JPS5659696A - Liquid phase epitaxial growing apparatus - Google Patents

Liquid phase epitaxial growing apparatus

Info

Publication number
JPS5659696A
JPS5659696A JP13677179A JP13677179A JPS5659696A JP S5659696 A JPS5659696 A JP S5659696A JP 13677179 A JP13677179 A JP 13677179A JP 13677179 A JP13677179 A JP 13677179A JP S5659696 A JPS5659696 A JP S5659696A
Authority
JP
Japan
Prior art keywords
chamber
melt
epitaxial growth
phase epitaxial
uniform
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13677179A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6229396B2 (enrdf_load_stackoverflow
Inventor
Hiromi Takasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Sanyo Electric Co Ltd
Sanyo Electric Co Ltd
Original Assignee
Tokyo Sanyo Electric Co Ltd
Tottori Sanyo Electric Co Ltd
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Sanyo Electric Co Ltd, Tottori Sanyo Electric Co Ltd, Sanyo Electric Co Ltd filed Critical Tokyo Sanyo Electric Co Ltd
Priority to JP13677179A priority Critical patent/JPS5659696A/ja
Publication of JPS5659696A publication Critical patent/JPS5659696A/ja
Publication of JPS6229396B2 publication Critical patent/JPS6229396B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP13677179A 1979-10-23 1979-10-23 Liquid phase epitaxial growing apparatus Granted JPS5659696A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13677179A JPS5659696A (en) 1979-10-23 1979-10-23 Liquid phase epitaxial growing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13677179A JPS5659696A (en) 1979-10-23 1979-10-23 Liquid phase epitaxial growing apparatus

Publications (2)

Publication Number Publication Date
JPS5659696A true JPS5659696A (en) 1981-05-23
JPS6229396B2 JPS6229396B2 (enrdf_load_stackoverflow) 1987-06-25

Family

ID=15183122

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13677179A Granted JPS5659696A (en) 1979-10-23 1979-10-23 Liquid phase epitaxial growing apparatus

Country Status (1)

Country Link
JP (1) JPS5659696A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04367587A (ja) * 1991-06-14 1992-12-18 Shin Etsu Handotai Co Ltd 液相成長方法及び装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49123500A (enrdf_load_stackoverflow) * 1973-04-02 1974-11-26
JPS5147153A (ja) * 1974-02-01 1976-04-22 Joruju Ruboshii Konsutorukuchu Maruamiki
JPS531036A (en) * 1976-06-25 1978-01-07 Toray Industries Light polarizer
JPS5344311A (en) * 1973-07-05 1978-04-21 Masahiro Hiyamuta Stripper for reaper

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49123500A (enrdf_load_stackoverflow) * 1973-04-02 1974-11-26
JPS5344311A (en) * 1973-07-05 1978-04-21 Masahiro Hiyamuta Stripper for reaper
JPS5147153A (ja) * 1974-02-01 1976-04-22 Joruju Ruboshii Konsutorukuchu Maruamiki
JPS531036A (en) * 1976-06-25 1978-01-07 Toray Industries Light polarizer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04367587A (ja) * 1991-06-14 1992-12-18 Shin Etsu Handotai Co Ltd 液相成長方法及び装置

Also Published As

Publication number Publication date
JPS6229396B2 (enrdf_load_stackoverflow) 1987-06-25

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