JPS57124240A - Method for presuming electric resistance value of metallic oxide film after heat treatment - Google Patents

Method for presuming electric resistance value of metallic oxide film after heat treatment

Info

Publication number
JPS57124240A
JPS57124240A JP1004481A JP1004481A JPS57124240A JP S57124240 A JPS57124240 A JP S57124240A JP 1004481 A JP1004481 A JP 1004481A JP 1004481 A JP1004481 A JP 1004481A JP S57124240 A JPS57124240 A JP S57124240A
Authority
JP
Japan
Prior art keywords
light
heat treatment
oxide film
transmissivity
electric resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1004481A
Other languages
Japanese (ja)
Inventor
Shozaburo Nishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Sheet Glass Co Ltd
Original Assignee
Nippon Sheet Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Sheet Glass Co Ltd filed Critical Nippon Sheet Glass Co Ltd
Priority to JP1004481A priority Critical patent/JPS57124240A/en
Publication of JPS57124240A publication Critical patent/JPS57124240A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE:To presume the value of electric resistance of an indium and tin oxide film stuck to a substrate after heat treatment in the atmosphere, by measuring the transmissivity of light having a prescribed wavelength. CONSTITUTION:Light from a light source 12 is made incident to a glass 8' with low-grade oxide film stuck thereon formed by a direct current active sputtering through a monochromatic filter and its transmitted light is detected by a photodetector 14. 1.5-2.5mu monochromatic light of near infrared band is preferable for a wavelength of irradiation light. Further, the relation between transmissivity of an above-mentioned glass and the specific resistance after heat treatment in the atmosphere, is obtained preliminarily. Moreover, in order to obtain the film having a specified specific resistance, its transmissivity is measured.
JP1004481A 1981-01-26 1981-01-26 Method for presuming electric resistance value of metallic oxide film after heat treatment Pending JPS57124240A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1004481A JPS57124240A (en) 1981-01-26 1981-01-26 Method for presuming electric resistance value of metallic oxide film after heat treatment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1004481A JPS57124240A (en) 1981-01-26 1981-01-26 Method for presuming electric resistance value of metallic oxide film after heat treatment

Publications (1)

Publication Number Publication Date
JPS57124240A true JPS57124240A (en) 1982-08-03

Family

ID=11739389

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1004481A Pending JPS57124240A (en) 1981-01-26 1981-01-26 Method for presuming electric resistance value of metallic oxide film after heat treatment

Country Status (1)

Country Link
JP (1) JPS57124240A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6370150A (en) * 1986-09-11 1988-03-30 Hitachi Ltd Method and apparatus for judging water quality for power plant
US5512152A (en) * 1993-07-15 1996-04-30 Saint Gobain Vitrage Process for preparation of stabilized oxide thin layers

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS502573A (en) * 1973-05-07 1975-01-11

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS502573A (en) * 1973-05-07 1975-01-11

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6370150A (en) * 1986-09-11 1988-03-30 Hitachi Ltd Method and apparatus for judging water quality for power plant
JPH0452845B2 (en) * 1986-09-11 1992-08-25 Hitachi Ltd
US5512152A (en) * 1993-07-15 1996-04-30 Saint Gobain Vitrage Process for preparation of stabilized oxide thin layers

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