JPS5665517A - Piezoelectric vibrator - Google Patents

Piezoelectric vibrator

Info

Publication number
JPS5665517A
JPS5665517A JP14305980A JP14305980A JPS5665517A JP S5665517 A JPS5665517 A JP S5665517A JP 14305980 A JP14305980 A JP 14305980A JP 14305980 A JP14305980 A JP 14305980A JP S5665517 A JPS5665517 A JP S5665517A
Authority
JP
Japan
Prior art keywords
piezoelectric vibrator
vibrator
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14305980A
Other languages
English (en)
Japanese (ja)
Inventor
Deburii Pieeru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebauches SA
Original Assignee
Ebauches SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebauches SA filed Critical Ebauches SA
Publication of JPS5665517A publication Critical patent/JPS5665517A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H03H9/215—Crystal tuning forks consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H03H2003/0414—Resonance frequency
    • H03H2003/0492—Resonance frequency during the manufacture of a tuning-fork

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP14305980A 1979-10-15 1980-10-15 Piezoelectric vibrator Pending JPS5665517A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7925562A FR2467487A1 (fr) 1979-10-15 1979-10-15 Resonateur piezoelectrique

Publications (1)

Publication Number Publication Date
JPS5665517A true JPS5665517A (en) 1981-06-03

Family

ID=9230682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14305980A Pending JPS5665517A (en) 1979-10-15 1980-10-15 Piezoelectric vibrator

Country Status (4)

Country Link
US (1) US4384232A (https=)
JP (1) JPS5665517A (https=)
FR (1) FR2467487A1 (https=)
GB (1) GB2063559B (https=)

