JPS57131039A - Defect detector - Google Patents
Defect detectorInfo
- Publication number
- JPS57131039A JPS57131039A JP56016294A JP1629481A JPS57131039A JP S57131039 A JPS57131039 A JP S57131039A JP 56016294 A JP56016294 A JP 56016294A JP 1629481 A JP1629481 A JP 1629481A JP S57131039 A JPS57131039 A JP S57131039A
- Authority
- JP
- Japan
- Prior art keywords
- reflected
- scattered
- defects
- lens
- directly reflected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007547 defect Effects 0.000 title abstract 5
- 238000001514 detection method Methods 0.000 abstract 1
- 230000004907 flux Effects 0.000 abstract 1
- 238000007689 inspection Methods 0.000 abstract 1
- 230000010287 polarization Effects 0.000 abstract 1
- 230000035945 sensitivity Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/002—Recording, reproducing or erasing systems characterised by the shape or form of the carrier
- G11B7/0037—Recording, reproducing or erasing systems characterised by the shape or form of the carrier with discs
- G11B7/00375—Recording, reproducing or erasing systems characterised by the shape or form of the carrier with discs arrangements for detection of physical defects, e.g. of recording layer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9506—Optical discs
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Manufacturing Optical Record Carriers (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56016294A JPS57131039A (en) | 1981-02-07 | 1981-02-07 | Defect detector |
US06/345,153 US4464050A (en) | 1981-02-07 | 1982-02-02 | Apparatus for detecting optically defects |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56016294A JPS57131039A (en) | 1981-02-07 | 1981-02-07 | Defect detector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57131039A true JPS57131039A (en) | 1982-08-13 |
JPH036460B2 JPH036460B2 (ja) | 1991-01-30 |
Family
ID=11912519
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56016294A Granted JPS57131039A (en) | 1981-02-07 | 1981-02-07 | Defect detector |
Country Status (2)
Country | Link |
---|---|
US (1) | US4464050A (ja) |
JP (1) | JPS57131039A (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59115644U (ja) * | 1983-01-25 | 1984-08-04 | 日本電気ホームエレクトロニクス株式会社 | ワ−ク外観検査装置 |
JPS60132327A (ja) * | 1983-11-21 | 1985-07-15 | コンパニー・アンデユストリエル・デ・テレコミユニカシオン・セイテ‐アルカテル | 薄膜の膜厚モニタデバイス |
JPH0238951A (ja) * | 1988-07-29 | 1990-02-08 | Hitachi Ltd | 異物検出装置及び方法 |
JP2006010334A (ja) * | 2004-06-22 | 2006-01-12 | Lasertec Corp | 検査装置、検査方法及びパターン基板の製造方法 |
JP2018040761A (ja) * | 2016-09-09 | 2018-03-15 | 株式会社ミューチュアル | 被検査物の外観検査装置 |
Families Citing this family (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5990007A (ja) * | 1982-11-16 | 1984-05-24 | Olympus Optical Co Ltd | 光学式寸度測定装置 |
DE8303856U1 (de) * | 1983-02-11 | 1985-11-14 | Optische Werke G. Rodenstock, 8000 Muenchen | Vorrichtung zur Ermittlung einer Oberflächenstruktur, insbesondere der Rauheit |
JPS6189501A (ja) * | 1984-10-08 | 1986-05-07 | Hitachi Ltd | 境界面測定装置 |
US4723659A (en) * | 1985-06-28 | 1988-02-09 | Supernova Systems, Inc. | Apparatus for detecting impurities in translucent bodies |
JP2661913B2 (ja) * | 1986-05-02 | 1997-10-08 | パ−テイクル、メジユアリング、システムズ インコ−ポレ−テツド | 表面分析方法および表面分析装置 |
GB8621418D0 (en) * | 1986-09-05 | 1986-10-15 | Sira Ltd | Inspection apparatus |
US5110212A (en) * | 1986-10-02 | 1992-05-05 | Sentrol Systems, Ltd. | Smoothness sensor |
US4794264A (en) * | 1987-05-08 | 1988-12-27 | Qc Optics, Inc. | Surface defect detection and confirmation system and method |
