JPS57132342A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS57132342A JPS57132342A JP1860781A JP1860781A JPS57132342A JP S57132342 A JPS57132342 A JP S57132342A JP 1860781 A JP1860781 A JP 1860781A JP 1860781 A JP1860781 A JP 1860781A JP S57132342 A JPS57132342 A JP S57132342A
- Authority
- JP
- Japan
- Prior art keywords
- mustache
- shaped
- wiring metal
- layer
- shaped crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 239000013078 crystal Substances 0.000 abstract 7
- 239000002184 metal Substances 0.000 abstract 7
- 230000002950 deficient Effects 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 230000005855 radiation Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1860781A JPS57132342A (en) | 1981-02-10 | 1981-02-10 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1860781A JPS57132342A (en) | 1981-02-10 | 1981-02-10 | Manufacture of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57132342A true JPS57132342A (en) | 1982-08-16 |
JPS647500B2 JPS647500B2 (enrdf_load_stackoverflow) | 1989-02-09 |
Family
ID=11976321
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1860781A Granted JPS57132342A (en) | 1981-02-10 | 1981-02-10 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57132342A (enrdf_load_stackoverflow) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4835778A (enrdf_load_stackoverflow) * | 1971-09-09 | 1973-05-26 | ||
JPS5136082A (en) * | 1974-09-21 | 1976-03-26 | Mitsubishi Electric Corp | Handotaisochi no seizohoho |
-
1981
- 1981-02-10 JP JP1860781A patent/JPS57132342A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4835778A (enrdf_load_stackoverflow) * | 1971-09-09 | 1973-05-26 | ||
JPS5136082A (en) * | 1974-09-21 | 1976-03-26 | Mitsubishi Electric Corp | Handotaisochi no seizohoho |
Also Published As
Publication number | Publication date |
---|---|
JPS647500B2 (enrdf_load_stackoverflow) | 1989-02-09 |
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