JPS5286076A - Pattern formation of semiconductor element on diazo plate - Google Patents
Pattern formation of semiconductor element on diazo plateInfo
- Publication number
- JPS5286076A JPS5286076A JP257676A JP257676A JPS5286076A JP S5286076 A JPS5286076 A JP S5286076A JP 257676 A JP257676 A JP 257676A JP 257676 A JP257676 A JP 257676A JP S5286076 A JPS5286076 A JP S5286076A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor element
- diazo
- plate
- pattern formation
- diazo compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
PURPOSE: To obtain colored pattern of sharp and high contrast for the edge part with reduced light intensity by forming selectively mask layer on diazo compound layer on the palte for the formation of semiconductor element pattern and by developing the diazo compound in order to form pattern of semiconductore element on the diazo compound layer.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP257676A JPS5286076A (en) | 1976-01-12 | 1976-01-12 | Pattern formation of semiconductor element on diazo plate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP257676A JPS5286076A (en) | 1976-01-12 | 1976-01-12 | Pattern formation of semiconductor element on diazo plate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5286076A true JPS5286076A (en) | 1977-07-16 |
Family
ID=11533188
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP257676A Pending JPS5286076A (en) | 1976-01-12 | 1976-01-12 | Pattern formation of semiconductor element on diazo plate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5286076A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0334423A (en) * | 1989-06-30 | 1991-02-14 | Toshiba Corp | Forming method of aperture part for semiconductor element |
-
1976
- 1976-01-12 JP JP257676A patent/JPS5286076A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0334423A (en) * | 1989-06-30 | 1991-02-14 | Toshiba Corp | Forming method of aperture part for semiconductor element |
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