Cited By (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000044092A1 (en) * 1999-01-20 2000-07-27 Seiko Epson Corporation Vibrator and electronic device with vibrator
US6541897B2 (en) 2001-02-19 2003-04-01 Seiko Epson Corporation Piezoelectric device and package thereof
US6587009B2 (en) 2000-12-25 2003-07-01 Seiko Epson Corporation Vibrating piece, vibrator, oscillator, and electronic equipment
JP2003273700A (ja) * 2002-01-11 2003-09-26 Piedekku Gijutsu Kenkyusho:Kk 水晶発振器と水晶発振器の製造方法
US6724271B2 (en) 2001-03-02 2004-04-20 Seiko Epson Corporation Vibrating reed, vibrator, oscillator, and electronic device
US6791243B2 (en) 2002-03-06 2004-09-14 Piedek Technical Laboratory Quartz crystal unit and its manufacturing method
US6806797B2 (en) 2002-03-25 2004-10-19 Seiko Epson Corporation Tuning-fork piezoelectric resonator element, production method therefor, and piezoelectric device
JP2004328701A (ja) * 2003-04-28 2004-11-18 Piedekku Gijutsu Kenkyusho:Kk 水晶発振器の製造方法
US6894428B2 (en) 2001-01-15 2005-05-17 Seiko Epson Corporation Vibrating piece, vibrator, oscillator, and electronic device
US6898832B2 (en) 2001-10-31 2005-05-31 Piedek Technical Laboratory Method for manufacturing a quartz crystal unit
JP2005168066A (ja) * 2002-01-11 2005-06-23 Piedekku Gijutsu Kenkyusho:Kk 電子機器
US6911765B2 (en) 2000-10-31 2005-06-28 Piedek Technical Laboratory Quartz crystal tuning fork resonator
US6915548B2 (en) 2002-03-06 2005-07-12 Piedek Technical Laboratory Method for manufacturing quartz crystal tuning fork resonator, quartz crystal unit having quartz crystal tuning fork resonator, and quartz crystal oscillator having quartz crystal unit
JP2006074793A (ja) * 2004-09-03 2006-03-16 Eta Sa Manufacture Horlogere Suisse 小型の水晶共振器
JP2006345519A (ja) * 2005-06-09 2006-12-21 Eta Sa Manufacture Horlogere Suisse 小型のピエゾ電子共振器
JP2007053819A (ja) * 2001-10-31 2007-03-01 Piedekku Gijutsu Kenkyusho:Kk 水晶ユニットの製造方法
JP2007060729A (ja) * 2001-10-31 2007-03-08 Piedekku Gijutsu Kenkyusho:Kk 水晶振動子
JP2007209039A (ja) * 2001-10-31 2007-08-16 Piedekku Gijutsu Kenkyusho:Kk 水晶発振器の製造方法
JP2007244001A (ja) * 2002-01-11 2007-09-20 Piedekku Gijutsu Kenkyusho:Kk 水晶発振器の製造方法
JP2007243995A (ja) * 2001-10-31 2007-09-20 Piedekku Gijutsu Kenkyusho:Kk 水晶振動子の製造方法
JP2007295605A (ja) * 2002-01-11 2007-11-08 Piedekku Gijutsu Kenkyusho:Kk 水晶ユニットの製造方法
EP1895658A2 (en) 2006-08-31 2008-03-05 Kyocera Kinseki Corporation Tuning fork crystal oscillation plate and method of manufacturing the same
JP2008072770A (ja) * 2001-10-31 2008-03-27 Piedekku Gijutsu Kenkyusho:Kk 水晶発振器
JP2008125100A (ja) * 2001-10-31 2008-05-29 Piedekku Gijutsu Kenkyusho:Kk 水晶振動子、水晶ユニット、水晶発振器、携帯機器の製造方法
JP2008228334A (ja) * 2002-01-11 2008-09-25 Piedekku Gijutsu Kenkyusho:Kk 水晶振動子と水晶ユニットの製造方法
JP2008278489A (ja) * 2001-10-31 2008-11-13 Piedekku Gijutsu Kenkyusho:Kk 水晶振動子の製造方法と水晶ユニットの製造方法
JP2008306621A (ja) * 2007-06-11 2008-12-18 Epson Toyocom Corp 双音叉型圧電振動素子及び加速度検知ユニット
JP2009100480A (ja) * 2008-10-14 2009-05-07 Piedekku Gijutsu Kenkyusho:Kk 水晶ユニットと水晶発振器の製造方法
JP2010183634A (ja) * 2010-03-30 2010-08-19 Piedekku Gijutsu Kenkyusho:Kk 水晶振動子と水晶ユニットと水晶発振器の各製造方法
JP2010183623A (ja) * 2010-03-17 2010-08-19 Piedekku Gijutsu Kenkyusho:Kk 水晶振動子と水晶ユニットと水晶発振器の各製造方法
JP2010193133A (ja) * 2009-02-18 2010-09-02 Epson Toyocom Corp 屈曲振動片および屈曲振動子
JP2010193444A (ja) * 2010-01-29 2010-09-02 Epson Toyocom Corp 屈曲振動片および屈曲振動子の製造方法
US7851980B2 (en) 2007-03-30 2010-12-14 Kyocera Kinseki Corporation Tuning fork flexural crystal vibration device, crystal vibrator, and crystal oscillator
JP2011216924A (ja) * 2010-03-15 2011-10-27 Nippon Dempa Kogyo Co Ltd 圧電振動片および圧電デバイス

