JPS56137622A - Forming of cross pattern electrode - Google Patents
Forming of cross pattern electrodeInfo
- Publication number
- JPS56137622A JPS56137622A JP4089280A JP4089280A JPS56137622A JP S56137622 A JPS56137622 A JP S56137622A JP 4089280 A JP4089280 A JP 4089280A JP 4089280 A JP4089280 A JP 4089280A JP S56137622 A JPS56137622 A JP S56137622A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- conductor layer
- pattern electrode
- cross pattern
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004020 conductor Substances 0.000 abstract 5
- 238000010030 laminating Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
- Bipolar Transistors (AREA)
- Weting (AREA)
Abstract
PURPOSE:To obtain a cross pattern electrode having satisfactory linear width precision by providing the first pattern on a conductor pattern of line and space to be etched and further laminating a conductor layer through the intermediary of the second pattern. CONSTITUTION:A conductor layer 11 is formed on a substrate 12 at a fixed interval, a resist mask 14 of the first pattern is provided, an exposed conductor layer 11 is etched out of a window part 15 and the mask 14 is removed. On the said layer 11, a resist mask 17 of the second pattern is provided and a conductor layer is adhered onto a window 18 to be lifted off. In this manner, a prearranged cross pattern electrode is completed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4089280A JPS56137622A (en) | 1980-03-28 | 1980-03-28 | Forming of cross pattern electrode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4089280A JPS56137622A (en) | 1980-03-28 | 1980-03-28 | Forming of cross pattern electrode |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56137622A true JPS56137622A (en) | 1981-10-27 |
JPS6328337B2 JPS6328337B2 (en) | 1988-06-08 |
Family
ID=12593158
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4089280A Granted JPS56137622A (en) | 1980-03-28 | 1980-03-28 | Forming of cross pattern electrode |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56137622A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58175830A (en) * | 1982-04-08 | 1983-10-15 | Matsushita Electric Ind Co Ltd | Forming method for pattern |
-
1980
- 1980-03-28 JP JP4089280A patent/JPS56137622A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58175830A (en) * | 1982-04-08 | 1983-10-15 | Matsushita Electric Ind Co Ltd | Forming method for pattern |
JPH0219970B2 (en) * | 1982-04-08 | 1990-05-07 | Matsushita Electric Ind Co Ltd |
Also Published As
Publication number | Publication date |
---|---|
JPS6328337B2 (en) | 1988-06-08 |
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