JPS56164097A - Device for pulling up single crystal - Google Patents
Device for pulling up single crystalInfo
- Publication number
- JPS56164097A JPS56164097A JP6857980A JP6857980A JPS56164097A JP S56164097 A JPS56164097 A JP S56164097A JP 6857980 A JP6857980 A JP 6857980A JP 6857980 A JP6857980 A JP 6857980A JP S56164097 A JPS56164097 A JP S56164097A
- Authority
- JP
- Japan
- Prior art keywords
- melt
- feeding
- crucible
- sample
- fed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To obtain a high-quality and long single cystal, by equipping a melt feeder at the tip of a feeding cylinder for sample powder inserted from the outside of an insulating cylinder into its inside, feeding the melt from the feeder to a crucible.
CONSTITUTION: The platinum crucible 3 is heated by the high-frequency induction coil 9 while sample powder being fed to the crucible 3 by a batch method, to give a sample melt. A single crystal is pulled up using the pulling up rod 8 with the attached seed crystal S. With the operation, the sample powder is fed from the mouth of the sample feeding cyliner 11 to the melt feeding pipe 13, wherein the smaple is melted. The supplementary amount of the melt from the feeding pipe 13 to the crucible 3 is proportional to the speed of pulling up the rod, so that the melt level 1 is always kept at a fixed position. The mouth of the feeding cylinder 12 is closed by the stopper 12 when the sample powder is not being fed. In this way, when the melt level is always kept at the fixed position, the change in temperature is prevented, to give a high-quality crystal.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6857980A JPS56164097A (en) | 1980-05-23 | 1980-05-23 | Device for pulling up single crystal |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6857980A JPS56164097A (en) | 1980-05-23 | 1980-05-23 | Device for pulling up single crystal |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56164097A true JPS56164097A (en) | 1981-12-16 |
Family
ID=13377819
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6857980A Pending JPS56164097A (en) | 1980-05-23 | 1980-05-23 | Device for pulling up single crystal |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56164097A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01119593A (en) * | 1987-11-02 | 1989-05-11 | Mitsubishi Metal Corp | Crystal growing device |
US5087321A (en) * | 1987-12-08 | 1992-02-11 | Nkk Corporation | Manufacturing method and equipment of single silicon crystal |
US5087429A (en) * | 1988-04-28 | 1992-02-11 | Nkk Corporation | Method and apparatus for manufacturing silicon single crystals |
-
1980
- 1980-05-23 JP JP6857980A patent/JPS56164097A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01119593A (en) * | 1987-11-02 | 1989-05-11 | Mitsubishi Metal Corp | Crystal growing device |
US5087321A (en) * | 1987-12-08 | 1992-02-11 | Nkk Corporation | Manufacturing method and equipment of single silicon crystal |
US5087429A (en) * | 1988-04-28 | 1992-02-11 | Nkk Corporation | Method and apparatus for manufacturing silicon single crystals |
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