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US4531073A (en) * 1983-05-31 1985-07-23 Ohaus Scale Corporation Piezoelectric crystal resonator with reduced impedance and sensitivity to change in humidity
US4678905A (en) * 1984-05-18 1987-07-07 Luxtron Corporation Optical sensors for detecting physical parameters utilizing vibrating piezoelectric elements
US4897541A (en) * 1984-05-18 1990-01-30 Luxtron Corporation Sensors for detecting electromagnetic parameters utilizing resonating elements
US4625138A (en) * 1984-10-24 1986-11-25 The United States Of America As Represented By The Secretary Of The Army Piezoelectric microwave resonator using lateral excitation
US5861705A (en) * 1994-11-01 1999-01-19 Fujitsu Limited Tuning-fork vibratory gyro and sensor system using the same
JP3392959B2 (ja) * 1994-11-01 2003-03-31 富士通株式会社 音叉形振動ジャイロ及びこれを用いたセンサシステム
JP2002261577A (ja) * 2001-03-02 2002-09-13 Seiko Epson Corp 振動片、振動子、発振器及び携帯用電話装置
US6897743B2 (en) * 2002-03-06 2005-05-24 Piedek Technical Laboratory Electronic apparatus with two quartz crystal oscillators utilizing different vibration modes
US7845063B2 (en) * 2002-03-06 2010-12-07 Piedek Technical Laboratory Quartz crystal unit and method for manufacturing a quartz crystal unit and electronic apparatus
US7071794B2 (en) * 2002-03-06 2006-07-04 Piedek Technical Laboratory Quartz crystal resonator, unit having resonator, oscillator having unit, electronic apparatus having oscillator, and method for manufacturing electronic apparatus
US10284143B2 (en) 2002-03-06 2019-05-07 Piedek Technical Laboratory Quartz crystal unit, quartz crystal oscillator and electronic apparatus
JP2003318699A (ja) * 2002-04-23 2003-11-07 Piedekku Gijutsu Kenkyusho:Kk 水晶ユニットとその製造方法
US9209381B2 (en) 2003-06-30 2015-12-08 Piedek Technical Laboratory Quartz crystal unit, quartz crystal oscillator and electronic apparatus
US11563406B2 (en) 2003-06-30 2023-01-24 Piedek Technical Laboratory Quartz crystal resonator, quartz crystal unit, and quartz crystal oscillator
US10199556B2 (en) * 2003-06-30 2019-02-05 Piedek Technical Laboratory Unit, oscillator and electronic apparatus
US8358052B2 (en) * 2003-06-30 2013-01-22 Piedek Technical Laboratory Unit having resonator, oscillator having unit and electronic apparatus having unit
US7768179B2 (en) * 2003-06-30 2010-08-03 Piedek Technical Laboratory Quartz crystal unit, quartz crystal oscillator having quartz crystal unit and electronic apparatus having quartz crystal oscillator
US8358053B2 (en) * 2003-06-30 2013-01-22 Piedek Technical Laboratory Unit, oscillator having unit and electronic apparatus having oscillator
JP4026074B2 (ja) * 2003-06-30 2007-12-26 有限会社ピエデック技術研究所 水晶振動子と水晶ユニットと水晶発振器
JP4033100B2 (ja) * 2003-09-29 2008-01-16 セイコーエプソン株式会社 圧電デバイスと圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
JP4329492B2 (ja) * 2003-10-28 2009-09-09 セイコーエプソン株式会社 圧電振動片と圧電デバイスおよびこれらの製造方法、ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
US7365478B2 (en) * 2003-12-17 2008-04-29 Piedek Technical Laboratory Piezoelectric crystal resonator, piezoelectric crystal unit having the crystal resonator and electronic apparatus having the crystal resonator
ATE374355T1 (de) * 2004-12-20 2007-10-15 Eta Sa Mft Horlogere Suisse Wandler zur winkelgeschwindigkeitsmessung
US7084556B1 (en) 2005-06-09 2006-08-01 Eta Sa Manufacture Horlogere Suisse Small-sized piezoelectric resonator
CN101258382B (zh) * 2005-11-21 2011-03-30 株式会社村田制作所 振动器及其制作方法
CN101523721B (zh) * 2006-08-02 2012-07-04 Eta瑞士钟表制造股份有限公司 具有短路防止工具的压电谐振器
JP2008098748A (ja) * 2006-10-06 2008-04-24 Nippon Dempa Kogyo Co Ltd 音叉型圧電振動子、圧電振動デバイス、及び圧電発振器
ATE453954T1 (de) * 2007-07-19 2010-01-15 Eta Sa Mft Horlogere Suisse Piezoelektrischer resonator mit optimierten bewegungsfähigkeiten
JP4990717B2 (ja) * 2007-08-10 2012-08-01 セイコーインスツル株式会社 ケースの製造方法、圧電振動子、発振器、電子機器、及び電波時計
JP5128262B2 (ja) * 2007-12-17 2013-01-23 セイコーインスツル株式会社 圧電振動片、圧電振動子、発振器、電子機器及び電波時計並びに圧電振動片の製造方法
US8446079B2 (en) * 2008-05-23 2013-05-21 Statek Corporation Piezoelectric resonator with vibration isolation
JP5511202B2 (ja) * 2009-03-09 2014-06-04 キヤノン株式会社 圧電体素子、それを用いた液体吐出ヘッド及び記録装置
JP5272880B2 (ja) * 2009-04-30 2013-08-28 セイコーエプソン株式会社 屈曲振動片
JP2011082945A (ja) * 2009-09-08 2011-04-21 Seiko Epson Corp 屈曲振動片、屈曲振動子、および電子デバイス
JP5482541B2 (ja) * 2009-10-01 2014-05-07 セイコーエプソン株式会社 振動片、振動子、発振器、及び電子機器
TWI398097B (zh) 2009-11-18 2013-06-01 Wafer Mems Co Ltd 音叉型石英晶體諧振器
US20130099791A1 (en) * 2011-10-24 2013-04-25 Baker Hughes Incorporated Methodologies to Improve Reliability of Transducer Electrical Interconnections
JP2014123911A (ja) 2012-12-21 2014-07-03 Daishinku Corp 音叉型水晶振動片
KR20160060999A (ko) * 2014-11-21 2016-05-31 삼성전기주식회사 압전 액추에이터 및 렌즈 모듈
EP3468036A1 (fr) 2017-10-03 2019-04-10 Micro Crystal AG Résonateur piezo-electrique de petite taille
US11070191B2 (en) 2019-08-22 2021-07-20 Statek Corporation Torsional mode quartz crystal device
US11070192B2 (en) 2019-08-22 2021-07-20 Statek Corporation Torsional mode quartz crystal device
CN114826183A (zh) * 2021-01-29 2022-07-29 精工爱普生株式会社 振动元件的制造方法
US20250369877A1 (en) * 2024-05-28 2025-12-04 Saudi Arabian Oil Company Thermomechanical infrared detector with metamaterial absorber

