JPS52141442A - Method of producing etching masks - Google Patents

Method of producing etching masks

Info

Publication number
JPS52141442A
JPS52141442A JP5855976A JP5855976A JPS52141442A JP S52141442 A JPS52141442 A JP S52141442A JP 5855976 A JP5855976 A JP 5855976A JP 5855976 A JP5855976 A JP 5855976A JP S52141442 A JPS52141442 A JP S52141442A
Authority
JP
Japan
Prior art keywords
etching masks
producing etching
producing
masks
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5855976A
Other languages
Japanese (ja)
Inventor
Nobuhiro Uozumi
Youichi Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP5855976A priority Critical patent/JPS52141442A/en
Publication of JPS52141442A publication Critical patent/JPS52141442A/en
Pending legal-status Critical Current

Links

JP5855976A 1976-05-20 1976-05-20 Method of producing etching masks Pending JPS52141442A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5855976A JPS52141442A (en) 1976-05-20 1976-05-20 Method of producing etching masks

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5855976A JPS52141442A (en) 1976-05-20 1976-05-20 Method of producing etching masks

Publications (1)

Publication Number Publication Date
JPS52141442A true JPS52141442A (en) 1977-11-25

Family

ID=13087805

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5855976A Pending JPS52141442A (en) 1976-05-20 1976-05-20 Method of producing etching masks

Country Status (1)

Country Link
JP (1) JPS52141442A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017120909A (en) * 2015-12-28 2017-07-06 英▲穏▼達科技股▲ふん▼有限公司Ｉｎｖｅｎｔｅｃ Ｓｏｌａｒ ＥｎｅｒｇｙＣｏｒｐｏｒａｔｉｏｎ Method of forming bifacial solar cell structure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017120909A (en) * 2015-12-28 2017-07-06 英▲穏▼達科技股▲ふん▼有限公司Ｉｎｖｅｎｔｅｃ Ｓｏｌａｒ ＥｎｅｒｇｙＣｏｒｐｏｒａｔｉｏｎ Method of forming bifacial solar cell structure

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