US4859064A (en) * | 1988-05-09 | 1989-08-22 | Spectra-Tech, Inc. | Diffuse reflectance spectroscopy system and method |
JPH0786470B2 (ja) * | 1988-06-13 | 1995-09-20 | 富士写真フイルム株式会社 | ディスク表面検査方法及び装置 |
US5058982A (en) * | 1989-06-21 | 1991-10-22 | Orbot Systems Ltd. | Illumination system and inspection apparatus including same |
US5504732A (en) * | 1990-08-15 | 1996-04-02 | Del Mar Avionics | Null inflection detection and pulse expand latch in an optical recording system |
DE9013892U1 (de) * | 1990-10-05 | 1991-09-26 | Fa. Hermann Heye, 3063 Obernkirchen | Vorrichtung zur Prüfung auf Licht reflektierende Fehler |
US5153445A (en) * | 1991-07-22 | 1992-10-06 | General Motors Corporation | Method and apparatus for measuring orange peel and texture in painted surfaces |
US5301012A (en) * | 1992-10-30 | 1994-04-05 | International Business Machines Corporation | Optical technique for rapid inspection of via underetch and contamination |
US5329351A (en) * | 1992-11-24 | 1994-07-12 | Estek Corporation | Particle detection system with coincident detection |
CH685519A5 (de) * | 1993-03-29 | 1995-07-31 | Tencor Instruments | Verfahren und Einrichtung zur zerstörungsfreien Oberflächen-Inspektion. |
US5726748A (en) * | 1996-07-24 | 1998-03-10 | General Electric Company | Optical disc cloud analyzer |
US5867261A (en) * | 1997-04-28 | 1999-02-02 | International Business Machines Corporation | Surface inspection tool |
US6704435B1 (en) | 1997-04-28 | 2004-03-09 | International Business Machines Corporation | Surface inspection tool |
US6100971A (en) * | 1997-04-28 | 2000-08-08 | International Business Machines Corporation | Surface inspection tool |
US5847823A (en) * | 1997-04-28 | 1998-12-08 | International Business Machines Corporation | Surface inspection tool |
US5917589A (en) * | 1997-04-28 | 1999-06-29 | International Business Machines Corporation | Surface inspection tool |
US5969370A (en) * | 1997-04-28 | 1999-10-19 | International Business Machines Corporation | Surface inspection tool |
US6624884B1 (en) | 1997-04-28 | 2003-09-23 | International Business Machines Corporation | Surface inspection tool |
US5898492A (en) * | 1997-09-25 | 1999-04-27 | International Business Machines Corporation | Surface inspection tool using reflected and scattered light |
CN1314997A (zh) * | 1998-06-16 | 2001-09-26 | 奥宝科技有限公司 | 检查基本平坦平面的发光器 |
IL131284A (en) | 1999-08-05 | 2003-05-29 | Orbotech Ltd | Illumination for inspecting surfaces of articles |
US6614519B1 (en) | 2000-10-25 | 2003-09-02 | International Business Machines Corporation | Surface inspection tool using a parabolic mirror |
US6794650B2 (en) * | 2001-05-10 | 2004-09-21 | Ensco, Inc. | Method and apparatus for monitoring surface condition of a bowling lane |
US6457801B1 (en) | 2001-06-27 | 2002-10-01 | Lexmark International, Inc. | Method and apparatus for measuring ink dry time |
US7130039B2 (en) * | 2002-04-18 | 2006-10-31 | Kla-Tencor Technologies Corporation | Simultaneous multi-spot inspection and imaging |
US20040042001A1 (en) * | 2002-04-18 | 2004-03-04 | Kla-Tencor Technologies Corporation | Simultaneous multi-spot inspection and imaging |
US7425719B2 (en) * | 2005-01-13 | 2008-09-16 | Wd Media, Inc. | Method and apparatus for selectively providing data from a test head to a processor |
FR2880945B1 (fr) * | 2005-01-14 | 2007-04-06 | Essilor Int | Palpeur optique ainsi que dispositif et procede le mettant en oeuvre. |
US7489393B2 (en) * | 2005-03-02 | 2009-02-10 | Kla-Tencor Technologies Corporation | Enhanced simultaneous multi-spot inspection and imaging |