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Cited By (57)

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JP2012039667A (ja) * 1999-01-20 2012-02-23 Seiko Epson Corp 音叉型圧電振動子、発振器および電子機器
JP2009165164A (ja) * 1999-01-20 2009-07-23 Seiko Epson Corp 振動子及び振動子を搭載した電子機器
WO2000044092A1 (en) * 1999-01-20 2000-07-27 Seiko Epson Corporation Vibrator and electronic device with vibrator
USRE41671E1 (en) * 2000-10-31 2010-09-14 Piedek Technical Laboratory Quartz crystal tuning fork resonator
US6911765B2 (en) 2000-10-31 2005-06-28 Piedek Technical Laboratory Quartz crystal tuning fork resonator
US6587009B2 (en) 2000-12-25 2003-07-01 Seiko Epson Corporation Vibrating piece, vibrator, oscillator, and electronic equipment
US6927530B2 (en) 2001-01-15 2005-08-09 Seiko Epson Corporation Vibrating piece, vibrator, oscillator, and electronic device
US6894428B2 (en) 2001-01-15 2005-05-17 Seiko Epson Corporation Vibrating piece, vibrator, oscillator, and electronic device
US6541897B2 (en) 2001-02-19 2003-04-01 Seiko Epson Corporation Piezoelectric device and package thereof
US6724271B2 (en) 2001-03-02 2004-04-20 Seiko Epson Corporation Vibrating reed, vibrator, oscillator, and electronic device
US6897737B2 (en) 2001-03-02 2005-05-24 Seiko Epson Corporation Vibrating reed, vibrator, oscillator, and electronic device
USRE44423E1 (en) 2001-10-31 2013-08-13 Piedek Technical Laboratory Method of manufacturing a quartz crystal unit
US6898832B2 (en) 2001-10-31 2005-05-31 Piedek Technical Laboratory Method for manufacturing a quartz crystal unit
JP2012054946A (ja) * 2001-10-31 2012-03-15 Piedekku Gijutsu Kenkyusho:Kk 水晶振動子、水晶ユニット、水晶発振器と携帯機器および水晶振動子と水晶ユニットの各製造方法
JP2008072770A (ja) * 2001-10-31 2008-03-27 Piedekku Gijutsu Kenkyusho:Kk 水晶発振器
USRE45582E1 (en) 2001-10-31 2015-06-23 Piedek Technical Laboratory Method for manufacturing a quartz crystal unit
JP2009189039A (ja) * 2001-10-31 2009-08-20 Piedekku Gijutsu Kenkyusho:Kk 水晶ユニットの製造方法
JP2007053819A (ja) * 2001-10-31 2007-03-01 Piedekku Gijutsu Kenkyusho:Kk 水晶ユニットの製造方法
JP2007060729A (ja) * 2001-10-31 2007-03-08 Piedekku Gijutsu Kenkyusho:Kk 水晶振動子
JP2007209039A (ja) * 2001-10-31 2007-08-16 Piedekku Gijutsu Kenkyusho:Kk 水晶発振器の製造方法
USRE45829E1 (en) 2001-10-31 2015-12-29 Piedek Technical Laboratory Method for manufacturing a quartz crystal unit
JP2007243995A (ja) * 2001-10-31 2007-09-20 Piedekku Gijutsu Kenkyusho:Kk 水晶振動子の製造方法
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JP2010288306A (ja) * 2002-01-11 2010-12-24 Piedekku Gijutsu Kenkyusho:Kk 水晶振動子と水晶ユニットと水晶発振器の各製造方法
