JPS56124231A - Method for diffused junction - Google Patents
Method for diffused junctionInfo
- Publication number
- JPS56124231A JPS56124231A JP2825980A JP2825980A JPS56124231A JP S56124231 A JPS56124231 A JP S56124231A JP 2825980 A JP2825980 A JP 2825980A JP 2825980 A JP2825980 A JP 2825980A JP S56124231 A JPS56124231 A JP S56124231A
- Authority
- JP
- Japan
- Prior art keywords
- deposited layer
- electrolyte
- stick
- adhesive strength
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P10/00—Bonding of wafers, substrates or parts of devices
Landscapes
- Pressure Welding/Diffusion-Bonding (AREA)
Abstract
PURPOSE:To easily obtain a diffused junction by a method by a method wherein, on the surface of one of metals, the deposited layer of the other metal is formed in an electrolyte and the heterologeous metals are pressure-welded together while said deposited layer is in an activated condition. CONSTITUTION:In the electrolyte 3 of sulfamic acid Ni, the deposited layer 4 of Ni is formed on a Cu stick using an Ni stick 1 as a positive electrode and a Cu stick 2 as a negative electrode using DC4A/cm<2> at the solution temperature of 60 deg.C and pH4. Immediately after the current has been shut off, the sticks 1 and 2 are pressure welded through the intermediary of the deposited layer. When the pressurizing force is increased to above 10kg/cm<2>, the sticks are tightly fixed and are saturated at 17kg/cm<2> or more, thereby enabling to obtain the adhesive strength of 10kg/cm<2>. In the process of the Ni deposition, when an electrolytic current is multipled by a pulse current, the concentration of the electrolyte in the front of the Ni deposited layer is homogenized, a clean deposited layer is obtained and also an excellent junction can be obtained. Besides, when the above is heated up at or around the temperature of crystallization after performance of the pressure welding, the adhesive strength is increased. For example, when the above is processed at the temperature of 500 deg.C, the adhesive strength of 23kg/cm<2> can be obtained.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55028259A JPS5949111B2 (en) | 1980-03-05 | 1980-03-05 | Diffusion bonding method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55028259A JPS5949111B2 (en) | 1980-03-05 | 1980-03-05 | Diffusion bonding method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56124231A true JPS56124231A (en) | 1981-09-29 |
| JPS5949111B2 JPS5949111B2 (en) | 1984-11-30 |
Family
ID=12243564
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55028259A Expired JPS5949111B2 (en) | 1980-03-05 | 1980-03-05 | Diffusion bonding method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5949111B2 (en) |
-
1980
- 1980-03-05 JP JP55028259A patent/JPS5949111B2/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5949111B2 (en) | 1984-11-30 |
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