JPS5669382A - Surface treatment by plasma - Google Patents
Surface treatment by plasmaInfo
- Publication number
- JPS5669382A JPS5669382A JP14386879A JP14386879A JPS5669382A JP S5669382 A JPS5669382 A JP S5669382A JP 14386879 A JP14386879 A JP 14386879A JP 14386879 A JP14386879 A JP 14386879A JP S5669382 A JPS5669382 A JP S5669382A
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- organic matters
- surface treatment
- discharge
- treating object
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14386879A JPS5669382A (en) | 1979-11-08 | 1979-11-08 | Surface treatment by plasma |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14386879A JPS5669382A (en) | 1979-11-08 | 1979-11-08 | Surface treatment by plasma |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5669382A true JPS5669382A (en) | 1981-06-10 |
JPS6319592B2 JPS6319592B2 (ja) | 1988-04-23 |
Family
ID=15348854
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14386879A Granted JPS5669382A (en) | 1979-11-08 | 1979-11-08 | Surface treatment by plasma |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5669382A (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5950179A (ja) * | 1982-09-16 | 1984-03-23 | Ulvac Corp | 真空槽のクリ−ニング方法 |
JPH01201099A (ja) * | 1987-02-24 | 1989-08-14 | Semiconductor Energy Lab Co Ltd | 不要物の除去方法 |
JP2006284887A (ja) * | 2005-03-31 | 2006-10-19 | International Display Technology Kk | 低抵抗dlc配向膜を備えた液晶セルとその製造方法 |
JP2006525426A (ja) * | 2003-05-08 | 2006-11-09 | コレクトール グループ デー.オー.オー. | 銅またはニッケルを洗浄するためのプラズマ処理 |
CN106944419A (zh) * | 2017-05-12 | 2017-07-14 | 中国工程物理研究院核物理与化学研究所 | 一种去除表面氚污染的等离子体去污系统 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0322090U (ja) * | 1989-07-14 | 1991-03-06 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55138094A (en) * | 1979-04-16 | 1980-10-28 | Nec Corp | Forming method for film on substrate coated with metallic film |
-
1979
- 1979-11-08 JP JP14386879A patent/JPS5669382A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55138094A (en) * | 1979-04-16 | 1980-10-28 | Nec Corp | Forming method for film on substrate coated with metallic film |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5950179A (ja) * | 1982-09-16 | 1984-03-23 | Ulvac Corp | 真空槽のクリ−ニング方法 |
JPH01201099A (ja) * | 1987-02-24 | 1989-08-14 | Semiconductor Energy Lab Co Ltd | 不要物の除去方法 |
JP2006525426A (ja) * | 2003-05-08 | 2006-11-09 | コレクトール グループ デー.オー.オー. | 銅またはニッケルを洗浄するためのプラズマ処理 |
JP2006284887A (ja) * | 2005-03-31 | 2006-10-19 | International Display Technology Kk | 低抵抗dlc配向膜を備えた液晶セルとその製造方法 |
CN106944419A (zh) * | 2017-05-12 | 2017-07-14 | 中国工程物理研究院核物理与化学研究所 | 一种去除表面氚污染的等离子体去污系统 |
Also Published As
Publication number | Publication date |
---|---|
JPS6319592B2 (ja) | 1988-04-23 |
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