JPS5370674A - Method of producing photomask - Google Patents

Method of producing photomask

Info

Publication number
JPS5370674A
JPS5370674A JP14565676A JP14565676A JPS5370674A JP S5370674 A JPS5370674 A JP S5370674A JP 14565676 A JP14565676 A JP 14565676A JP 14565676 A JP14565676 A JP 14565676A JP S5370674 A JPS5370674 A JP S5370674A
Authority
JP
Japan
Prior art keywords
producing photomask
photomask
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14565676A
Other languages
Japanese (ja)
Inventor
Masaomi Kameyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Chemical Industrial Co Ltd
Original Assignee
Nippon Chemical Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Chemical Industrial Co Ltd filed Critical Nippon Chemical Industrial Co Ltd
Priority to JP14565676A priority Critical patent/JPS5370674A/en
Publication of JPS5370674A publication Critical patent/JPS5370674A/en
Pending legal-status Critical Current

Links

JP14565676A 1976-12-06 1976-12-06 Method of producing photomask Pending JPS5370674A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14565676A JPS5370674A (en) 1976-12-06 1976-12-06 Method of producing photomask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14565676A JPS5370674A (en) 1976-12-06 1976-12-06 Method of producing photomask

Publications (1)

Publication Number Publication Date
JPS5370674A true JPS5370674A (en) 1978-06-23

Family

ID=15390046

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14565676A Pending JPS5370674A (en) 1976-12-06 1976-12-06 Method of producing photomask

Country Status (1)

Country Link
JP (1) JPS5370674A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5931027A (en) * 1982-08-13 1984-02-18 Seiko Epson Corp Manufacture of x-ray mask
JPS62155515A (en) * 1985-12-27 1987-07-10 Mitsubishi Electric Corp Mask for x-ray exposure and manufacture thereof
JPH0473765A (en) * 1990-07-16 1992-03-09 Toshiba Corp X-ray transmission film and its manufacture

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5931027A (en) * 1982-08-13 1984-02-18 Seiko Epson Corp Manufacture of x-ray mask
JPS62155515A (en) * 1985-12-27 1987-07-10 Mitsubishi Electric Corp Mask for x-ray exposure and manufacture thereof
JPH0328047B2 (en) * 1985-12-27 1991-04-17 Mitsubishi Electric Corp
JPH0473765A (en) * 1990-07-16 1992-03-09 Toshiba Corp X-ray transmission film and its manufacture

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