JPS57111043A - Semiconductor integrated circuit and manufacture thereof - Google Patents

Semiconductor integrated circuit and manufacture thereof

Info

Publication number
JPS57111043A
JPS57111043A JP15209181A JP15209181A JPS57111043A JP S57111043 A JPS57111043 A JP S57111043A JP 15209181 A JP15209181 A JP 15209181A JP 15209181 A JP15209181 A JP 15209181A JP S57111043 A JPS57111043 A JP S57111043A
Authority
JP
Japan
Prior art keywords
integrated circuit
semiconductor integrated
manufacture
semiconductor
regions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15209181A
Other languages
Japanese (ja)
Inventor
Shinji Okuhara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15209181A priority Critical patent/JPS57111043A/en
Publication of JPS57111043A publication Critical patent/JPS57111043A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76Making of isolation regions between components
    • H01L21/762Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers

Abstract

PURPOSE:To improve the integration of a semiconductor integrated circuit by forming more than two circuit elements in a single crystal semiconductor region enclosed with an insulation isolating layer in a polycrystalline semiconductor substrate. CONSTITUTION:Single crystal semiconductor regions 12, 12' enclosed with insulating films 13, 13' are formed in a polycrystalline semiconductor substrate 14, an impurity diffused region 16 is formed at neck part 15 of a single crystalline semiconductor 12 to be divided into two regions, thereby forming independent circuit elements.
JP15209181A 1981-09-28 1981-09-28 Semiconductor integrated circuit and manufacture thereof Pending JPS57111043A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15209181A JPS57111043A (en) 1981-09-28 1981-09-28 Semiconductor integrated circuit and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15209181A JPS57111043A (en) 1981-09-28 1981-09-28 Semiconductor integrated circuit and manufacture thereof

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP11185576A Division JPS5338275A (en) 1976-09-20 1976-09-20 Semiconductor integrated circuit and its production

Publications (1)

Publication Number Publication Date
JPS57111043A true JPS57111043A (en) 1982-07-10

Family

ID=15532845

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15209181A Pending JPS57111043A (en) 1981-09-28 1981-09-28 Semiconductor integrated circuit and manufacture thereof

Country Status (1)

Country Link
JP (1) JPS57111043A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6178137A (en) * 1984-09-26 1986-04-21 Oki Electric Ind Co Ltd Semiconductor device
JP2005259775A (en) * 2004-03-09 2005-09-22 Oki Electric Ind Co Ltd Semiconductor device and method of manufacturing the same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5029423U (en) * 1973-07-09 1975-04-03
JPS5551342A (en) * 1978-10-12 1980-04-15 Toshiba Corp Brazing test unit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5029423U (en) * 1973-07-09 1975-04-03
JPS5551342A (en) * 1978-10-12 1980-04-15 Toshiba Corp Brazing test unit

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6178137A (en) * 1984-09-26 1986-04-21 Oki Electric Ind Co Ltd Semiconductor device
JP2005259775A (en) * 2004-03-09 2005-09-22 Oki Electric Ind Co Ltd Semiconductor device and method of manufacturing the same
JP4657614B2 (en) * 2004-03-09 2011-03-23 Okiセミコンダクタ株式会社 Semiconductor device and manufacturing method of semiconductor device

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