JPS5614149A - Forming method for solid-state electrolyte thin film for oxygen sensor - Google Patents
Forming method for solid-state electrolyte thin film for oxygen sensorInfo
- Publication number
- JPS5614149A JPS5614149A JP8924379A JP8924379A JPS5614149A JP S5614149 A JPS5614149 A JP S5614149A JP 8924379 A JP8924379 A JP 8924379A JP 8924379 A JP8924379 A JP 8924379A JP S5614149 A JPS5614149 A JP S5614149A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- oxygen sensor
- solid
- baking
- ratio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052760 oxygen Inorganic materials 0.000 title abstract 4
- 239000001301 oxygen Substances 0.000 title abstract 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title abstract 3
- 239000003792 electrolyte Substances 0.000 title abstract 2
- 238000000034 method Methods 0.000 title abstract 2
- 239000010409 thin film Substances 0.000 title 1
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract 2
- 239000007784 solid electrolyte Substances 0.000 abstract 2
- 239000003381 stabilizer Substances 0.000 abstract 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 239000006185 dispersion Substances 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000003960 organic solvent Substances 0.000 abstract 1
- 239000000843 powder Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4073—Composition or fabrication of the solid electrolyte
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/10—Fuel cells with solid electrolytes
- H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/10—Fuel cells with solid electrolytes
- H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
- H01M8/124—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the process of manufacturing or by the material of the electrolyte
- H01M8/1246—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the process of manufacturing or by the material of the electrolyte the electrolyte consisting of oxides
- H01M8/1253—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the process of manufacturing or by the material of the electrolyte the electrolyte consisting of oxides the electrolyte containing zirconium oxide
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Manufacturing & Machinery (AREA)
- Engineering & Computer Science (AREA)
- Biochemistry (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Physics & Mathematics (AREA)
- Molecular Biology (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- General Chemical & Material Sciences (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8924379A JPS5614149A (en) | 1979-07-16 | 1979-07-16 | Forming method for solid-state electrolyte thin film for oxygen sensor |
| DE3026780A DE3026780C2 (de) | 1979-07-16 | 1980-07-15 | Verfahren zur Herstellung einer flachen Trockenelektrolytschicht eines Flachfilm-Sauerstoffmeßfühlers |
| US06/169,031 US4338356A (en) | 1979-07-16 | 1980-07-15 | Method of producing flat solid electrolyte layer of flat film type oxygen sensor |
| GB8023211A GB2054168B (en) | 1979-07-16 | 1980-07-16 | Method of producing a flat solid electrolyte layer of a flat thin film type oxygen sensor |
| FR8015698A FR2461948A1 (fr) | 1979-07-16 | 1980-07-16 | Procede de production d'une couche plate d'un electrolyte solide pour un capteur d'oxygene du type en pellicule plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8924379A JPS5614149A (en) | 1979-07-16 | 1979-07-16 | Forming method for solid-state electrolyte thin film for oxygen sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5614149A true JPS5614149A (en) | 1981-02-10 |
Family
ID=13965302
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8924379A Pending JPS5614149A (en) | 1979-07-16 | 1979-07-16 | Forming method for solid-state electrolyte thin film for oxygen sensor |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4338356A (ref) |
| JP (1) | JPS5614149A (ref) |
| DE (1) | DE3026780C2 (ref) |
| FR (1) | FR2461948A1 (ref) |
| GB (1) | GB2054168B (ref) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6439307A (en) * | 1987-08-04 | 1989-02-09 | Nippon Dia Clevite Co | Copper base sliding bearing material |
| JPH0238964A (ja) * | 1988-07-29 | 1990-02-08 | Tanaka Kikinzoku Kogyo Kk | 薄膜酸素センサの製造方法 |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6036949A (ja) * | 1983-08-09 | 1985-02-26 | Ngk Insulators Ltd | 酸素センサ素子 |
| DE3529335A1 (de) * | 1985-08-16 | 1987-02-26 | Draegerwerk Ag | Festkoerperkette zur aktivitaetsmessung mit festem ionenleiter |
| DE3723051A1 (de) * | 1987-07-11 | 1989-01-19 | Kernforschungsz Karlsruhe | Halbleiter fuer einen resistiven gassensor mit hoher ansprechgeschwindigkeit |
| US5273640A (en) * | 1990-06-11 | 1993-12-28 | Matsushita Electric Works, Ltd. | Electrochemical gas sensor |
| JPH04149064A (ja) * | 1990-10-08 | 1992-05-22 | Nissan Chem Ind Ltd | 固体電解質磁器 |
| US5273779A (en) * | 1991-12-09 | 1993-12-28 | Industrial Technology Research Institute | Method of fabricating a gas sensor and the product fabricated thereby |
| DE102012218649A1 (de) * | 2012-10-12 | 2014-04-17 | Robert Bosch Gmbh | Sensorelement zur Erfassung mindestens einer Eigenschaft eines Messgases in einem Messgasraum |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2045054A5 (en) | 1969-05-30 | 1971-02-26 | Gen Electric | High temperature oxygen measuring apparatus - with solid oxygen ion electrolyte |
| US3843400A (en) * | 1972-09-18 | 1974-10-22 | Westinghouse Electric Corp | Solid electrolyte cell |
| DE2304464C2 (de) * | 1973-01-31 | 1983-03-10 | Robert Bosch Gmbh, 7000 Stuttgart | Meßfühler für die Überwachung der Funktionsfähigkeit von Katalysatoren in Abgas |
| US4040929A (en) * | 1975-09-15 | 1977-08-09 | Universal Oil Products Company | Oxygen sensor having thin film electrolyte |
| JPS5339789A (en) | 1976-09-22 | 1978-04-11 | Nissan Motor | Oxygen sensor |
| JPS5348594A (en) * | 1976-10-14 | 1978-05-02 | Nissan Motor | Oxygen sensor |
| DE2709173A1 (de) * | 1977-03-03 | 1978-09-07 | Bosch Gmbh Robert | Messfuehler zum messen der abgaszusammensetzung |
| JPS5439191A (en) * | 1977-09-02 | 1979-03-26 | Hitachi Ltd | Oxygen detector |
| JPS5523426A (en) * | 1978-08-08 | 1980-02-19 | Toyota Motor Corp | Oxygen sensor element |
| DE2852638C2 (de) | 1978-12-06 | 1986-01-16 | Robert Bosch Gmbh, 7000 Stuttgart | Gassensor mit Cermet- Elektroden |
-
1979
- 1979-07-16 JP JP8924379A patent/JPS5614149A/ja active Pending
-
1980
- 1980-07-15 DE DE3026780A patent/DE3026780C2/de not_active Expired
- 1980-07-15 US US06/169,031 patent/US4338356A/en not_active Expired - Lifetime
- 1980-07-16 GB GB8023211A patent/GB2054168B/en not_active Expired
- 1980-07-16 FR FR8015698A patent/FR2461948A1/fr active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6439307A (en) * | 1987-08-04 | 1989-02-09 | Nippon Dia Clevite Co | Copper base sliding bearing material |
| JPH0238964A (ja) * | 1988-07-29 | 1990-02-08 | Tanaka Kikinzoku Kogyo Kk | 薄膜酸素センサの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2461948B1 (ref) | 1982-04-02 |
| GB2054168A (en) | 1981-02-11 |
| FR2461948A1 (fr) | 1981-02-06 |
| DE3026780C2 (de) | 1984-02-23 |
| DE3026780A1 (de) | 1981-01-29 |
| GB2054168B (en) | 1983-04-20 |
| US4338356A (en) | 1982-07-06 |
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