JPS5678128A - Manufacture of semiconductor element - Google Patents

Manufacture of semiconductor element

Info

Publication number
JPS5678128A
JPS5678128A JP15430979A JP15430979A JPS5678128A JP S5678128 A JPS5678128 A JP S5678128A JP 15430979 A JP15430979 A JP 15430979A JP 15430979 A JP15430979 A JP 15430979A JP S5678128 A JPS5678128 A JP S5678128A
Authority
JP
Japan
Prior art keywords
layer
substrate
diffused
lifetime
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15430979A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6119104B2 (en:Method
Inventor
Junko Akagi
Minoru Azuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP15430979A priority Critical patent/JPS5678128A/ja
Publication of JPS5678128A publication Critical patent/JPS5678128A/ja
Publication of JPS6119104B2 publication Critical patent/JPS6119104B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/90—

Landscapes

  • Bipolar Transistors (AREA)
  • Thyristors (AREA)
JP15430979A 1979-11-30 1979-11-30 Manufacture of semiconductor element Granted JPS5678128A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15430979A JPS5678128A (en) 1979-11-30 1979-11-30 Manufacture of semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15430979A JPS5678128A (en) 1979-11-30 1979-11-30 Manufacture of semiconductor element

Publications (2)

Publication Number Publication Date
JPS5678128A true JPS5678128A (en) 1981-06-26
JPS6119104B2 JPS6119104B2 (en:Method) 1986-05-15

Family

ID=15581292

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15430979A Granted JPS5678128A (en) 1979-11-30 1979-11-30 Manufacture of semiconductor element

Country Status (1)

Country Link
JP (1) JPS5678128A (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005311126A (ja) * 2004-04-22 2005-11-04 Shin Etsu Handotai Co Ltd ｐ型シリコン単結晶ウェーハ及びその製造方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0178703U (en:Method) * 1987-11-17 1989-05-26
JPH05346102A (ja) * 1992-06-11 1993-12-27 Sailor Pen Co Ltd:The 垂直エアシリンダの制御方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005311126A (ja) * 2004-04-22 2005-11-04 Shin Etsu Handotai Co Ltd ｐ型シリコン単結晶ウェーハ及びその製造方法

Also Published As

Publication number Publication date
JPS6119104B2 (en:Method) 1986-05-15

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