JPS57128944A - Maufacture of semiconductor device - Google Patents

Maufacture of semiconductor device

Info

Publication number
JPS57128944A
JPS57128944A JP1487881A JP1487881A JPS57128944A JP S57128944 A JPS57128944 A JP S57128944A JP 1487881 A JP1487881 A JP 1487881A JP 1487881 A JP1487881 A JP 1487881A JP S57128944 A JPS57128944 A JP S57128944A
Authority
JP
Japan
Prior art keywords
groove
oxide film
phosphorous glass
substrate
nitride film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1487881A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6217863B2 (enExample
Inventor
Hiroyuki Shiraki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP1487881A priority Critical patent/JPS57128944A/ja
Publication of JPS57128944A publication Critical patent/JPS57128944A/ja
Publication of JPS6217863B2 publication Critical patent/JPS6217863B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
JP1487881A 1981-02-03 1981-02-03 Maufacture of semiconductor device Granted JPS57128944A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1487881A JPS57128944A (en) 1981-02-03 1981-02-03 Maufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1487881A JPS57128944A (en) 1981-02-03 1981-02-03 Maufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS57128944A true JPS57128944A (en) 1982-08-10
JPS6217863B2 JPS6217863B2 (enExample) 1987-04-20

Family

ID=11873264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1487881A Granted JPS57128944A (en) 1981-02-03 1981-02-03 Maufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS57128944A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007311655A (ja) * 2006-05-19 2007-11-29 Shindengen Electric Mfg Co Ltd 半導体装置の製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53114355A (en) * 1977-03-16 1978-10-05 Hitachi Ltd Manufacture of semiconductor device
JPS54132177A (en) * 1978-04-05 1979-10-13 Nec Corp Semiconductor device and its manufacture

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53114355A (en) * 1977-03-16 1978-10-05 Hitachi Ltd Manufacture of semiconductor device
JPS54132177A (en) * 1978-04-05 1979-10-13 Nec Corp Semiconductor device and its manufacture

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007311655A (ja) * 2006-05-19 2007-11-29 Shindengen Electric Mfg Co Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6217863B2 (enExample) 1987-04-20

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