JPS56164522A - Transferring and distributing method - Google Patents
Transferring and distributing methodInfo
- Publication number
- JPS56164522A JPS56164522A JP6809880A JP6809880A JPS56164522A JP S56164522 A JPS56164522 A JP S56164522A JP 6809880 A JP6809880 A JP 6809880A JP 6809880 A JP6809880 A JP 6809880A JP S56164522 A JPS56164522 A JP S56164522A
- Authority
- JP
- Japan
- Prior art keywords
- case
- controlling apparatus
- heating ovens
- piled
- cvd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Multi-Process Working Machines And Systems (AREA)
- General Factory Administration (AREA)
- Warehouses Or Storage Devices (AREA)
Abstract
PURPOSE:To make a series of operation processes automatic and permit an all-night unmanned operation by combining horizontal heating ovens used for diffusion, CVD and annealing process and a control operating part which loads and unloads semiconductor wafers. CONSTITUTION:For example, three horizontal heating ovens used for diffusion, CVD and annealing process are piled up to form a treating apparatus 4. A controlling apparatus 1 including a computer is disposed on one side thereof. A plurality of cassettes 2 containing a plurality of piled semiconductor wafers 3 are mounted on said controlling apparatus 1. First, several wafers 3 in the cassette 2 are vertically placed together on a pitch-changing large case 14 by using an air bearing 13. Then, by using a wafer chuck 21, the case 14 is successively loaded into cylinders CY12- CY14 of the respective heating ovens 4A-4C which are opened in the side surface of the apparatus 4. After given treatments have been finished, the operations are reversed to unload the case 14, which is returned onto the table of the controlling apparatus 1. Thereby, the operation processes are made full automatic, and the number of the necessary operators is reduced.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6809880A JPS56164522A (en) | 1980-05-22 | 1980-05-22 | Transferring and distributing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6809880A JPS56164522A (en) | 1980-05-22 | 1980-05-22 | Transferring and distributing method |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11156986A Division JPS6242431A (en) | 1986-05-15 | 1986-05-15 | Processor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56164522A true JPS56164522A (en) | 1981-12-17 |
| JPH0127567B2 JPH0127567B2 (en) | 1989-05-30 |
Family
ID=13363917
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6809880A Granted JPS56164522A (en) | 1980-05-22 | 1980-05-22 | Transferring and distributing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56164522A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5896475U (en) * | 1981-12-23 | 1983-06-30 | 三菱重工業株式会社 | Absorption chiller regenerator |
| JPS6010625A (en) * | 1983-06-29 | 1985-01-19 | Tokyo Denshi Kagaku Kabushiki | Multistage plasma processor |
| JPS63107896A (en) * | 1986-05-19 | 1988-05-12 | Toshiba Mach Co Ltd | Vapor growth device |
| JPH01230246A (en) * | 1987-11-06 | 1989-09-13 | Tel Sagami Ltd | Method and apparatus for transferring semiconductor wafer and heat treating boat for semiconductor wafer |
| JPH0519840U (en) * | 1991-08-21 | 1993-03-12 | 横河ジヨンソンコントロールズ株式会社 | Wall mounting structure for wireless sensor for air conditioning |
| JPH0677305A (en) * | 1992-07-30 | 1994-03-18 | Mitsubishi Electric Corp | Semiconductor processing equipment and method and semiconductor processing equipment module |
-
1980
- 1980-05-22 JP JP6809880A patent/JPS56164522A/en active Granted
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5896475U (en) * | 1981-12-23 | 1983-06-30 | 三菱重工業株式会社 | Absorption chiller regenerator |
| JPS6010625A (en) * | 1983-06-29 | 1985-01-19 | Tokyo Denshi Kagaku Kabushiki | Multistage plasma processor |
| JPS63107896A (en) * | 1986-05-19 | 1988-05-12 | Toshiba Mach Co Ltd | Vapor growth device |
| JPH01230246A (en) * | 1987-11-06 | 1989-09-13 | Tel Sagami Ltd | Method and apparatus for transferring semiconductor wafer and heat treating boat for semiconductor wafer |
| JPH0519840U (en) * | 1991-08-21 | 1993-03-12 | 横河ジヨンソンコントロールズ株式会社 | Wall mounting structure for wireless sensor for air conditioning |
| JPH0677305A (en) * | 1992-07-30 | 1994-03-18 | Mitsubishi Electric Corp | Semiconductor processing equipment and method and semiconductor processing equipment module |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0127567B2 (en) | 1989-05-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A131 | Notification of reasons for refusal |
Effective date: 20040309 Free format text: JAPANESE INTERMEDIATE CODE: A131 |
|
| A313 | Final decision of rejection without a dissenting response from the applicant |
Effective date: 20040720 Free format text: JAPANESE INTERMEDIATE CODE: A313 |
|
| A02 | Decision of refusal |
Effective date: 20040824 Free format text: JAPANESE INTERMEDIATE CODE: A02 |