JPS5578531A - Semiconductor substrate - Google Patents
Semiconductor substrateInfo
- Publication number
- JPS5578531A JPS5578531A JP15225678A JP15225678A JPS5578531A JP S5578531 A JPS5578531 A JP S5578531A JP 15225678 A JP15225678 A JP 15225678A JP 15225678 A JP15225678 A JP 15225678A JP S5578531 A JPS5578531 A JP S5578531A
- Authority
- JP
- Japan
- Prior art keywords
- line
- semiconductor substrate
- pattern
- groove
- during heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To prevent a crystal defect from occurring during heat treating process by forming a stress concentrated line on one face of a semiconductor substrate correspondingly to a scribe line.
CONSTITUTION: A groove 2 (2W20μ deep) is formed as a stress concentrated line on a semiconductor substrate 1 in the pitch same or integer times as great as the pitch of scribe line for a mask pattern of an element to make on the substrate 1. Next, an oxidized film 3 is formed, a resist is fixed on the film 3, and a pattern is again formed by the first mask 4 provided with a pattern capable of masking with the groove 2. By arranging such, a crystal defect to occur during heat treatment can be concentrated in the line, and a dispersion of the element characteristics can thus be reduced.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15225678A JPS5578531A (en) | 1978-12-08 | 1978-12-08 | Semiconductor substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15225678A JPS5578531A (en) | 1978-12-08 | 1978-12-08 | Semiconductor substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5578531A true JPS5578531A (en) | 1980-06-13 |
Family
ID=15536497
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15225678A Pending JPS5578531A (en) | 1978-12-08 | 1978-12-08 | Semiconductor substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5578531A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58225418A (en) * | 1982-06-23 | 1983-12-27 | Nec Corp | Diagnosis controlling system of input and output device |
JPS62176159A (en) * | 1986-01-29 | 1987-08-01 | Fuji Xerox Co Ltd | Manufacture of image sensor |
EP1281564A1 (en) * | 2000-05-11 | 2003-02-05 | Hiroshi Kamiki | Child seat |
-
1978
- 1978-12-08 JP JP15225678A patent/JPS5578531A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58225418A (en) * | 1982-06-23 | 1983-12-27 | Nec Corp | Diagnosis controlling system of input and output device |
JPS6221148B2 (en) * | 1982-06-23 | 1987-05-11 | Nippon Electric Co | |
JPS62176159A (en) * | 1986-01-29 | 1987-08-01 | Fuji Xerox Co Ltd | Manufacture of image sensor |
EP1281564A1 (en) * | 2000-05-11 | 2003-02-05 | Hiroshi Kamiki | Child seat |
EP1281564A4 (en) * | 2000-05-11 | 2005-10-12 | Hiroshi Kamiki | Child seat |
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