JPS56147468A - Manufacture of semiconductor integrated circuit device - Google Patents

Manufacture of semiconductor integrated circuit device

Info

Publication number
JPS56147468A
JPS56147468A JP5137480A JP5137480A JPS56147468A JP S56147468 A JPS56147468 A JP S56147468A JP 5137480 A JP5137480 A JP 5137480A JP 5137480 A JP5137480 A JP 5137480A JP S56147468 A JPS56147468 A JP S56147468A
Authority
JP
Japan
Prior art keywords
film
base
layer
inverter
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5137480A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6158981B2 (enrdf_load_stackoverflow
Inventor
Tadashi Hirao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP5137480A priority Critical patent/JPS56147468A/ja
Publication of JPS56147468A publication Critical patent/JPS56147468A/ja
Publication of JPS6158981B2 publication Critical patent/JPS6158981B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0112—Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs
    • H10D84/0116—Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs the components including integrated injection logic [I2L]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe

Landscapes

  • Bipolar Transistors (AREA)
  • Bipolar Integrated Circuits (AREA)
JP5137480A 1980-04-17 1980-04-17 Manufacture of semiconductor integrated circuit device Granted JPS56147468A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5137480A JPS56147468A (en) 1980-04-17 1980-04-17 Manufacture of semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5137480A JPS56147468A (en) 1980-04-17 1980-04-17 Manufacture of semiconductor integrated circuit device

Publications (2)

Publication Number Publication Date
JPS56147468A true JPS56147468A (en) 1981-11-16
JPS6158981B2 JPS6158981B2 (enrdf_load_stackoverflow) 1986-12-13

Family

ID=12885162

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5137480A Granted JPS56147468A (en) 1980-04-17 1980-04-17 Manufacture of semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPS56147468A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63196379U (enrdf_load_stackoverflow) * 1987-06-08 1988-12-16

Also Published As

Publication number Publication date
JPS6158981B2 (enrdf_load_stackoverflow) 1986-12-13

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