JPS6119104B2 - - Google Patents

Info

Publication number
JPS6119104B2
JPS6119104B2 JP54154309A JP15430979A JPS6119104B2 JP S6119104 B2 JPS6119104 B2 JP S6119104B2 JP 54154309 A JP54154309 A JP 54154309A JP 15430979 A JP15430979 A JP 15430979A JP S6119104 B2 JPS6119104 B2 JP S6119104B2
Authority
JP
Japan
Prior art keywords
layer
phosphorus
substrate
type layer
lifetime
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54154309A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5678128A (en
Inventor
Junko Akagi
Minoru Azuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP15430979A priority Critical patent/JPS5678128A/ja
Publication of JPS5678128A publication Critical patent/JPS5678128A/ja
Publication of JPS6119104B2 publication Critical patent/JPS6119104B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/90—

Landscapes

  • Bipolar Transistors (AREA)
  • Thyristors (AREA)
JP15430979A 1979-11-30 1979-11-30 Manufacture of semiconductor element Granted JPS5678128A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15430979A JPS5678128A (en) 1979-11-30 1979-11-30 Manufacture of semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15430979A JPS5678128A (en) 1979-11-30 1979-11-30 Manufacture of semiconductor element

Publications (2)

Publication Number Publication Date
JPS5678128A JPS5678128A (en) 1981-06-26
JPS6119104B2 true JPS6119104B2 (en:Method) 1986-05-15

Family

ID=15581292

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15430979A Granted JPS5678128A (en) 1979-11-30 1979-11-30 Manufacture of semiconductor element

Country Status (1)

Country Link
JP (1) JPS5678128A (en:Method)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0178703U (en:Method) * 1987-11-17 1989-05-26
JPH05346102A (ja) * 1992-06-11 1993-12-27 Sailor Pen Co Ltd:The 垂直エアシリンダの制御方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4826993B2 (ja) * 2004-04-22 2011-11-30 信越半導体株式会社 ｐ型シリコン単結晶ウェーハの製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0178703U (en:Method) * 1987-11-17 1989-05-26
JPH05346102A (ja) * 1992-06-11 1993-12-27 Sailor Pen Co Ltd:The 垂直エアシリンダの制御方法

Also Published As

Publication number Publication date
JPS5678128A (en) 1981-06-26

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