JPS6465086A - Apparatus and process for producing single crystal rod - Google Patents
Apparatus and process for producing single crystal rodInfo
- Publication number
- JPS6465086A JPS6465086A JP22225987A JP22225987A JPS6465086A JP S6465086 A JPS6465086 A JP S6465086A JP 22225987 A JP22225987 A JP 22225987A JP 22225987 A JP22225987 A JP 22225987A JP S6465086 A JPS6465086 A JP S6465086A
- Authority
- JP
- Japan
- Prior art keywords
- collar
- pulling
- single crystal
- foot end
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE:To improve the quality of a single crystal and production efficiency by retarding disturbance in the single crystal by providing in addition to a graphite cylinder a collar to a foot end of a graphite cylinder which surrounds a single crystal rod while the rod is pulled, and adjusting the height and the angle of expansion of the collar. CONSTITUTION:A polycrystalline silicon is filled in a quartz crucible 3, and a pulling chamber is evacuated. Protective gas is introduced into the pulling chamber through an introducing port 21, and the gas in the pulling chamber is replaced with the protective gas atmosphere by discharging the introduced gas from a discharging port 15. Then, the feed crystal is melted to form a melt 7 by feeding electric current to a graphite heater 6. A pulling shaft 11 is dropped thereafter and a seed crystal 10 held at the foot end of the pulling shaft is dipped once in the melt 7. When the seed crystal 10 is pulled while rotating a supporting shaft 4 and the pulling shaft 11, a single crystal rod 12 grows on the foot end of the pulling shaft 11. In order to obtain higher heat shielding effect of a collar 20, it is necessary to adjust an angle alpha of expansion of the collar 20 and to select appropriate height and diameter of the collar. The collar 20 is attached to the foot end of a graphite cylinder, and should be designed to have 5-100mm minimum clearance between the collar 20 and an internal wall or an upper end edge of the quartz crucible 3 during a period from beginning of pulling to the completion of the pulling.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62222259A JPH0639351B2 (en) | 1987-09-05 | 1987-09-05 | Apparatus and method for manufacturing single crystal ingot |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62222259A JPH0639351B2 (en) | 1987-09-05 | 1987-09-05 | Apparatus and method for manufacturing single crystal ingot |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6465086A true JPS6465086A (en) | 1989-03-10 |
JPH0639351B2 JPH0639351B2 (en) | 1994-05-25 |
Family
ID=16779586
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62222259A Expired - Lifetime JPH0639351B2 (en) | 1987-09-05 | 1987-09-05 | Apparatus and method for manufacturing single crystal ingot |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0639351B2 (en) |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05884A (en) * | 1991-06-18 | 1993-01-08 | Komatsu Electron Metals Co Ltd | Single crystal producing apparatus |
JPH05105578A (en) * | 1991-10-17 | 1993-04-27 | Shin Etsu Handotai Co Ltd | Single crystal pulling up device |
JPH05279172A (en) * | 1991-04-20 | 1993-10-26 | Komatsu Denshi Kinzoku Kk | Method and apparatus for growing crystal |
JPH0656571A (en) * | 1992-04-16 | 1994-03-01 | Sumitomo Metal Ind Ltd | Method for controlling oxygen concentration of single crystal at pulling up of single crystal and apparatus for growing single crystal used in this method |
US5575847A (en) * | 1993-11-30 | 1996-11-19 | Sumitomo Sitix Corporation | Apparatus for producing single crystals |
EP0781866A2 (en) | 1995-12-27 | 1997-07-02 | Shin-Etsu Handotai Company Limited | An apparatus and a method for growing a single crystal |
US5683505A (en) * | 1994-11-08 | 1997-11-04 | Sumitomo Sitix Corporation | Process for producing single crystals |
DE112008003609T5 (en) | 2008-01-10 | 2011-02-17 | Shin-Etsu Handotai Co., Ltd. | Device for producing a single crystal |
DE112009001431T5 (en) | 2008-07-01 | 2011-06-16 | Shin-Etsu Handotai Co., Ltd. | Single-crystal manufacturing apparatus and single-crystal manufacturing method |
