JPS5370674A - Method of producing photomask - Google Patents
Method of producing photomaskInfo
- Publication number
- JPS5370674A JPS5370674A JP14565676A JP14565676A JPS5370674A JP S5370674 A JPS5370674 A JP S5370674A JP 14565676 A JP14565676 A JP 14565676A JP 14565676 A JP14565676 A JP 14565676A JP S5370674 A JPS5370674 A JP S5370674A
- Authority
- JP
- Japan
- Prior art keywords
- producing photomask
- photomask
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14565676A JPS5370674A (en) | 1976-12-06 | 1976-12-06 | Method of producing photomask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14565676A JPS5370674A (en) | 1976-12-06 | 1976-12-06 | Method of producing photomask |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5370674A true JPS5370674A (en) | 1978-06-23 |
Family
ID=15390046
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14565676A Pending JPS5370674A (en) | 1976-12-06 | 1976-12-06 | Method of producing photomask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5370674A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5931027A (en) * | 1982-08-13 | 1984-02-18 | Seiko Epson Corp | Manufacture of x-ray mask |
JPS62155515A (en) * | 1985-12-27 | 1987-07-10 | Mitsubishi Electric Corp | Mask for x-ray exposure and manufacture thereof |
JPH0473765A (en) * | 1990-07-16 | 1992-03-09 | Toshiba Corp | X-ray transmission film and its manufacture |
-
1976
- 1976-12-06 JP JP14565676A patent/JPS5370674A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5931027A (en) * | 1982-08-13 | 1984-02-18 | Seiko Epson Corp | Manufacture of x-ray mask |
JPS62155515A (en) * | 1985-12-27 | 1987-07-10 | Mitsubishi Electric Corp | Mask for x-ray exposure and manufacture thereof |
JPH0328047B2 (en) * | 1985-12-27 | 1991-04-17 | Mitsubishi Electric Corp | |
JPH0473765A (en) * | 1990-07-16 | 1992-03-09 | Toshiba Corp | X-ray transmission film and its manufacture |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CS191329B2 (en) | Method of producing m-phenoxybenzaldehyde | |
JPS5343021A (en) | Method of producing molybdenummiron | |
CS192588B2 (en) | Method of producing derivatives of 3-chlorocephalosporin | |
JPS5351253A (en) | Method of forming patterns | |
JPS5336391A (en) | Method of producing can | |
JPS5370674A (en) | Method of producing photomask | |
JPS5318414A (en) | Method of producing tangstennbased parts | |
JPS52120269A (en) | Method of forming | |
JPS5358596A (en) | Method of making polyallylpolyamines | |
JPS5378229A (en) | Method of producing canthaxanthene | |
JPS52128380A (en) | Method of producing 22chloronicotinamides | |
JPS52120084A (en) | Method of producing can | |
JPS5334939A (en) | Method of producing pellicle | |
JPS5330774A (en) | Method of producing micropattern | |
JPS52123334A (en) | Method of forming patterns | |
JPS5328111A (en) | Method of producing dimethlheptenone | |
JPS52122314A (en) | Method of producing 33deoxyy33iodooddglucose | |
JPS52131511A (en) | Method of producing 33deoxyy33iodooddglucose | |
JPS52108504A (en) | Method of producing turboofans | |
JPS5340392A (en) | Method of producing can | |
CS188279B2 (en) | Method of producing new 9-alkylaminoerythromycines | |
JPS52146616A (en) | Method of producing photosensitive material | |
JPS5295572A (en) | Method of making vvpulley | |
JPS5289195A (en) | Method of making polylanolinlactam | |
JPS5347323A (en) | Producing method of reducing materials |