JPS56155552A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS56155552A JPS56155552A JP5880480A JP5880480A JPS56155552A JP S56155552 A JPS56155552 A JP S56155552A JP 5880480 A JP5880480 A JP 5880480A JP 5880480 A JP5880480 A JP 5880480A JP S56155552 A JPS56155552 A JP S56155552A
- Authority
- JP
- Japan
- Prior art keywords
- opening
- resist mask
- semiconductor device
- psg
- breaking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE:To obtain the semiconductor device having no breaking of wire a by method wherein a resist mask is applied on an insulating film, dry etching it performed to form an opening and after a metal film having the same thickness with the insulating film is adhered thereon, the resist mask is removed to remain the metal in the opening. CONSTITUTION:The resist mask 7 is provided on the PSG 2 on an Si substrate 1, and the opening 3 is formed by dry etching. When Al layers 8, 8' are adhered thereon, the surface becomes uncontinuous because of the existence of the step part. The lift off technique is applied, and Al 8 is filled up in the opening 3 to the same thickness with the PSG 2. When an Al wiring 9 is formed next, breaking of wire is not generated because of the flatness of ground.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5880480A JPS56155552A (en) | 1980-05-02 | 1980-05-02 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5880480A JPS56155552A (en) | 1980-05-02 | 1980-05-02 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56155552A true JPS56155552A (en) | 1981-12-01 |
Family
ID=13094777
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5880480A Pending JPS56155552A (en) | 1980-05-02 | 1980-05-02 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56155552A (en) |
-
1980
- 1980-05-02 JP JP5880480A patent/JPS56155552A/en active Pending
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