FR2467487A1 - Resonateur piezoelectrique - Google Patents

Resonateur piezoelectrique Download PDF

Info

Publication number
FR2467487A1
FR2467487A1 FR7925562A FR7925562A FR2467487A1 FR 2467487 A1 FR2467487 A1 FR 2467487A1 FR 7925562 A FR7925562 A FR 7925562A FR 7925562 A FR7925562 A FR 7925562A FR 2467487 A1 FR2467487 A1 FR 2467487A1
Authority
FR
France
Prior art keywords
branches
tuning fork
resonator
groove
grooves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7925562A
Other languages
English (en)
French (fr)
Other versions
FR2467487B1 (https=
Inventor
Pierre Debely
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebauches SA
Original Assignee
Ebauches SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebauches SA filed Critical Ebauches SA
Priority to FR7925562A priority Critical patent/FR2467487A1/fr
Priority to GB8032717A priority patent/GB2063559B/en
Priority to US06/195,775 priority patent/US4384232A/en
Priority to JP14305980A priority patent/JPS5665517A/ja
Publication of FR2467487A1 publication Critical patent/FR2467487A1/fr
Application granted granted Critical
Publication of FR2467487B1 publication Critical patent/FR2467487B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H03H9/215—Crystal tuning forks consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
    • H03H2003/0414—Resonance frequency
    • H03H2003/0492—Resonance frequency during the manufacture of a tuning-fork

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
FR7925562A 1979-10-15 1979-10-15 Resonateur piezoelectrique Granted FR2467487A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR7925562A FR2467487A1 (fr) 1979-10-15 1979-10-15 Resonateur piezoelectrique
GB8032717A GB2063559B (en) 1979-10-15 1980-10-10 Piezo-electric resonator
US06/195,775 US4384232A (en) 1979-10-15 1980-10-10 Grooved-electrode piezoelectric resonator
JP14305980A JPS5665517A (en) 1979-10-15 1980-10-15 Piezoelectric vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7925562A FR2467487A1 (fr) 1979-10-15 1979-10-15 Resonateur piezoelectrique

Publications (2)

Publication Number Publication Date
FR2467487A1 true FR2467487A1 (fr) 1981-04-17
FR2467487B1 FR2467487B1 (https=) 1983-11-25

Family

ID=9230682

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7925562A Granted FR2467487A1 (fr) 1979-10-15 1979-10-15 Resonateur piezoelectrique

Country Status (4)

Country Link
US (1) US4384232A (https=)
JP (1) JPS5665517A (https=)
FR (1) FR2467487A1 (https=)
GB (1) GB2063559B (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1633042A1 (fr) * 2004-09-03 2006-03-08 ETA SA Manufacture Horlogère Suisse Résonateur à quartz de très petites dimensions
CN109600123A (zh) * 2017-10-03 2019-04-09 微晶有限公司 小型压电谐振器