WO2010130673A1 (en) * | 2009-05-15 | 2010-11-18 | Asml Netherlands B.V. | Inspection method for lithography |
CN105911072B (zh) * | 2016-06-08 | 2018-09-07 | 浙江工业大学 | 一种球体表面微小瑕疵的光学快速检测装置 |
CN108507909B (zh) * | 2017-02-28 | 2021-04-09 | 上海微电子装备(集团)股份有限公司 | 一种平板颗粒度检测装置 |
CN111665259A (zh) * | 2019-03-08 | 2020-09-15 | 深圳中科飞测科技有限公司 | 检测设备及检测方法 |
US11105740B2 (en) * | 2019-10-22 | 2021-08-31 | Applied Materials Israel Ltd. | Optical inspection |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52140384A (en) * | 1976-05-19 | 1977-11-22 | Hitachi Ltd | Flaw detector |
JPS54128682A (en) * | 1978-03-30 | 1979-10-05 | Hitachi Ltd | Automatic detector for foreign matters |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3229564A (en) * | 1961-05-12 | 1966-01-18 | Bausch & Lomb | Reflectometer |
US4314763A (en) * | 1979-01-04 | 1982-02-09 | Rca Corporation | Defect detection system |
-
1981
- 1981-02-07 JP JP56016294A patent/JPS57131039A/ja active Granted
-
1982
- 1982-02-02 US US06/345,153 patent/US4464050A/en not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52140384A (en) * | 1976-05-19 | 1977-11-22 | Hitachi Ltd | Flaw detector |
JPS54128682A (en) * | 1978-03-30 | 1979-10-05 | Hitachi Ltd | Automatic detector for foreign matters |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59115644U (ja) * | 1983-01-25 | 1984-08-04 | 日本電気ホームエレクトロニクス株式会社 | ワ−ク外観検査装置 |
JPS60132327A (ja) * | 1983-11-21 | 1985-07-15 | コンパニー・アンデユストリエル・デ・テレコミユニカシオン・セイテ‐アルカテル | 薄膜の膜厚モニタデバイス |
JPH0238951A (ja) * | 1988-07-29 | 1990-02-08 | Hitachi Ltd | 異物検出装置及び方法 |
JP2006010334A (ja) * | 2004-06-22 | 2006-01-12 | Lasertec Corp | 検査装置、検査方法及びパターン基板の製造方法 |
JP4654408B2 (ja) * | 2004-06-22 | 2011-03-23 | レーザーテック株式会社 | 検査装置、検査方法及びパターン基板の製造方法 |
JP2018040761A (ja) * | 2016-09-09 | 2018-03-15 | 株式会社ミューチュアル | 被検査物の外観検査装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH036460B2 (ja) | 1991-01-30 |
US4464050A (en) | 1984-08-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS57131039A (en) | Defect detector | |
US5037202A (en) | Measurement of size and refractive index of particles using the complex forward-scattered electromagnetic field | |
JPS6435246A (en) | Apparatus and method for measuring nature of surface | |
JPS56126747A (en) | Inspecting method for flaw, alien substance and the like on surface of sample and device therefor | |
US4019060A (en) | Fluorescence locating system and method | |
JPH0650903A (ja) | 表面粒子検出装置及び方法 | |
JPS5624504A (en) | Photoelectric detector | |
JPS5752005A (en) | Focus detecting method | |
JPS60224037A (ja) | 漏れ検出方法および装置 | |
JPS54101390A (en) | Foreign matter inspector | |
US3779649A (en) | Method of and an electro-optical system for inspecting material | |
JPS58204353A (ja) | 金属物体表面探傷方法 | |
JPS5686340A (en) | Automatic detector for foreign matter | |
JPS643545A (en) | Method and apparatus for inspection | |
US6236056B1 (en) | Defect evaluation apparatus for evaluating defects and shape information thereof in an object or on the surface of an object | |
JP2577920B2 (ja) | 異物有無検査装置 | |
JPS5599049A (en) | Defect detector | |
JPS58204356A (ja) | 金属物体表面探傷方法 | |
JPS54124780A (en) | Surface inspection apparatus | |
JPS5643539A (en) | Defect inspection device of face plate | |
JPS55124008A (en) | Defect inspecting apparatus | |
JPS56107150A (en) | Defect detection device | |
JPS572522A (en) | Defect inspecting device for regular pattern | |
JPS54121764A (en) | Surface roughness evaluating apparatus | |
RU2096757C1 (ru) | Устройство для снятия спектра поверхностного плазменного резонанса |