JPS57111043A - Semiconductor integrated circuit and manufacture thereof - Google Patents
Semiconductor integrated circuit and manufacture thereofInfo
- Publication number
- JPS57111043A JPS57111043A JP15209181A JP15209181A JPS57111043A JP S57111043 A JPS57111043 A JP S57111043A JP 15209181 A JP15209181 A JP 15209181A JP 15209181 A JP15209181 A JP 15209181A JP S57111043 A JPS57111043 A JP S57111043A
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- semiconductor integrated
- manufacture
- semiconductor
- regions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
Abstract
PURPOSE:To improve the integration of a semiconductor integrated circuit by forming more than two circuit elements in a single crystal semiconductor region enclosed with an insulation isolating layer in a polycrystalline semiconductor substrate. CONSTITUTION:Single crystal semiconductor regions 12, 12' enclosed with insulating films 13, 13' are formed in a polycrystalline semiconductor substrate 14, an impurity diffused region 16 is formed at neck part 15 of a single crystalline semiconductor 12 to be divided into two regions, thereby forming independent circuit elements.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15209181A JPS57111043A (en) | 1981-09-28 | 1981-09-28 | Semiconductor integrated circuit and manufacture thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15209181A JPS57111043A (en) | 1981-09-28 | 1981-09-28 | Semiconductor integrated circuit and manufacture thereof |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11185576A Division JPS5338275A (en) | 1976-09-20 | 1976-09-20 | Semiconductor integrated circuit and its production |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57111043A true JPS57111043A (en) | 1982-07-10 |
Family
ID=15532845
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15209181A Pending JPS57111043A (en) | 1981-09-28 | 1981-09-28 | Semiconductor integrated circuit and manufacture thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57111043A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6178137A (en) * | 1984-09-26 | 1986-04-21 | Oki Electric Ind Co Ltd | Semiconductor device |
JP2005259775A (en) * | 2004-03-09 | 2005-09-22 | Oki Electric Ind Co Ltd | Semiconductor device and method of manufacturing the same |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5029423U (en) * | 1973-07-09 | 1975-04-03 | ||
JPS5551342A (en) * | 1978-10-12 | 1980-04-15 | Toshiba Corp | Brazing test unit |
-
1981
- 1981-09-28 JP JP15209181A patent/JPS57111043A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5029423U (en) * | 1973-07-09 | 1975-04-03 | ||
JPS5551342A (en) * | 1978-10-12 | 1980-04-15 | Toshiba Corp | Brazing test unit |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6178137A (en) * | 1984-09-26 | 1986-04-21 | Oki Electric Ind Co Ltd | Semiconductor device |
JP2005259775A (en) * | 2004-03-09 | 2005-09-22 | Oki Electric Ind Co Ltd | Semiconductor device and method of manufacturing the same |
JP4657614B2 (en) * | 2004-03-09 | 2011-03-23 | Okiセミコンダクタ株式会社 | Semiconductor device and manufacturing method of semiconductor device |
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