ray camera |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5568684A true JPS5568684A (en) | 1980-05-23 |
JPS5653862B2 JPS5653862B2 (en) | 1981-12-22 |
Family
ID=15321354
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14269478A Granted JPS5568684A (en) | 1978-11-17 | 1978-11-17 | Infrared ray camera |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5568684A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4566024A (en) * | 1982-03-12 | 1986-01-21 | Societe Anonyme De Telecommunications | Matrix infrared detector |
US4660066A (en) * | 1982-09-08 | 1987-04-21 | Texas Instruments Incorporated | Structure for packaging focal plane imagers and signal processing circuits |
US4695861A (en) * | 1985-10-21 | 1987-09-22 | Honeywell Inc. | Backside mosaic photoconductive infrared detector array |
US4720738A (en) * | 1982-09-08 | 1988-01-19 | Texas Instruments Incorporated | Focal plane array structure including a signal processing system |
JP2008066584A (en) * | 2006-09-08 | 2008-03-21 | Asahi Kasei Electronics Co Ltd | Photosensor |
-
1978
- 1978-11-17 JP JP14269478A patent/JPS5568684A/en active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4566024A (en) * | 1982-03-12 | 1986-01-21 | Societe Anonyme De Telecommunications | Matrix infrared detector |
US4660066A (en) * | 1982-09-08 | 1987-04-21 | Texas Instruments Incorporated | Structure for packaging focal plane imagers and signal processing circuits |
US4720738A (en) * | 1982-09-08 | 1988-01-19 | Texas Instruments Incorporated | Focal plane array structure including a signal processing system |
US4695861A (en) * | 1985-10-21 | 1987-09-22 | Honeywell Inc. | Backside mosaic photoconductive infrared detector array |
JP2008066584A (en) * | 2006-09-08 | 2008-03-21 | Asahi Kasei Electronics Co Ltd | Photosensor |
Also Published As
Publication number | Publication date |
---|---|
JPS5653862B2 (en) | 1981-12-22 |
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