JPS55130894A - Single crystal picking up apparatus - Google Patents
Single crystal picking up apparatusInfo
- Publication number
- JPS55130894A JPS55130894A JP3548579A JP3548579A JPS55130894A JP S55130894 A JPS55130894 A JP S55130894A JP 3548579 A JP3548579 A JP 3548579A JP 3548579 A JP3548579 A JP 3548579A JP S55130894 A JPS55130894 A JP S55130894A
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- molten liquid
- picking
- stock material
- seed crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To make it possible to prepare a single crystal with an uniform dopant concn. by a method wherein, in a Czochralski type single crystal picking up apparatus, a stock material replenishing tank having a heating system is provided to a side portion of a crusible.
CONSTITUTION: A seed crystal 5 is attached to a chuck portion 4 of a picking up shaft 3 and a lower end of a seed crystal 5 is immersed in a molten liquid 6 and a picking up shaft 3 is gradually lifted to grow a single crystal 7 on a lower end of a seed crystal 5 successively. In this case, a molten liquid 6 is rotated by a molten liquid rotating sytem 12 forming a rotary magnetic field. When a molten liquid within a crusible 1 is reduced according to the growth of a single crystal 7, a stock material 10 and a dopant 11 are thrown into a stock material replenishing tank 8 so as to maintain a liquid level of a molten liquid 6 and a dopant concn. constantly.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3548579A JPS55130894A (en) | 1979-03-28 | 1979-03-28 | Single crystal picking up apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3548579A JPS55130894A (en) | 1979-03-28 | 1979-03-28 | Single crystal picking up apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55130894A true JPS55130894A (en) | 1980-10-11 |
Family
ID=12443043
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3548579A Pending JPS55130894A (en) | 1979-03-28 | 1979-03-28 | Single crystal picking up apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55130894A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58130195A (en) * | 1982-01-27 | 1983-08-03 | Toshiba Ceramics Co Ltd | Pulling apparatus for single crystalline silicon |
JPS58172287A (en) * | 1982-03-31 | 1983-10-11 | Fujitsu Ltd | Growth device for crystal |
JPS58190891A (en) * | 1982-04-30 | 1983-11-07 | Fujitsu Ltd | Method for growth of single crystal |
JPS6126591A (en) * | 1984-07-18 | 1986-02-05 | Fujitsu Ltd | Crystal growing method |
JPS62241889A (en) * | 1986-04-12 | 1987-10-22 | Mitsubishi Metal Corp | Apparatus for making single crystal |
US6660096B2 (en) * | 1998-01-07 | 2003-12-09 | Tokyo Electron Limited | Gas treatment apparatus |
-
1979
- 1979-03-28 JP JP3548579A patent/JPS55130894A/en active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58130195A (en) * | 1982-01-27 | 1983-08-03 | Toshiba Ceramics Co Ltd | Pulling apparatus for single crystalline silicon |
JPH034517B2 (en) * | 1982-01-27 | 1991-01-23 | Toshiba Ceramics Co | |
JPS58172287A (en) * | 1982-03-31 | 1983-10-11 | Fujitsu Ltd | Growth device for crystal |
JPS58190891A (en) * | 1982-04-30 | 1983-11-07 | Fujitsu Ltd | Method for growth of single crystal |
JPS6126591A (en) * | 1984-07-18 | 1986-02-05 | Fujitsu Ltd | Crystal growing method |
JPH0362679B2 (en) * | 1984-07-18 | 1991-09-26 | Fujitsu Ltd | |
JPS62241889A (en) * | 1986-04-12 | 1987-10-22 | Mitsubishi Metal Corp | Apparatus for making single crystal |
US6660096B2 (en) * | 1998-01-07 | 2003-12-09 | Tokyo Electron Limited | Gas treatment apparatus |
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