JPS56137623A - Forming of cross pattern electrode - Google Patents

Forming of cross pattern electrode

Info

Publication number
JPS56137623A
JPS56137623A JP4089380A JP4089380A JPS56137623A JP S56137623 A JPS56137623 A JP S56137623A JP 4089380 A JP4089380 A JP 4089380A JP 4089380 A JP4089380 A JP 4089380A JP S56137623 A JPS56137623 A JP S56137623A
Authority
JP
Japan
Prior art keywords
pattern
resist
mask
conductor layer
pattern electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4089380A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6328338B2 (en:Method
Inventor
Masaki Ito
Sotaro Edokoro
Hiroshi Gokan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP4089380A priority Critical patent/JPS56137623A/ja
Publication of JPS56137623A publication Critical patent/JPS56137623A/ja
Publication of JPS6328338B2 publication Critical patent/JPS6328338B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10D64/011—

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
  • Weting (AREA)
JP4089380A 1980-03-28 1980-03-28 Forming of cross pattern electrode Granted JPS56137623A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4089380A JPS56137623A (en) 1980-03-28 1980-03-28 Forming of cross pattern electrode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4089380A JPS56137623A (en) 1980-03-28 1980-03-28 Forming of cross pattern electrode

Publications (2)

Publication Number Publication Date
JPS56137623A true JPS56137623A (en) 1981-10-27
JPS6328338B2 JPS6328338B2 (en:Method) 1988-06-08

Family

ID=12593183

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4089380A Granted JPS56137623A (en) 1980-03-28 1980-03-28 Forming of cross pattern electrode

Country Status (1)

Country Link
JP (1) JPS56137623A (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58175830A (ja) * 1982-04-08 1983-10-15 Matsushita Electric Ind Co Ltd パタ−ン形成方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58175830A (ja) * 1982-04-08 1983-10-15 Matsushita Electric Ind Co Ltd パタ−ン形成方法

Also Published As

Publication number Publication date
JPS6328338B2 (en:Method) 1988-06-08

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