JPS57132342A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS57132342A
JPS57132342A JP1860781A JP1860781A JPS57132342A JP S57132342 A JPS57132342 A JP S57132342A JP 1860781 A JP1860781 A JP 1860781A JP 1860781 A JP1860781 A JP 1860781A JP S57132342 A JPS57132342 A JP S57132342A
Authority
JP
Japan
Prior art keywords
mustache
shaped
wiring metal
layer
shaped crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1860781A
Other languages
English (en)
Japanese (ja)
Other versions
JPS647500B2 (enrdf_load_stackoverflow
Inventor
Katsuhiro Hirata
Hideaki Itakura
Masahiro Yoneda
Kyusaku Nishioka
Haruhiko Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1860781A priority Critical patent/JPS57132342A/ja
Publication of JPS57132342A publication Critical patent/JPS57132342A/ja
Publication of JPS647500B2 publication Critical patent/JPS647500B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
JP1860781A 1981-02-10 1981-02-10 Manufacture of semiconductor device Granted JPS57132342A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1860781A JPS57132342A (en) 1981-02-10 1981-02-10 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1860781A JPS57132342A (en) 1981-02-10 1981-02-10 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS57132342A true JPS57132342A (en) 1982-08-16
JPS647500B2 JPS647500B2 (enrdf_load_stackoverflow) 1989-02-09

Family

ID=11976321

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1860781A Granted JPS57132342A (en) 1981-02-10 1981-02-10 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS57132342A (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4835778A (enrdf_load_stackoverflow) * 1971-09-09 1973-05-26
JPS5136082A (en) * 1974-09-21 1976-03-26 Mitsubishi Electric Corp Handotaisochi no seizohoho

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4835778A (enrdf_load_stackoverflow) * 1971-09-09 1973-05-26
JPS5136082A (en) * 1974-09-21 1976-03-26 Mitsubishi Electric Corp Handotaisochi no seizohoho

Also Published As

Publication number Publication date
JPS647500B2 (enrdf_load_stackoverflow) 1989-02-09

Similar Documents

Publication Publication Date Title
IE801451L (en) Semiconductor photoresist
JPS5638815A (en) Manufacture of semiconductor device
JPS57132342A (en) Manufacture of semiconductor device
JPS57145340A (en) Manufacture of semiconductor device
JPS5772333A (en) Manufacture of semiconductor device
JPS566434A (en) Manufacture of semiconductor device
JPS5678495A (en) Preparation of base
JPS56114355A (en) Manufacture of semiconductor device
JPS5596681A (en) Method of fabricating semiconductor device
JPS56132343A (en) Mask for x-ray exposure and its manufacture
JPS5766651A (en) Manufacture of semiconductor device
JPS53123089A (en) Production of semiconductor device
JPS56142631A (en) Manufacture of semiconductor device
JPS5638826A (en) Manufacture of semiconductor device
JPS6450560A (en) Manufacture of semiconductor device
JPS5792826A (en) Manufacture of semiconductor device
JPS6473718A (en) Manufacture of semiconductor integrated circuit device
JPS57201015A (en) Manufacture of semiconductor device
JPS57155731A (en) Formation of pattern
JPS54109775A (en) Manufacture of semiconductor device
JPS57169259A (en) Manufacture of semiconductor device
JPS56146231A (en) Manufacture of semiconductor device
JPS5534418A (en) Method of selectively etching semiconductor
JPS5660028A (en) Manufacture of semiconductor device
JPS5513945A (en) Amorphous semiconductor device