Families Citing this family (73)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4531073A (en) * 1983-05-31 1985-07-23 Ohaus Scale Corporation Piezoelectric crystal resonator with reduced impedance and sensitivity to change in humidity
US4678905A (en) * 1984-05-18 1987-07-07 Luxtron Corporation Optical sensors for detecting physical parameters utilizing vibrating piezoelectric elements
US4897541A (en) * 1984-05-18 1990-01-30 Luxtron Corporation Sensors for detecting electromagnetic parameters utilizing resonating elements
US4625138A (en) * 1984-10-24 1986-11-25 The United States Of America As Represented By The Secretary Of The Army Piezoelectric microwave resonator using lateral excitation
US5861705A (en) * 1994-11-01 1999-01-19 Fujitsu Limited Tuning-fork vibratory gyro and sensor system using the same
JP3392959B2 (ja) * 1994-11-01 2003-03-31 富士通株式会社 音叉形振動ジャイロ及びこれを用いたセンサシステム
JP4852195B2 (ja) * 1999-01-20 2012-01-11 セイコーエプソン株式会社 音叉型水晶振動子
JP3477618B2 (ja) * 2000-10-31 2003-12-10 有限会社ピエデック技術研究所 屈曲水晶振動子
EP1788702A3 (en) * 2000-12-25 2008-01-16 Seiko Epson Corporation Vibrating piece, vibrator, oscillator, and electronic equipment
US6894428B2 (en) * 2001-01-15 2005-05-17 Seiko Epson Corporation Vibrating piece, vibrator, oscillator, and electronic device
JP2002319838A (ja) * 2001-02-19 2002-10-31 Seiko Epson Corp 圧電デバイス及びそのパッケージ
JP3900846B2 (ja) * 2001-03-02 2007-04-04 セイコーエプソン株式会社 音叉型水晶振動片、振動子、発振器及び携帯用電話装置
JP2002261577A (ja) * 2001-03-02 2002-09-13 Seiko Epson Corp 振動片、振動子、発振器及び携帯用電話装置
JP5066653B2 (ja) * 2001-10-31 2012-11-07 有限会社ピエデック技術研究所 水晶ユニットと水晶発振器
JP5103632B2 (ja) * 2001-10-31 2012-12-19 有限会社ピエデック技術研究所 水晶ユニットの製造方法
JP5135565B2 (ja) * 2001-10-31 2013-02-06 有限会社ピエデック技術研究所 水晶振動子の製造方法と水晶ユニットの製造方法
JP4862639B2 (ja) * 2001-10-31 2012-01-25 有限会社ピエデック技術研究所 水晶振動子とその製造方法と水晶ユニットの製造方法
JP4868335B2 (ja) * 2001-10-31 2012-02-01 有限会社ピエデック技術研究所 水晶ユニットの製造方法
JP4862856B2 (ja) * 2001-10-31 2012-01-25 有限会社ピエデック技術研究所 水晶振動子と水晶ユニットと携帯機器
JP3646258B2 (ja) * 2001-10-31 2005-05-11 有限会社ピエデック技術研究所 水晶ユニットとその製造方法
JP4822189B2 (ja) * 2001-10-31 2011-11-24 有限会社ピエデック技術研究所 水晶振動子の製造方法
JP4650753B2 (ja) * 2002-01-11 2011-03-16 有限会社ピエデック技術研究所 水晶振動子と水晶ユニットと水晶発振器の各製造方法
JP4074935B2 (ja) * 2002-01-11 2008-04-16 有限会社ピエデック技術研究所 水晶発振器と水晶発振器の製造方法
US6897743B2 (en) * 2002-03-06 2005-05-24 Piedek Technical Laboratory Electronic apparatus with two quartz crystal oscillators utilizing different vibration modes
US7845063B2 (en) * 2002-03-06 2010-12-07 Piedek Technical Laboratory Quartz crystal unit and method for manufacturing a quartz crystal unit and electronic apparatus
US7071794B2 (en) * 2002-03-06 2006-07-04 Piedek Technical Laboratory Quartz crystal resonator, unit having resonator, oscillator having unit, electronic apparatus having oscillator, and method for manufacturing electronic apparatus
US6915548B2 (en) * 2002-03-06 2005-07-12 Piedek Technical Laboratory Method for manufacturing quartz crystal tuning fork resonator, quartz crystal unit having quartz crystal tuning fork resonator, and quartz crystal oscillator having quartz crystal unit
US10284143B2 (en) 2002-03-06 2019-05-07 Piedek Technical Laboratory Quartz crystal unit, quartz crystal oscillator and electronic apparatus
US6791243B2 (en) * 2002-03-06 2004-09-14 Piedek Technical Laboratory Quartz crystal unit and its manufacturing method
JP4001029B2 (ja) * 2002-03-25 2007-10-31 セイコーエプソン株式会社 音叉型圧電振動片及びその製造方法、圧電デバイス
JP2003318699A (ja) * 2002-04-23 2003-11-07 Piedekku Gijutsu Kenkyusho:Kk 水晶ユニットとその製造方法
JP4517332B2 (ja) * 2003-04-28 2010-08-04 有限会社ピエデック技術研究所 水晶振動子と水晶ユニットと水晶発振器の製造方法
US9209381B2 (en) 2003-06-30 2015-12-08 Piedek Technical Laboratory Quartz crystal unit, quartz crystal oscillator and electronic apparatus
US11563406B2 (en) 2003-06-30 2023-01-24 Piedek Technical Laboratory Quartz crystal resonator, quartz crystal unit, and quartz crystal oscillator
