JPS5660051A - Semiconductor memory device - Google Patents
Semiconductor memory deviceInfo
- Publication number
- JPS5660051A JPS5660051A JP14569580A JP14569580A JPS5660051A JP S5660051 A JPS5660051 A JP S5660051A JP 14569580 A JP14569580 A JP 14569580A JP 14569580 A JP14569580 A JP 14569580A JP S5660051 A JPS5660051 A JP S5660051A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- insulating film
- capacitor
- gate
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 239000003990 capacitor Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
Landscapes
- Static Random-Access Memory (AREA)
- Semiconductor Memories (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14569580A JPS5660051A (en) | 1980-10-20 | 1980-10-20 | Semiconductor memory device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14569580A JPS5660051A (en) | 1980-10-20 | 1980-10-20 | Semiconductor memory device |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50154769A Division JPS5279679A (en) | 1975-12-26 | 1975-12-26 | Semiconductor memory device |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61123502A Division JPS6297368A (ja) | 1986-05-30 | 1986-05-30 | 半導体記憶装置 |
JP61123501A Division JPS6297367A (ja) | 1986-05-30 | 1986-05-30 | 半導体記憶装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5660051A true JPS5660051A (en) | 1981-05-23 |
JPS6220708B2 JPS6220708B2 (enrdf_load_stackoverflow) | 1987-05-08 |
Family
ID=15390959
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14569580A Granted JPS5660051A (en) | 1980-10-20 | 1980-10-20 | Semiconductor memory device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5660051A (enrdf_load_stackoverflow) |
-
1980
- 1980-10-20 JP JP14569580A patent/JPS5660051A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6220708B2 (enrdf_load_stackoverflow) | 1987-05-08 |
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