KR20150060690A (en) | 2012-10-03 | 2015-06-03 | 신에쯔 한도타이 가부시키가이샤 | Silicon single crystal growing apparatus and silicon single crystal growing method |
DE112019006883T5 (en) | 2019-03-20 | 2021-11-04 | Shin-Etsu Handotai Co., Ltd. | Device for the production of single crystals |
CN114592235A (en) * | 2022-03-04 | 2022-06-07 | 徐州康信软件技术有限公司 | Single crystal furnace for integrated circuit production |
KR20220124698A (en) | 2020-01-10 | 2022-09-14 | 신에쯔 한도타이 가부시키가이샤 | single crystal manufacturing equipment |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6461383A (en) * | 1987-08-31 | 1989-03-08 | Nippon Steel Corp | Method for pulling up single crystal rod and apparatus therefor |
-
1987
- 1987-09-05 JP JP62222259A patent/JPH0639351B2/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6461383A (en) * | 1987-08-31 | 1989-03-08 | Nippon Steel Corp | Method for pulling up single crystal rod and apparatus therefor |
Cited By (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05279172A (en) * | 1991-04-20 | 1993-10-26 | Komatsu Denshi Kinzoku Kk | Method and apparatus for growing crystal |
JPH05884A (en) * | 1991-06-18 | 1993-01-08 | Komatsu Electron Metals Co Ltd | Single crystal producing apparatus |
JPH05105578A (en) * | 1991-10-17 | 1993-04-27 | Shin Etsu Handotai Co Ltd | Single crystal pulling up device |
JPH0656571A (en) * | 1992-04-16 | 1994-03-01 | Sumitomo Metal Ind Ltd | Method for controlling oxygen concentration of single crystal at pulling up of single crystal and apparatus for growing single crystal used in this method |
US5575847A (en) * | 1993-11-30 | 1996-11-19 | Sumitomo Sitix Corporation | Apparatus for producing single crystals |
US5683505A (en) * | 1994-11-08 | 1997-11-04 | Sumitomo Sitix Corporation | Process for producing single crystals |
EP0781866A2 (en) | 1995-12-27 | 1997-07-02 | Shin-Etsu Handotai Company Limited | An apparatus and a method for growing a single crystal |
DE112008003609B4 (en) | 2008-01-10 | 2018-12-20 | Shin-Etsu Handotai Co., Ltd. | Device for producing a single crystal |
DE112008003609T5 (en) | 2008-01-10 | 2011-02-17 | Shin-Etsu Handotai Co., Ltd. | Device for producing a single crystal |
US9217208B2 (en) | 2008-01-10 | 2015-12-22 | Shin-Etsu Handotai Co., Ltd. | Apparatus for producing single crystal |
DE112009001431T5 (en) | 2008-07-01 | 2011-06-16 | Shin-Etsu Handotai Co., Ltd. | Single-crystal manufacturing apparatus and single-crystal manufacturing method |
US8236104B2 (en) | 2008-07-01 | 2012-08-07 | Shin-Etsu Handotai Co., Ltd. | Single-crystal manufacturing apparatus and single-crystal manufacturing method |
DE112009001431B4 (en) | 2008-07-01 | 2019-01-31 | Shin-Etsu Handotai Co., Ltd. | Single-crystal manufacturing apparatus and single-crystal manufacturing method |
KR20150060690A (en) | 2012-10-03 | 2015-06-03 | 신에쯔 한도타이 가부시키가이샤 | Silicon single crystal growing apparatus and silicon single crystal growing method |
US9783912B2 (en) | 2012-10-03 | 2017-10-10 | Shin-Etsu Handotai Co., Ltd. | Silicon single crystal growing apparatus and method for growing silicon single crystal |
DE112013004069B4 (en) | 2012-10-03 | 2023-02-02 | Shin-Etsu Handotai Co., Ltd. | Apparatus for growing a silicon single crystal and method for growing a silicon single crystal |
DE112019006883T5 (en) | 2019-03-20 | 2021-11-04 | Shin-Etsu Handotai Co., Ltd. | Device for the production of single crystals |
US11821104B2 (en) | 2019-03-20 | 2023-11-21 | Shin-Etsu Handotai Co., Ltd. | Apparatus for manufacturing single crystal |
KR20220124698A (en) | 2020-01-10 | 2022-09-14 | 신에쯔 한도타이 가부시키가이샤 | single crystal manufacturing equipment |
DE112020006483T5 (en) | 2020-01-10 | 2022-11-17 | Shin-Etsu Handotai Co., Ltd. | Apparatus for making monocrystals |
CN114592235A (en) * | 2022-03-04 | 2022-06-07 | 徐州康信软件技术有限公司 | Single crystal furnace for integrated circuit production |
Also Published As
Publication number | Publication date |
---|---|
JPH0639351B2 (en) | 1994-05-25 |
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