US10199556B2 (en) * 2003-06-30 2019-02-05 Piedek Technical Laboratory Unit, oscillator and electronic apparatus
US8358052B2 (en) * 2003-06-30 2013-01-22 Piedek Technical Laboratory Unit having resonator, oscillator having unit and electronic apparatus having unit
US7768179B2 (en) * 2003-06-30 2010-08-03 Piedek Technical Laboratory Quartz crystal unit, quartz crystal oscillator having quartz crystal unit and electronic apparatus having quartz crystal oscillator
US8358053B2 (en) * 2003-06-30 2013-01-22 Piedek Technical Laboratory Unit, oscillator having unit and electronic apparatus having oscillator
JP4026074B2 (ja) * 2003-06-30 2007-12-26 有限会社ピエデック技術研究所 水晶振動子と水晶ユニットと水晶発振器
JP4033100B2 (ja) * 2003-09-29 2008-01-16 セイコーエプソン株式会社 圧電デバイスと圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
JP4329492B2 (ja) * 2003-10-28 2009-09-09 セイコーエプソン株式会社 圧電振動片と圧電デバイスおよびこれらの製造方法、ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
US7365478B2 (en) * 2003-12-17 2008-04-29 Piedek Technical Laboratory Piezoelectric crystal resonator, piezoelectric crystal unit having the crystal resonator and electronic apparatus having the crystal resonator
ATE374355T1 (de) * 2004-12-20 2007-10-15 Eta Sa Mft Horlogere Suisse Wandler zur winkelgeschwindigkeitsmessung
ATE421799T1 (de) * 2005-06-09 2009-02-15 Eta Sa Mft Horlogere Suisse Kompakter piezoelektrischer resonator
US7084556B1 (en) 2005-06-09 2006-08-01 Eta Sa Manufacture Horlogere Suisse Small-sized piezoelectric resonator
CN101258382B (zh) * 2005-11-21 2011-03-30 株式会社村田制作所 振动器及其制作方法
CN101523721B (zh) * 2006-08-02 2012-07-04 Eta瑞士钟表制造股份有限公司 具有短路防止工具的压电谐振器
JP2008060952A (ja) 2006-08-31 2008-03-13 Kyocera Kinseki Corp 音叉型水晶振動板とその製造方法
JP2008098748A (ja) * 2006-10-06 2008-04-24 Nippon Dempa Kogyo Co Ltd 音叉型圧電振動子、圧電振動デバイス、及び圧電発振器
JP4578499B2 (ja) 2007-03-30 2010-11-10 京セラキンセキ株式会社 音叉型屈曲水晶振動素子、及びそれを搭載した水晶振動子並びに水晶発振器
JP5076657B2 (ja) * 2007-06-11 2012-11-21 セイコーエプソン株式会社 応力感応型センサ用の双音叉型振動素子及び加速度検知ユニット
ATE453954T1 (de) * 2007-07-19 2010-01-15 Eta Sa Mft Horlogere Suisse Piezoelektrischer resonator mit optimierten bewegungsfähigkeiten
JP4990717B2 (ja) * 2007-08-10 2012-08-01 セイコーインスツル株式会社 ケースの製造方法、圧電振動子、発振器、電子機器、及び電波時計
JP5128262B2 (ja) * 2007-12-17 2013-01-23 セイコーインスツル株式会社 圧電振動片、圧電振動子、発振器、電子機器及び電波時計並びに圧電振動片の製造方法
US8446079B2 (en) * 2008-05-23 2013-05-21 Statek Corporation Piezoelectric resonator with vibration isolation
JP5135566B2 (ja) * 2008-10-14 2013-02-06 有限会社ピエデック技術研究所 水晶振動子と水晶ユニットと水晶発振器及びそれらの製造方法
JP2010193133A (ja) * 2009-02-18 2010-09-02 Epson Toyocom Corp 屈曲振動片および屈曲振動子
JP5511202B2 (ja) * 2009-03-09 2014-06-04 キヤノン株式会社 圧電体素子、それを用いた液体吐出ヘッド及び記録装置
JP5272880B2 (ja) * 2009-04-30 2013-08-28 セイコーエプソン株式会社 屈曲振動片
JP2011082945A (ja) * 2009-09-08 2011-04-21 Seiko Epson Corp 屈曲振動片、屈曲振動子、および電子デバイス
JP5482541B2 (ja) * 2009-10-01 2014-05-07 セイコーエプソン株式会社 振動片、振動子、発振器、及び電子機器
TWI398097B (zh) 2009-11-18 2013-06-01 Wafer Mems Co Ltd 音叉型石英晶體諧振器
JP5299645B2 (ja) * 2010-01-29 2013-09-25 セイコーエプソン株式会社 屈曲振動片および屈曲振動子の製造方法
JP5085679B2 (ja) * 2010-03-15 2012-11-28 日本電波工業株式会社 圧電振動片および圧電デバイス
JP4556201B2 (ja) * 2010-03-17 2010-10-06 有限会社ピエデック技術研究所 水晶振動子と水晶ユニットと水晶発振器の各製造方法
JP4836016B2 (ja) * 2010-03-30 2011-12-14 有限会社ピエデック技術研究所 水晶振動子と水晶ユニットと水晶発振器の各製造方法及び水晶振動子と水晶ユニットと水晶発振器
US20130099791A1 (en) * 2011-10-24 2013-04-25 Baker Hughes Incorporated Methodologies to Improve Reliability of Transducer Electrical Interconnections
JP2014123911A (ja) 2012-12-21 2014-07-03 Daishinku Corp 音叉型水晶振動片
KR20160060999A (ko) * 2014-11-21 2016-05-31 삼성전기주식회사 압전 액추에이터 및 렌즈 모듈
US11070191B2 (en) 2019-08-22 2021-07-20 Statek Corporation Torsional mode quartz crystal device
US11070192B2 (en) 2019-08-22 2021-07-20 Statek Corporation Torsional mode quartz crystal device
CN114826183A (zh) * 2021-01-29 2022-07-29 精工爱普生株式会社 振动元件的制造方法
US20250369877A1 (en) * 2024-05-28 2025-12-04 Saudi Arabian Oil Company Thermomechanical infrared detector with metamaterial absorber

