JPS5612782A - Manufacture of solar battery - Google Patents
Manufacture of solar batteryInfo
- Publication number
- JPS5612782A JPS5612782A JP8858279A JP8858279A JPS5612782A JP S5612782 A JPS5612782 A JP S5612782A JP 8858279 A JP8858279 A JP 8858279A JP 8858279 A JP8858279 A JP 8858279A JP S5612782 A JPS5612782 A JP S5612782A
- Authority
- JP
- Japan
- Prior art keywords
- diffusion layer
- electrode
- main surface
- impurity
- treatment process
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000009792 diffusion process Methods 0.000 abstract 6
- 239000012535 impurity Substances 0.000 abstract 2
- 239000004065 semiconductor Substances 0.000 abstract 2
- 238000007669 thermal treatment Methods 0.000 abstract 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 238000000137 annealing Methods 0.000 abstract 1
- 229910052796 boron Inorganic materials 0.000 abstract 1
- 230000003449 preventive effect Effects 0.000 abstract 1
- 230000035945 sensitivity Effects 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Sustainable Development (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photovoltaic Devices (AREA)
Abstract
PURPOSE:To improve the sensitivity of short wave length and to prevent an increase in leakage current as well by forming an impurity diffusion layer so that a shallow part and a deep part may alternately locate on the main surface of a semiconductor substrate wherein an electrode is provided at the deep part of the diffusion layer. CONSTITUTION:A diffusion layer 23 is formed by selectively and insularly or beltlikely diffusing an impurity, for example, boron which can become acceptor from the main surface of an N-type silicon semiconductor 21. Wherein, the above is done at the first thermal treatment process. Next, a new diffusion layer 24 is formed by connecting the insular or beltlike diffusion layer 23 by the second thermal treatment process. Furthermore, a reflection preventive film 25 is formed by performing annealing treatment in oxide atmosphere. Finally, an electrode 26 is formed at a part of the diffusion layer 23.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8858279A JPS5612782A (en) | 1979-07-11 | 1979-07-11 | Manufacture of solar battery |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8858279A JPS5612782A (en) | 1979-07-11 | 1979-07-11 | Manufacture of solar battery |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5612782A true JPS5612782A (en) | 1981-02-07 |
Family
ID=13946831
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8858279A Pending JPS5612782A (en) | 1979-07-11 | 1979-07-11 | Manufacture of solar battery |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5612782A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL1012961C2 (en) * | 1999-09-02 | 2001-03-05 | Stichting Energie | A method of manufacturing a semiconductor device. |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5111584A (en) * | 1974-07-19 | 1976-01-29 | Matsushita Electric Ind Co Ltd |
-
1979
- 1979-07-11 JP JP8858279A patent/JPS5612782A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5111584A (en) * | 1974-07-19 | 1976-01-29 | Matsushita Electric Ind Co Ltd |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL1012961C2 (en) * | 1999-09-02 | 2001-03-05 | Stichting Energie | A method of manufacturing a semiconductor device. |
WO2001024279A1 (en) * | 1999-09-02 | 2001-04-05 | Stichting Energieonderzoek Centrum Nederland | Method for the production of a semiconductor device |
US6756290B1 (en) | 1999-09-02 | 2004-06-29 | Stichting Energieonderzoek Centrum Nederland | Method for the production of a semiconductor device |
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