JPS5688390A - Manufacture of semiconductor laser - Google Patents
Manufacture of semiconductor laserInfo
- Publication number
- JPS5688390A JPS5688390A JP16593879A JP16593879A JPS5688390A JP S5688390 A JPS5688390 A JP S5688390A JP 16593879 A JP16593879 A JP 16593879A JP 16593879 A JP16593879 A JP 16593879A JP S5688390 A JPS5688390 A JP S5688390A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- type
- semiconductor laser
- manufacture
- grown
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000013078 crystal Substances 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000004973 liquid crystal related substance Substances 0.000 abstract 1
- 239000007791 liquid phase Substances 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Semiconductor Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16593879A JPS5688390A (en) | 1979-12-20 | 1979-12-20 | Manufacture of semiconductor laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16593879A JPS5688390A (en) | 1979-12-20 | 1979-12-20 | Manufacture of semiconductor laser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5688390A true JPS5688390A (en) | 1981-07-17 |
| JPS6237835B2 JPS6237835B2 (enrdf_load_stackoverflow) | 1987-08-14 |
Family
ID=15821861
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16593879A Granted JPS5688390A (en) | 1979-12-20 | 1979-12-20 | Manufacture of semiconductor laser |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5688390A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5882589A (ja) * | 1981-11-12 | 1983-05-18 | Nec Corp | 半導体レ−ザ |
| JPS58131784A (ja) * | 1982-01-29 | 1983-08-05 | Nec Corp | 埋め込みヘテロ構造半導体レ−ザ |
| JPS60115284A (ja) * | 1983-11-26 | 1985-06-21 | Nippon Telegr & Teleph Corp <Ntt> | 半導体レ−ザ及びその製法 |
-
1979
- 1979-12-20 JP JP16593879A patent/JPS5688390A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5882589A (ja) * | 1981-11-12 | 1983-05-18 | Nec Corp | 半導体レ−ザ |
| JPS58131784A (ja) * | 1982-01-29 | 1983-08-05 | Nec Corp | 埋め込みヘテロ構造半導体レ−ザ |
| JPS60115284A (ja) * | 1983-11-26 | 1985-06-21 | Nippon Telegr & Teleph Corp <Ntt> | 半導体レ−ザ及びその製法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6237835B2 (enrdf_load_stackoverflow) | 1987-08-14 |
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