JPS5698835A - Method of recognition of semiconductor pellet - Google Patents

Method of recognition of semiconductor pellet

Info

Publication number
JPS5698835A
JPS5698835A JP132280A JP132280A JPS5698835A JP S5698835 A JPS5698835 A JP S5698835A JP 132280 A JP132280 A JP 132280A JP 132280 A JP132280 A JP 132280A JP S5698835 A JPS5698835 A JP S5698835A
Authority
JP
Japan
Prior art keywords
pellet
detection
external shape
corners
defect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP132280A
Other languages
English (en)
Japanese (ja)
Other versions
JPS634348B2 (enExample
Inventor
Masuzo Ikumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP132280A priority Critical patent/JPS5698835A/ja
Publication of JPS5698835A publication Critical patent/JPS5698835A/ja
Publication of JPS634348B2 publication Critical patent/JPS634348B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W46/00—
    • H10W46/501—

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Die Bonding (AREA)
JP132280A 1980-01-11 1980-01-11 Method of recognition of semiconductor pellet Granted JPS5698835A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP132280A JPS5698835A (en) 1980-01-11 1980-01-11 Method of recognition of semiconductor pellet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP132280A JPS5698835A (en) 1980-01-11 1980-01-11 Method of recognition of semiconductor pellet

Publications (2)

Publication Number Publication Date
JPS5698835A true JPS5698835A (en) 1981-08-08
JPS634348B2 JPS634348B2 (enExample) 1988-01-28

Family

ID=11498250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP132280A Granted JPS5698835A (en) 1980-01-11 1980-01-11 Method of recognition of semiconductor pellet

Country Status (1)

Country Link
JP (1) JPS5698835A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59211239A (ja) * 1983-05-17 1984-11-30 Nec Corp 半導体ペレツト配列機
JPS6085520A (ja) * 1983-10-17 1985-05-15 Hitachi Ltd パタ−ン検査方法
US5881888A (en) * 1995-10-23 1999-03-16 Kabushiki Kaisha Shinkawa Wafer die pick-up method
US6628818B1 (en) * 1999-03-31 2003-09-30 Nec Machinery Corporation Method for recognizing images of fine work pieces and pickup apparatus employing the method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59211239A (ja) * 1983-05-17 1984-11-30 Nec Corp 半導体ペレツト配列機
JPS6085520A (ja) * 1983-10-17 1985-05-15 Hitachi Ltd パタ−ン検査方法
US5881888A (en) * 1995-10-23 1999-03-16 Kabushiki Kaisha Shinkawa Wafer die pick-up method
US6628818B1 (en) * 1999-03-31 2003-09-30 Nec Machinery Corporation Method for recognizing images of fine work pieces and pickup apparatus employing the method

Also Published As

Publication number Publication date
JPS634348B2 (enExample) 1988-01-28

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