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR990215A (fr) * 1944-03-18 1951-09-19 Perfectionnements à des dispositifs à cristal piézo-électrique
US2943279A (en) * 1958-11-17 1960-06-28 Oskar E Mattiat Piezoelectric band pass filter
JPS53131790A (en) * 1977-04-22 1978-11-16 Seiko Instr & Electronics Ltd Piezoelectric vibrator and production of the same

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3059130A (en) * 1957-10-03 1962-10-16 United Insulator Company Ltd Electromechanical transducers
US3576453A (en) * 1969-05-02 1971-04-27 Bell Telephone Labor Inc Monolithic electric wave filters
US3760172A (en) * 1970-06-15 1973-09-18 Univ Leland Stanford Junior Method of and apparatus for signal processing
JPS52146588A (en) * 1976-05-31 1977-12-06 Matsushima Kogyo Kk Quartz oscillator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR990215A (fr) * 1944-03-18 1951-09-19 Perfectionnements à des dispositifs à cristal piézo-électrique
US2943279A (en) * 1958-11-17 1960-06-28 Oskar E Mattiat Piezoelectric band pass filter
JPS53131790A (en) * 1977-04-22 1978-11-16 Seiko Instr & Electronics Ltd Piezoelectric vibrator and production of the same

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
ABJP/79 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1633042A1 (fr) * 2004-09-03 2006-03-08 ETA SA Manufacture Horlogère Suisse Résonateur à quartz de très petites dimensions
US7253554B2 (en) 2004-09-03 2007-08-07 Eta Sa Manufacture Horlogere Suisse Quartz resonator of small dimensions
CN109600123A (zh) * 2017-10-03 2019-04-09 微晶有限公司 小型压电谐振器
EP3468037A1 (fr) 2017-10-03 2019-04-10 Micro Crystal AG Resonateur piezo-electrique de petite taille
EP3468036A1 (fr) 2017-10-03 2019-04-10 Micro Crystal AG Résonateur piezo-electrique de petite taille

Also Published As

Publication number Publication date
GB2063559B (en) 1983-09-14
JPS5665517A (en) 1981-06-03
FR2467487B1 (https=) 1983-11-25
GB2063559A (en) 1981-06-03
US4384232A (en) 1983-05-17

Similar Documents

Publication Publication Date Title
FR2467487A1 (fr) Resonateur piezoelectrique
CH619335B5 (https=)
CA1303202C (fr) Transducteur electroacoustique, utilisable notamment comme source d'ondes acoustiques pour les applications sous-marines
FR3139961A1 (fr) Structure de transducteur pour résonateur à accès unique
FR2509927A1 (fr) Element a onde elastique de surface
EP0517666A1 (fr) Résonateur à quartz vibrant selon un mode fondamental de torsion
CH623690A5 (https=)
EP1222735A1 (fr) Filtre a ondes acoustiques d'interface notamment pour les liaisons sans fil
EP1458095B1 (fr) Procédé de réalisation d'un microrésonateur piézoélectrique accordable
WO1999040678A1 (fr) Filtre a resonateurs a ondes acoustiques de surface
CA1124829A (fr) Resonateur piezo-electrique a cristal autosuspendu
EP1000465A1 (fr) Transducteur unidirectionnel grave a ondes acoustiques de surface
EP0056783B1 (fr) Micro-résonateur piézo-électrique
EP0660981A1 (fr) Transducteur d'ondes unidirectionnel.
EP0350443A1 (fr) Résonateur piézoélectrique
EP1082812B1 (fr) Transducteur a ondes acoustiques de surface a faible gap
EP3468037B1 (fr) Resonateur piezo-electrique de petite taille
FR2624326A1 (fr) Resonateur piezoelectrique
CA2332381C (fr) Resonateur, notamment pour filtre hyperfrequence, et filtre le comportant
EP0451089B1 (fr) Résonateur piézoélectrique à haute fréquence
EP0158926B1 (fr) Résonateur en mode de cisaillement d'épaisseur
EP1340296B1 (fr) Laser a zno polycristallin pompe electriquement et procede de realisation
CH722134A2 (fr) Résonateur à quartz ZT et son procédé de fabrication
EP3396732A1 (fr) Diode électroluminescente organique à rendement optimisé par suppression de plasmons
FR2521786A2 (fr) Filtre passe-bande a resonateurs dielectriques

Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse