JPS5641640A - Manufacture of image pick-up tube - Google Patents
Manufacture of image pick-up tubeInfo
- Publication number
- JPS5641640A JPS5641640A JP11724679A JP11724679A JPS5641640A JP S5641640 A JPS5641640 A JP S5641640A JP 11724679 A JP11724679 A JP 11724679A JP 11724679 A JP11724679 A JP 11724679A JP S5641640 A JPS5641640 A JP S5641640A
- Authority
- JP
- Japan
- Prior art keywords
- sputterings
- positive
- conductive film
- negative
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Surface Treatment Of Glass (AREA)
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
Abstract
PURPOSE:To ensure the hiding of minute defects on a glass substrate and obtain with a high production yield conductive films of good quality, by forming a transparent conductive film through the use of both positive and negative sputterings. CONSTITUTION:Onto the upper surface of a light-transmitting glass substrate, a transparent conductive film is formed by high frequency sputtering a target material principally made of In2O3 or the like and containing SnO2. Here, the high frequency sputtering is performed by an alternate application of positive and negative sputterings. However, in overall, more positive sputterings are employed than negative sputterings. Accordingly, the transparent conductive film is formed by the positive sputterings while any protrusions, which occur at the film-forming part, are etched and thus removed. Owing to the alternate application of the positive and negative sputterings, a conductive film may be formed in such a manner that any troublesome fine particles, which are present on the substrate, are covered by the film. Consequently, the fine particles which frequently become the cause of defects can be hidden and a conductive film of good quality can be obtained with a high production yield.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11724679A JPS5641640A (en) | 1979-09-14 | 1979-09-14 | Manufacture of image pick-up tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11724679A JPS5641640A (en) | 1979-09-14 | 1979-09-14 | Manufacture of image pick-up tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5641640A true JPS5641640A (en) | 1981-04-18 |
Family
ID=14706999
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11724679A Pending JPS5641640A (en) | 1979-09-14 | 1979-09-14 | Manufacture of image pick-up tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5641640A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5024038A (en) * | 1973-06-29 | 1975-03-14 | ||
| JPS5249991A (en) * | 1975-10-17 | 1977-04-21 | Matsushita Electric Ind Co Ltd | Sputtering method |
| JPS53135840A (en) * | 1977-04-30 | 1978-11-27 | Sumitomo Electric Ind Ltd | Metal coating method for non-electroconductive material |
-
1979
- 1979-09-14 JP JP11724679A patent/JPS5641640A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5024038A (en) * | 1973-06-29 | 1975-03-14 | ||
| JPS5249991A (en) * | 1975-10-17 | 1977-04-21 | Matsushita Electric Ind Co Ltd | Sputtering method |
| JPS53135840A (en) * | 1977-04-30 | 1978-11-27 | Sumitomo Electric Ind Ltd | Metal coating method for non-electroconductive material |
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