JPS571254A - Semiconductor device and its manufacture - Google Patents
Semiconductor device and its manufactureInfo
- Publication number
- JPS571254A JPS571254A JP7431780A JP7431780A JPS571254A JP S571254 A JPS571254 A JP S571254A JP 7431780 A JP7431780 A JP 7431780A JP 7431780 A JP7431780 A JP 7431780A JP S571254 A JPS571254 A JP S571254A
- Authority
- JP
- Japan
- Prior art keywords
- polycrystalline
- type
- layer
- withstand voltage
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 5
- 238000005530 etching Methods 0.000 abstract 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 230000006866 deterioration Effects 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 238000000576 coating method Methods 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 238000011109 contamination Methods 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 230000009545 invasion Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract 1
- 230000001681 protective effect Effects 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions
- H10D64/23—Electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. sources, drains, anodes or cathodes
Landscapes
- Electrodes Of Semiconductors (AREA)
- Bipolar Transistors (AREA)
- Thyristors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7431780A JPS571254A (en) | 1980-06-04 | 1980-06-04 | Semiconductor device and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7431780A JPS571254A (en) | 1980-06-04 | 1980-06-04 | Semiconductor device and its manufacture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS571254A true JPS571254A (en) | 1982-01-06 |
| JPS6228571B2 JPS6228571B2 (enrdf_load_stackoverflow) | 1987-06-22 |
Family
ID=13543614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7431780A Granted JPS571254A (en) | 1980-06-04 | 1980-06-04 | Semiconductor device and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS571254A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6289360A (ja) * | 1985-10-15 | 1987-04-23 | シ−メンス、アクチエンゲゼルシヤフト | 電力用サイリスタ |
| JPH02249230A (ja) * | 1988-11-25 | 1990-10-05 | Fujitsu Ltd | 金属電極の形成方法 |
-
1980
- 1980-06-04 JP JP7431780A patent/JPS571254A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6289360A (ja) * | 1985-10-15 | 1987-04-23 | シ−メンス、アクチエンゲゼルシヤフト | 電力用サイリスタ |
| JPH02249230A (ja) * | 1988-11-25 | 1990-10-05 | Fujitsu Ltd | 金属電極の形成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6228571B2 (enrdf_load_stackoverflow) | 1987-06-22 |
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