JPS567485A - Manufacturing of luminous element - Google Patents
Manufacturing of luminous elementInfo
- Publication number
- JPS567485A JPS567485A JP8303379A JP8303379A JPS567485A JP S567485 A JPS567485 A JP S567485A JP 8303379 A JP8303379 A JP 8303379A JP 8303379 A JP8303379 A JP 8303379A JP S567485 A JPS567485 A JP S567485A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- substrate
- type
- current
- luminous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 6
- 229910001218 Gallium arsenide Inorganic materials 0.000 abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 239000000835 fiber Substances 0.000 abstract 1
- 239000007791 liquid phase Substances 0.000 abstract 1
- 230000002093 peripheral effect Effects 0.000 abstract 1
- 238000001259 photo etching Methods 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
- H01L33/24—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate of the light emitting region, e.g. non-planar junction
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Led Devices (AREA)
Abstract
PURPOSE:To effectively obtain a current narrowed part to make it suitable for use in fiber bonding by providing annular grooves at parts other than the current flow path of the substrate when a luminous element is fabricated, and thereafter growing an active layer such as a luminous layer or the like on the substrate. CONSTITUTION:On the peripheral side of a current path part 10 of a P-type GaAs substrate 1 used in the formation of a luminous element, there are formed an annular groove 2 and a slitlike groove 11 encircling the substrate 1 by photoetching. The substrate 1 is fabricated in this manner, and as these grooves 2 and 11 are buried in the substrate 1, a Cr doped high resistance Ga0.7Al0.3As layer 3, a Zn doped P-type Ga0.7Al0.3As layer 4, a P-type GaAs luminous layer 5 and an N-type Ga0.7Al0.3As layer 6 are laminated and subjected to epitaxial growth in liquid phase. Thereafter, an N-type Ga0.9Al0.1As contact layer 7 is applied thereon, and further the layer 7 is covered with an Al2O3 film 8 to open a window, where S is diffused to form a current path 9. By this arrangement, the diffusion of Zn in the layer 4 to the layer 3 upon the diffusion of S is limited to a current path 10 and a desired current narrowing can be achieved.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8303379A JPS567485A (en) | 1979-06-29 | 1979-06-29 | Manufacturing of luminous element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8303379A JPS567485A (en) | 1979-06-29 | 1979-06-29 | Manufacturing of luminous element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS567485A true JPS567485A (en) | 1981-01-26 |
Family
ID=13790907
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8303379A Pending JPS567485A (en) | 1979-06-29 | 1979-06-29 | Manufacturing of luminous element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS567485A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0563235A (en) * | 1991-08-29 | 1993-03-12 | Shin Etsu Handotai Co Ltd | Manufacture of semiconductor element |
JPH06502281A (en) * | 1991-05-08 | 1994-03-10 | アセア ブラウン ボベリ アクチボラグ | surface emitting light emitting diode |
-
1979
- 1979-06-29 JP JP8303379A patent/JPS567485A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06502281A (en) * | 1991-05-08 | 1994-03-10 | アセア ブラウン ボベリ アクチボラグ | surface emitting light emitting diode |
JPH0563235A (en) * | 1991-08-29 | 1993-03-12 | Shin Etsu Handotai Co Ltd | Manufacture of semiconductor element |
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