JP2014090488A (ja) * 2002-01-11 2014-05-15 Piedekku Gijutsu Kenkyusho:Kk 水晶振動子と水晶ユニットと水晶発振器の各製造方法
JP2003273700A (ja) * 2002-01-11 2003-09-26 Piedekku Gijutsu Kenkyusho:Kk 水晶発振器と水晶発振器の製造方法
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US6915548B2 (en) 2002-03-06 2005-07-12 Piedek Technical Laboratory Method for manufacturing quartz crystal tuning fork resonator, quartz crystal unit having quartz crystal tuning fork resonator, and quartz crystal oscillator having quartz crystal unit
US6791243B2 (en) 2002-03-06 2004-09-14 Piedek Technical Laboratory Quartz crystal unit and its manufacturing method
US6806797B2 (en) 2002-03-25 2004-10-19 Seiko Epson Corporation Tuning-fork piezoelectric resonator element, production method therefor, and piezoelectric device
CN100352074C (zh) * 2002-03-25 2007-11-28 精工爱普生株式会社 音叉型压电振荡片及其制造方法，压电器件
JP2004328701A (ja) * 2003-04-28 2004-11-18 Piedekku Gijutsu Kenkyusho:Kk 水晶発振器の製造方法
JP2006074793A (ja) * 2004-09-03 2006-03-16 Eta Sa Manufacture Horlogere Suisse 小型の水晶共振器
JP2006345519A (ja) * 2005-06-09 2006-12-21 Eta Sa Manufacture Horlogere Suisse 小型のピエゾ電子共振器
EP1895658A2 (en) 2006-08-31 2008-03-05 Kyocera Kinseki Corporation Tuning fork crystal oscillation plate and method of manufacturing the same
JP2008060952A (ja) * 2006-08-31 2008-03-13 Kyocera Kinseki Corp 音叉型水晶振動板とその製造方法
US7535159B2 (en) 2006-08-31 2009-05-19 Kyocera Kinseki Corporation Tuning fork crystal oscillation plate and method of manufacturing the same
US7851980B2 (en) 2007-03-30 2010-12-14 Kyocera Kinseki Corporation Tuning fork flexural crystal vibration device, crystal vibrator, and crystal oscillator
JP2008306621A (ja) * 2007-06-11 2008-12-18 Epson Toyocom Corp 双音叉型圧電振動素子及び加速度検知ユニット
JP2009100480A (ja) * 2008-10-14 2009-05-07 Piedekku Gijutsu Kenkyusho:Kk 水晶ユニットと水晶発振器の製造方法
JP2010193133A (ja) * 2009-02-18 2010-09-02 Epson Toyocom Corp 屈曲振動片および屈曲振動子
JP2010193444A (ja) * 2010-01-29 2010-09-02 Epson Toyocom Corp 屈曲振動片および屈曲振動子の製造方法
US8736152B2 (en) 2010-03-15 2014-05-27 Nihon Dempa Kogyo Co., Ltd. Piezoelectric vibrating pieces and associated devices exhibiting enhanced electrical field
JP2011216924A (ja) * 2010-03-15 2011-10-27 Nippon Dempa Kogyo Co Ltd 圧電振動片および圧電デバイス
JP2010183623A (ja) * 2010-03-17 2010-08-19 Piedekku Gijutsu Kenkyusho:Kk 水晶振動子と水晶ユニットと水晶発振器の各製造方法
JP2010183634A (ja) * 2010-03-30 2010-08-19 Piedekku Gijutsu Kenkyusho:Kk 水晶振動子と水晶ユニットと水晶発振器の各製造方法

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GB2063559B (en) 1983-09-14
FR2467487B1 (https=) 1983-11-25
GB2063559A (en) 1981-06-03
FR2467487A1 (fr) 1981-04-17
US4384232A (en) 1983-05-17

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