JPS56164522A - Transferring and distributing method - Google Patents

Transferring and distributing method

Info

Publication number
JPS56164522A
JPS56164522A JP6809880A JP6809880A JPS56164522A JP S56164522 A JPS56164522 A JP S56164522A JP 6809880 A JP6809880 A JP 6809880A JP 6809880 A JP6809880 A JP 6809880A JP S56164522 A JPS56164522 A JP S56164522A
Authority
JP
Japan
Prior art keywords
case
controlling apparatus
heating ovens
piled
cvd
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6809880A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0127567B2 (enrdf_load_stackoverflow
Inventor
Kazuhiro Sugita
Kiichi Saito
Haruhiko Makino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP6809880A priority Critical patent/JPS56164522A/ja
Publication of JPS56164522A publication Critical patent/JPS56164522A/ja
Publication of JPH0127567B2 publication Critical patent/JPH0127567B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Multi-Process Working Machines And Systems (AREA)
  • General Factory Administration (AREA)
  • Warehouses Or Storage Devices (AREA)
JP6809880A 1980-05-22 1980-05-22 Transferring and distributing method Granted JPS56164522A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6809880A JPS56164522A (en) 1980-05-22 1980-05-22 Transferring and distributing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6809880A JPS56164522A (en) 1980-05-22 1980-05-22 Transferring and distributing method

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP11156986A Division JPS6242431A (ja) 1986-05-15 1986-05-15 半導体ウエハ処理間隔交換装置

Publications (2)

Publication Number Publication Date
JPS56164522A true JPS56164522A (en) 1981-12-17
JPH0127567B2 JPH0127567B2 (enrdf_load_stackoverflow) 1989-05-30

Family

ID=13363917

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6809880A Granted JPS56164522A (en) 1980-05-22 1980-05-22 Transferring and distributing method

Country Status (1)

Country Link
JP (1) JPS56164522A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5896475U (ja) * 1981-12-23 1983-06-30 三菱重工業株式会社 吸収冷凍機の再生器
JPS6010625A (ja) * 1983-06-29 1985-01-19 Tokyo Denshi Kagaku Kabushiki 多段プラズマ処理装置
JPS63107896A (ja) * 1986-05-19 1988-05-12 Toshiba Mach Co Ltd 気相成長装置
JPH01230246A (ja) * 1987-11-06 1989-09-13 Tel Sagami Ltd 半導体ウェハの移し換え方法及び半導体ウェハの移し換え装置並びに半導体ウェハの熱処理ボート
JPH0519840U (ja) * 1991-08-21 1993-03-12 横河ジヨンソンコントロールズ株式会社 空調用ワイヤレスセンサの壁取付け構造
JPH0677305A (ja) * 1992-07-30 1994-03-18 Mitsubishi Electric Corp 半導体処理装置及び方法並びに半導体処理装置モジュール

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5896475U (ja) * 1981-12-23 1983-06-30 三菱重工業株式会社 吸収冷凍機の再生器
JPS6010625A (ja) * 1983-06-29 1985-01-19 Tokyo Denshi Kagaku Kabushiki 多段プラズマ処理装置
JPS63107896A (ja) * 1986-05-19 1988-05-12 Toshiba Mach Co Ltd 気相成長装置
JPH01230246A (ja) * 1987-11-06 1989-09-13 Tel Sagami Ltd 半導体ウェハの移し換え方法及び半導体ウェハの移し換え装置並びに半導体ウェハの熱処理ボート
JPH0519840U (ja) * 1991-08-21 1993-03-12 横河ジヨンソンコントロールズ株式会社 空調用ワイヤレスセンサの壁取付け構造
JPH0677305A (ja) * 1992-07-30 1994-03-18 Mitsubishi Electric Corp 半導体処理装置及び方法並びに半導体処理装置モジュール

Also Published As

Publication number Publication date
JPH0127567B2 (enrdf_load_stackoverflow) 1989-05-30

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