JPS5673915A - Manufacture for quartz oscillator - Google Patents

Manufacture for quartz oscillator

Info

Publication number
JPS5673915A
JPS5673915A JP15050879A JP15050879A JPS5673915A JP S5673915 A JPS5673915 A JP S5673915A JP 15050879 A JP15050879 A JP 15050879A JP 15050879 A JP15050879 A JP 15050879A JP S5673915 A JPS5673915 A JP S5673915A
Authority
JP
Japan
Prior art keywords
mask
layer
quartz
substance layer
substance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15050879A
Other languages
Japanese (ja)
Inventor
Toshitsugu Ueda
Eiji Ogita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Hokushin Electric Corp
Yokogawa Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Hokushin Electric Corp, Yokogawa Electric Works Ltd filed Critical Yokogawa Hokushin Electric Corp
Priority to JP15050879A priority Critical patent/JPS5673915A/en
Publication of JPS5673915A publication Critical patent/JPS5673915A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks

Abstract

PURPOSE:To save the process of substrate rinsing, by providing a mask substance layer on one side of quartz substance with the 1st process and providing a substance layer having the conductivity and withstanding the quartz processing agent on it and a resist layer further on it. CONSTITUTION:The 1st mask substance layer 4 is coated on a quartz substrate 1, the 2nd mask substane layer 5 is coated on it, and the resist layer 3 is coated further on it. The 2nd mask substance layer 5 is selectively removed to form the electrode pattern. The resist layer 3 is again provided, and the substrate 1 is formed to the shape of quartz oscillator with a quartz processing agent. Next, the 1st mask substance layer 4 is selectively removed by taking the 2nd mask substance layer 5 as a mask to constitute the quartz oscillator having the electrodes 4 and 5.
JP15050879A 1979-11-20 1979-11-20 Manufacture for quartz oscillator Pending JPS5673915A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15050879A JPS5673915A (en) 1979-11-20 1979-11-20 Manufacture for quartz oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15050879A JPS5673915A (en) 1979-11-20 1979-11-20 Manufacture for quartz oscillator

Publications (1)

Publication Number Publication Date
JPS5673915A true JPS5673915A (en) 1981-06-19

Family

ID=15498391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15050879A Pending JPS5673915A (en) 1979-11-20 1979-11-20 Manufacture for quartz oscillator

Country Status (1)

Country Link
JP (1) JPS5673915A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5954309A (en) * 1982-09-22 1984-03-29 Seiko Epson Corp Manufacture of crystal oscillator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5954309A (en) * 1982-09-22 1984-03-29 Seiko Epson Corp Manufacture of crystal oscillator

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